Rudolph Technologies, Inc.

Organization

WILMINGTON, MA, US

Ticker Symbols

NYSE:RTEC

INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL
Business Address
16 JONSPIN ROAD WILMINGTON MA 01887 978-253-6200
Mailing Address
16 JONSPIN ROAD WILMINGTON MA 01887
State Location
MA
State of Incorporation
DE

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Substrate handling and identification mechanism
- Patent number 10,664,714
- Issue date May 26, 2020
- Rudolph Technologies, Inc.
- Kevin Barr
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection of substrates
- Patent number 10,553,504
- Issue date Feb 4, 2020
- Rudolph Technologies, Inc.
- Gurvinder Singh
- G01 - MEASURING TESTING
Information Patent Grant
Focus adjustment for surface part inspection
- Patent number 10,412,311
- Issue date Sep 10, 2019
- Rudolph Technologies, Inc.
- Robert Bishop
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Opto-acoustic metrology of signal attenuating structures
- Patent number 10,209,300
- Issue date Feb 19, 2019
- Rudolph Technologies, Inc.
- Michael Kotelyanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration of semiconductor metrology systems
- Patent number 10,173,249
- Issue date Jan 8, 2019
- Rudolph Technologies, Inc.
- Jian Ding
- B08 - CLEANING
Information Patent Grant
System and method of characterizing micro-fabrication processes
- Patent number 10,024,804
- Issue date Jul 17, 2018
- Rudolph Technologies, Inc.
- John Thornell
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus to assist the processing of deformed substrates
- Patent number 10,014,228
- Issue date Jul 3, 2018
- Rudolph Technologies, Inc.
- James H. Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-destructive acoustic metrology for void detection
- Patent number 9,991,176
- Issue date Jun 5, 2018
- Rudolph Technologies, Inc.
- Manjusha Mehendale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Assessing alignment of top and bottom ends of TSVs and characterizi...
- Patent number 9,952,041
- Issue date Apr 24, 2018
- Rudolph Technologies, Inc.
- Rajiv Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flying sensor head
- Patent number 9,772,183
- Issue date Sep 26, 2017
- RUDOLPH TECHNOLOGIES INC.
- Wojciech Stefanczyk
- G01 - MEASURING TESTING
Information Patent Grant
Wafer shape thickness and trench measurement
- Patent number 9,714,825
- Issue date Jul 25, 2017
- Rudolph Technologies, Inc.
- David S. Marx
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring and assessing a probe card with an inspection d...
- Patent number 9,684,052
- Issue date Jun 20, 2017
- Rudolph Technologies, Inc.
- Greg Olmstead
- G01 - MEASURING TESTING
Information Patent Grant
Inspection of substrates using calibration and imaging
- Patent number 9,664,625
- Issue date May 30, 2017
- Rudolph Technologies, Inc.
- Wei Zhou
- G01 - MEASURING TESTING
Information Patent Grant
System and method of characterizing micro-fabrication processes
- Patent number 9,658,169
- Issue date May 23, 2017
- Rudolph Technologies, Inc.
- John Thornell
- G01 - MEASURING TESTING
Information Patent Grant
Probe card analysis system and method
- Patent number 9,638,782
- Issue date May 2, 2017
- Rudolph Technologies, Inc.
- Eric Endres
- G01 - MEASURING TESTING
Information Patent Grant
Planar motor system with increased efficiency
- Patent number 9,625,832
- Issue date Apr 18, 2017
- Rudolph Technologies, Inc.
- J. Casey Donaher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
On-axis focus sensor and method
- Patent number 9,594,230
- Issue date Mar 14, 2017
- Rudolph Technologies, Inc.
- Dennis L. Ohren
- G02 - OPTICS
Information Patent Grant
System for directly measuring the depth of a high aspect ratio etch...
- Patent number 9,587,932
- Issue date Mar 7, 2017
- Rudolph Technologies, Inc.
- David S. Marx
- G01 - MEASURING TESTING
Information Patent Grant
Optical acoustic substrate assessment system and method
- Patent number 9,576,862
- Issue date Feb 21, 2017
- Rudolph Technologies, Inc.
- Todd Murray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection device with vertically moveable assembly
- Patent number 9,535,089
- Issue date Jan 3, 2017
- Rudolph Technologies, Inc.
- Gary Mark Gunderson
- G01 - MEASURING TESTING
Information Patent Grant
Automated wafer defect inspection system and a process of performin...
- Patent number 9,464,992
- Issue date Oct 11, 2016
- Rudolph Technologies, Inc.
- Jeffrey L. O'Dell
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Edge grip substrate handler
- Patent number 9,460,953
- Issue date Oct 4, 2016
- Rudolph Technologies, Inc.
- Isao Sato
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate handler
- Patent number 9,437,467
- Issue date Sep 6, 2016
- Rudolph Technologies, Inc.
- Troy Palm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer inversion mechanism
- Patent number 9,431,282
- Issue date Aug 30, 2016
- Rudolph Technologies, Inc.
- Troy Palm
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Scratch detection method and apparatus
- Patent number 9,406,115
- Issue date Aug 2, 2016
- Rudolph Technologies, Inc.
- Wei Zhou
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning operation with concurrent focus and inspection
- Patent number 9,402,036
- Issue date Jul 26, 2016
- Rudolph Technologies, Inc.
- Robert Bishop
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Support for semiconductor substrate
- Patent number 9,401,299
- Issue date Jul 26, 2016
- Rudolph Technologies, Inc.
- Ralph Sowden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated wafer defect inspection system and a process of performin...
- Patent number 9,337,071
- Issue date May 10, 2016
- Rudolph Technologies, Inc.
- Jeffrey L. O'Dell
- G01 - MEASURING TESTING
Information Patent Grant
Position sensitive detection optimization
- Patent number 9,140,601
- Issue date Sep 22, 2015
- Rudolph Technologies, Inc.
- Manjusha Mehendale
- G01 - MEASURING TESTING
Information Patent Grant
Wafer edge inspection illumination system
- Patent number 9,062,859
- Issue date Jun 23, 2015
- Rudolph Technologies, Inc.
- Christopher Voges
- F21 - LIGHTING

