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TIANJIN, CN
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High precision air bearing stage with capability of parasitic error...
Patent number
11,784,084
Issue date
Oct 10, 2023
SANYING MOTIONCONTORL(TIANJIN) INSTRUMENT CO., LTD.
Ying Xu
H01 - BASIC ELECTRIC ELEMENTS
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TWO DEGREE-OF-FREEDOM NANO MOTION CONTROL AND POSITIONING STAGE WIT...
Publication number
20200206859
Publication date
Jul 2, 2020
GUANGDONG UNIVERSITY OF TECHNOLOGY
Ying XU
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR