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last 30 patents
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Patent Grant
Resonant MEMS device that detects photons, particles and small forces
Patent number
7,910,390
Issue date
Mar 22, 2011
ScanNanoTek Oy
Andrei Pavlov
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
MEMS SOLAR CELL DEVICE AND ARRAY
Publication number
20110277808
Publication date
Nov 17, 2011
ScanNanoTek Oy
Andrei J. Pavlov
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROMECHANICAL SYSTEMS, WAVEGUIDES AND METHODS OF PRODUCTION
Publication number
20110133597
Publication date
Jun 9, 2011
ScanNanoTek Oy
Andrei J. Pavlov
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
RESONANT MEMS DEVICE THAT DETECTS PHOTONS, PARTICLES AND SMALL FORCES
Publication number
20090206953
Publication date
Aug 20, 2009
ScanNanoTek Oy
Andrei Pavlov
H03 - BASIC ELECTRONIC CIRCUITRY
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