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Patents Applicationslast 30 patents

Information Patent Application
WAFER-LEVEL PACKAGE ASSEMBLY HANDLING
- Publication number 20220121676
- Publication date Apr 21, 2022
- Rudolph Technologies, Inc.
- Kevin Barr
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER-LEVEL PACKAGE ASSEMBLY HANDLING
- Publication number 20220012261
- Publication date Jan 13, 2022
- Rudolph Technologies, Inc.
- Kevin Barr
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER CRACK DETECTION
- Publication number 20200225278
- Publication date Jul 16, 2020
- Rudolph Technologies, Inc.
- Hartmut SEEGER
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER INSPECTION SYSTEM INCLUDING A LASER TRIANGULATION SENSOR
- Publication number 20200191557
- Publication date Jun 18, 2020
- Rudolph Technologies, Inc.
- John Schaefer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER SINGULATION PROCESS CONTROL
- Publication number 20190019728
- Publication date Jan 17, 2019
- Rudolph Technologies, Inc.
- Wayne Fitzgerald
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION OF SUBSTRATES
- Publication number 20180277452
- Publication date Sep 27, 2018
- Rudolph Technologies, Inc.
- Gurvinder Singh
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR DEVICE INSPECTION OF METALLIC DISCONTINUITIES
- Publication number 20180275063
- Publication date Sep 27, 2018
- Rudolph Technologies, Inc.
- Gurvinder Singh
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE HANDLING AND IDENTIFICATION MECHANISM
- Publication number 20180173984
- Publication date Jun 21, 2018
- Rudolph Technologies, Inc.
- Kevin Barr
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF MEASURING AND ASSESSING A PROBE CARD WITH AN INSPECTION D...
- Publication number 20170276758
- Publication date Sep 28, 2017
- Rudolph Technologies, Inc.
- Greg Olmstead
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD OF CHARACTERIZING MICRO-FABRICATION PROCESSES
- Publication number 20170254757
- Publication date Sep 7, 2017
- Rudolph Technologies, Inc.
- John Thornell
- G01 - MEASURING TESTING
Information Patent Application
OPTO-ACOUSTIC METROLOGY OF SIGNAL ATTENUATING STRUCTURES
- Publication number 20170141004
- Publication date May 18, 2017
- Rudolph Technologies, Inc.
- Michael Kotelyanskii
- G01 - MEASURING TESTING
Information Patent Application
VOLUMETRIC SUBSTRATE SCANNER
- Publication number 20170045463
- Publication date Feb 16, 2017
- Rudolph Technologies, Inc.
- Holger Wenz
- G01 - MEASURING TESTING
Information Patent Application
HIGH SPEED AUTOFOCUS SYSTEM
- Publication number 20160352997
- Publication date Dec 1, 2016
- RUDOLPH TECHNOLOGIES, INC.
- Robert Bishop
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR DIRECTLY MEASURING THE DEPTH OF A HIGH ASPECT RATIO ETCH...
- Publication number 20160238378
- Publication date Aug 18, 2016
- Rudolph Technologies, Inc.
- David S. Marx
- G01 - MEASURING TESTING
Information Patent Application
Automated Wafer Defect Inspection System and a Process of Performin...
- Publication number 20160223470
- Publication date Aug 4, 2016
- Rudolph Technologies, Inc.
- Jeffrey L. O'Dell
