Scientific Systems Research Limited

Organization

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Method for transferring process control models between plasma proce...
- Patent number 7,113,842
- Issue date Sep 26, 2006
- Scientific Systems Research Limited
- Kevin O'Leary
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for process control of semiconductor manufacturing equipment
- Patent number 7,062,411
- Issue date Jun 13, 2006
- Scientific Systems Research Limited
- Michael Hopkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radio frequency Langmuir probe
- Patent number 7,015,703
- Issue date Mar 21, 2006
- Scientific Systems Research Limited
- Michael Hopkins
- G01 - MEASURING TESTING
Information Patent Grant
Plasma chamber cleaning
- Patent number 6,855,209
- Issue date Feb 15, 2005
- Scientific Systems Research Limited
- John Scanlan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fault classification in a plasma process chamber
- Patent number 6,826,489
- Issue date Nov 30, 2004
- Scientific Systems Research Limited
- John Scanlan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fault detection in a plasma process
- Patent number 6,781,383
- Issue date Aug 24, 2004
- Scientific System Research Limited
- Kevin O'Leary
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Endpoint detection in the etching of dielectric layers
- Patent number 6,677,246
- Issue date Jan 13, 2004
- Scientific Systems Research Ltd.
- John Scanlan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma chamber conditioning
- Patent number 6,656,848
- Issue date Dec 2, 2003
- Scientific Systems Research Limited
- John Scanlan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF current sensor
- Patent number 6,501,285
- Issue date Dec 31, 2002
- Scientific Systems Research Limited
- Michael B. Hopkins
- G01 - MEASURING TESTING
Information Patent Grant
Method of processing a high frequency signal containing multiple fu...
- Patent number 6,469,488
- Issue date Oct 22, 2002
- Scientific Systems Research Limited
- Michael B. Hopkins
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for sensing RF current delivered to a plasma with two ind...
- Patent number 6,061,006
- Issue date May 9, 2000
- Scientific Systems Research Limited
- Michael Hopkins
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for sensing RF current delivered to a plasma with two ind...
- Patent number 5,808,415
- Issue date Sep 15, 1998
- Scientific Systems Research Limited
- Michael Hopkins
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method for transferring process control models between plasma proce...
- Publication number 20060042753
- Publication date Mar 2, 2006
- Scientific Systems Research Limited
- Kevin O'Leary
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and system for detecting electrical arcing in a plasma proce...
- Publication number 20050212450
- Publication date Sep 29, 2005
- Scientific Systems Research Limited
- Francisco Martinez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fault detection in a plasma process
- Publication number 20040055868
- Publication date Mar 25, 2004
- Scientific Systems Research Limited
- Kevin O'Leary
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma chamber cleaning
- Publication number 20030159715
- Publication date Aug 28, 2003
- Scientific Systems Research Limited
- John Scanlan
- H01 - BASIC ELECTRIC ELEMENTS

Scientific Systems Research Limited

Organization

Patents Grantslast 30 patents

Method for transferring process control models between plasma proce...

Method for process control of semiconductor manufacturing equipment

Radio frequency Langmuir probe

Plasma chamber cleaning

Fault classification in a plasma process chamber

Method for fault detection in a plasma process

Endpoint detection in the etching of dielectric layers

Plasma chamber conditioning

RF current sensor

Method of processing a high frequency signal containing multiple fu...

Apparatus for sensing RF current delivered to a plasma with two ind...

Apparatus for sensing RF current delivered to a plasma with two ind...

Patents Applicationslast 30 patents

Method for transferring process control models between plasma proce...

Method and system for detecting electrical arcing in a plasma proce...

Method for fault detection in a plasma process

Plasma chamber cleaning

Trademarklast 30 trademarks