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Dresden, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method and device for optically monitoring fabrication processes of...
Patent number
7,003,149
Issue date
Feb 21, 2006
Semiconductor 300 GmbH & Co. KG
Norbert Benesch
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus for and method of wafer grinding
Patent number
6,752,694
Issue date
Jun 22, 2004
Motorola, Inc.
Manfred Schneegans
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for measuring the degradation of a tool
Patent number
6,633,379
Issue date
Oct 14, 2003
Semiconductor 300 GmbH & Co. KG
Michael Roesner
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Device for performing surface treatment on semiconductor wafers
Patent number
6,564,469
Issue date
May 20, 2003
Motorola, Inc.
Mohamad Jahanbani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of filling gaps on a semiconductor wafer
Patent number
6,562,734
Issue date
May 13, 2003
Semiconductor 300 GmbH & Co. KG
Markus Kirchhoff
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating semiconductor devices with contact studs form...
Patent number
6,486,049
Issue date
Nov 26, 2002
Motorola, Inc.
John Maltabes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Retaining ring for chemical-mechanical polishing (CMP) head, polish...
Patent number
6,419,567
Issue date
Jul 16, 2002
Semiconductor 300 GmbH & Co. KG
Walter Glashauser
B24 - GRINDING POLISHING
Information
Patent Grant
Plasma-enhanced chemical vapor deposition (CVD) method to fill a tr...
Patent number
6,362,098
Issue date
Mar 26, 2002
Motorola, Inc.
Terry Alan Breeden
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for heating a semiconductor wafer in a process chamber by a...
Patent number
6,290,491
Issue date
Sep 18, 2001
Motorola, Inc.
Iraj Shahvandi
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
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last 30 trademarks