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus to Assist the Processing of Deformed Substrates
- Publication number 20160148831
- Publication date May 26, 2016
- Rudolph Technologies, Inc.
- James H. Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALIBRATION OF SEMICONDUCTOR METROLOGY SYSTEMS
- Publication number 20160101445
- Publication date Apr 14, 2016
- Rudolph Technologies, Inc.
- Jian Ding
- B08 - CLEANING
Information Patent Application
FLEXIBLE HANDLING SYSTEM FOR SEMICONDUCTOR SUBSTRATES
- Publication number 20160042987
- Publication date Feb 11, 2016
- Rudolph Technologies, Inc.
- Dennis Benson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE GRIP SUBSTRATE HANDLER
- Publication number 20150371886
- Publication date Dec 24, 2015
- Rudolph Technologies, Inc.
- Isao Sato
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
METHOD OF CHARACTERIZING MICROFABRICATION PROCESS AND PRODUCTS THEREOF
- Publication number 20150362314
- Publication date Dec 17, 2015
- RUDOLPH TECHNOLOGIES, INC.
- Rajiv Roy
- G01 - MEASURING TESTING
Information Patent Application
FLYING SENSOR HEAD
- Publication number 20150323320
- Publication date Nov 12, 2015
- Rudolph Technologies Inc.
- Wojciech STEFANCZYK
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD OF CHARACTERIZING MICRO-FABRICATION PROCESSES
- Publication number 20150316487
- Publication date Nov 5, 2015
- Rudolph Technologies, Inc.
- John Thornell
- G01 - MEASURING TESTING
Information Patent Application
Planar Motor System With Increased Efficiency
- Publication number 20150309425
- Publication date Oct 29, 2015
- Rudolph Technologies, Inc.
- J. Casey Donaher
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Multiple-Blade Device for Substrate Edge Protection during Photolit...
- Publication number 20150277239
- Publication date Oct 1, 2015
- Rudolph Technologies, Inc.
- James H. Greer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INSPECTION OF SUBSTRATES USING CALIBRATION AND IMAGING
- Publication number 20150253256
- Publication date Sep 10, 2015
- Rudolph Technologies, Inc.
- Wei Zhou
- G01 - MEASURING TESTING
Information Patent Application
Blade for Substrate Edge Protection During Photolithography
- Publication number 20150234281
- Publication date Aug 20, 2015
- Rudolph Technologies, Inc.
- Steven D. Gardner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MEASURING AND ASSESSING A PROBE CARD WITH AN INSPECTION D...
- Publication number 20150054534
- Publication date Feb 26, 2015
- Rudolph Technologies, Inc.
- Greg Olmstead
- G01 - MEASURING TESTING
Information Patent Application
MULTIPLE MEASUREMENT TECHNIQUES INCLUDING FOCUSED BEAM SCATTEROMETR...
- Publication number 20140375983
- Publication date Dec 25, 2014
- Rudolph Technologies, Inc.
- Robert Gregory Wolf
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD OF CHARACTERIZING MICRO-FABRICATION PROCESSES
- Publication number 20140320635
- Publication date Oct 30, 2014
- Rudolph Technologies, Inc.
- John Thornell
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE HANDLER
- Publication number 20140314535
- Publication date Oct 23, 2014
- Rudolph Technologies, Inc.
- Troy Palm
- H01 - BASIC ELECTRIC ELEMENTS

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Trademarklast 30 trademarks

Information Trademark
88640856 - ONTO INNOVATION
- Serial number 88640856
- Registration number 6479639
- Filing date Oct 3, 2019
- ONTO INNOVATION INC.
- 7 - Machines and machine tools
Information Trademark
88341825 - ANALYZEWORX
- Serial number 88341825
- Filing date Mar 15, 2019
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88339719 - NOVUSEDGE
- Serial number 88339719
- Registration number 6059853
- Filing date Mar 14, 2019
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88168607 - STEPFAST
- Serial number 88168607
- Registration number 6289921
- Filing date Oct 25, 2018
- ONTO INNOVATION INC.
- 7 - Machines and machine tools
Information Trademark
88039086 - FASTSTEP
- Serial number 88039086
- Filing date Jul 16, 2018
- Rudolph Technologies, Inc.
- 7 - Machines and machine tools
Information Trademark
87752951 - VOYAGER
- Serial number 87752951
- Filing date Jan 12, 2018
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87567438 - TRUEBUMP
- Serial number 87567438
- Registration number 5885889
- Filing date Aug 14, 2017
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87565309 - STEPPERMATCH
- Serial number 87565309
- Registration number 5593159
- Filing date Aug 11, 2017
- Rudolph Technologies, Inc.
- 42 - Scientific and technological services and research and design relating thereto
Information Trademark
87103001 - INTELLIGENT DIGITAL SIGNATURE
- Serial number 87103001
- Filing date Jul 13, 2016
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87102992 - ACTIONABLE DATA. NOW.
- Serial number 87102992
- Filing date Jul 13, 2016
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87103005 - THREAD SYNCHRONIZATION ENGINE
- Serial number 87103005
- Filing date Jul 13, 2016
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87087046 - DISCOVER VIZ
- Serial number 87087046
- Registration number 5408312
- Filing date Jun 28, 2016
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87087144 - INTELLIGENT DIGITAL THREADING
- Serial number 87087144
- Filing date Jun 28, 2016
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87065500 - DRAGONFLY
- Serial number 87065500
- Registration number 5408263
- Filing date Jun 9, 2016
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
87013869 - CLEARFIND
- Serial number 87013869
- Registration number 5775893
- Filing date Apr 26, 2016
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86924961 - FIREFLY
- Serial number 86924961
- Registration number 5392368
- Filing date Mar 1, 2016
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86634835 - INTELLICHAIN
- Serial number 86634835
- Filing date May 19, 2015
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86435331 - AERO
- Serial number 86435331
- Filing date Oct 27, 2014
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86042410 - SONUS
- Serial number 86042410
- Registration number 4846535
- Filing date Aug 20, 2013
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85857079 - JETSTEP
- Serial number 85857079
- Registration number 4539375
- Filing date Feb 22, 2013
- Rudolph Technologies, Inc.
- 7 - Machines and machine tools
Information Trademark
85795170 - TRUEADC
- Serial number 85795170
- Registration number 4354089
- Filing date Dec 5, 2012
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
85744551 - PROCESS SENTINEL
- Serial number 85744551
- Registration number 4349572
- Filing date Oct 3, 2012
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77720775 - DISCOVER SOLAR
- Serial number 77720775
- Registration number 4210357
- Filing date Apr 23, 2009
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77508444 - PRECISIONPOINT
- Serial number 77508444
- Registration number 3579491
- Filing date Jun 26, 2008
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77273013 - EXPLORER
- Serial number 77273013
- Registration number 3498125
- Filing date Sep 6, 2007
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77189720 - RUDOLPH
- Serial number 77189720
- Registration number 3444028
- Filing date May 24, 2007
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77189724 - RUDOLPH
- Serial number 77189724
- Registration number 3444029
- Filing date May 24, 2007
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
77136418 - DISCOVER
- Serial number 77136418
- Registration number 3496573
- Filing date Mar 21, 2007
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75259026 - SPECTRALASER
- Serial number 75259026
- Registration number 2248114
- Filing date Mar 18, 1997
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75259027 - VANGUARD
- Serial number 75259027
- Registration number 2312196
- Filing date Mar 18, 1997
- Rudolph Technologies, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

Rudolph Technologies, Inc.

Organization

Ticker Symbols

Business Address

Mailing Address

State Location

State of Incorporation

Patents Grantslast 30 patents

Substrate handling and identification mechanism

Inspection of substrates

Focus adjustment for surface part inspection

Opto-acoustic metrology of signal attenuating structures

Calibration of semiconductor metrology systems

System and method of characterizing micro-fabrication processes

Method and apparatus to assist the processing of deformed substrates

Non-destructive acoustic metrology for void detection

Assessing alignment of top and bottom ends of TSVs and characterizi...

Flying sensor head

Wafer shape thickness and trench measurement

Method of measuring and assessing a probe card with an inspection d...

Inspection of substrates using calibration and imaging

System and method of characterizing micro-fabrication processes

Probe card analysis system and method

Planar motor system with increased efficiency

On-axis focus sensor and method

System for directly measuring the depth of a high aspect ratio etch...

Optical acoustic substrate assessment system and method

Inspection device with vertically moveable assembly

Automated wafer defect inspection system and a process of performin...

Edge grip substrate handler

Substrate handler

Wafer inversion mechanism

Scratch detection method and apparatus

Scanning operation with concurrent focus and inspection

Support for semiconductor substrate

Automated wafer defect inspection system and a process of performin...

Position sensitive detection optimization

Wafer edge inspection illumination system

Patents Applicationslast 30 patents

WAFER-LEVEL PACKAGE ASSEMBLY HANDLING

WAFER-LEVEL PACKAGE ASSEMBLY HANDLING

WAFER CRACK DETECTION

WAFER INSPECTION SYSTEM INCLUDING A LASER TRIANGULATION SENSOR

WAFER SINGULATION PROCESS CONTROL

INSPECTION OF SUBSTRATES

SEMICONDUCTOR DEVICE INSPECTION OF METALLIC DISCONTINUITIES

SUBSTRATE HANDLING AND IDENTIFICATION MECHANISM

METHOD OF MEASURING AND ASSESSING A PROBE CARD WITH AN INSPECTION D...

SYSTEM AND METHOD OF CHARACTERIZING MICRO-FABRICATION PROCESSES

OPTO-ACOUSTIC METROLOGY OF SIGNAL ATTENUATING STRUCTURES

VOLUMETRIC SUBSTRATE SCANNER

HIGH SPEED AUTOFOCUS SYSTEM

SYSTEM FOR DIRECTLY MEASURING THE DEPTH OF A HIGH ASPECT RATIO ETCH...

Automated Wafer Defect Inspection System and a Process of Performin...

Method and Apparatus to Assist the Processing of Deformed Substrates

CALIBRATION OF SEMICONDUCTOR METROLOGY SYSTEMS

FLEXIBLE HANDLING SYSTEM FOR SEMICONDUCTOR SUBSTRATES

EDGE GRIP SUBSTRATE HANDLER

METHOD OF CHARACTERIZING MICROFABRICATION PROCESS AND PRODUCTS THEREOF

FLYING SENSOR HEAD

SYSTEM AND METHOD OF CHARACTERIZING MICRO-FABRICATION PROCESSES

Planar Motor System With Increased Efficiency

Multiple-Blade Device for Substrate Edge Protection during Photolit...

INSPECTION OF SUBSTRATES USING CALIBRATION AND IMAGING

Blade for Substrate Edge Protection During Photolithography

METHOD OF MEASURING AND ASSESSING A PROBE CARD WITH AN INSPECTION D...

MULTIPLE MEASUREMENT TECHNIQUES INCLUDING FOCUSED BEAM SCATTEROMETR...

SYSTEM AND METHOD OF CHARACTERIZING MICRO-FABRICATION PROCESSES

SUBSTRATE HANDLER

Trademarklast 30 trademarks

88640856 - ONTO INNOVATION

88341825 - ANALYZEWORX

88339719 - NOVUSEDGE

88168607 - STEPFAST

88039086 - FASTSTEP

87752951 - VOYAGER

87567438 - TRUEBUMP

87565309 - STEPPERMATCH

87103001 - INTELLIGENT DIGITAL SIGNATURE

87102992 - ACTIONABLE DATA. NOW.