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Patents Grants
last 30 patents
Information
Patent Grant
Method of forming a fine pattern using a silicon-oxide-based film,...
Patent number
6,992,013
Issue date
Jan 31, 2006
Semiconductor Leading Edge Technologies, Inc.
Ichiro Okabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate-container measuring device, and substrate-container measu...
Patent number
6,943,899
Issue date
Sep 13, 2005
Semiconductor Leading Edge Technologies, Inc.
Hisaharu Seita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for manufacturing semiconductor device
Patent number
6,881,657
Issue date
Apr 19, 2005
Semiconductor Leading Edge Technologies, Inc.
Kazuyoshi Torii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method of cleaning a substrate
Patent number
6,880,563
Issue date
Apr 19, 2005
Semiconductor Leading Edge Technologies, Inc.
Satoshi Kume
B08 - CLEANING
Information
Patent Grant
Wafer edge exposure apparatus, and wafer edge exposure method
Patent number
6,875,971
Issue date
Apr 5, 2005
Semiconductor Leading Edge Technologies, Inc.
Jeong Yeal Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Load port, wafer processing apparatus, and method of replacing atmo...
Patent number
6,817,822
Issue date
Nov 16, 2004
Semiconductor Leading Edge Technologies, Inc.
Kenji Tokunaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Resist composition and method for manufacturing semiconductor devic...
Patent number
6,803,170
Issue date
Oct 12, 2004
Semiconductor Leading Edge Technologies, Inc.
Minoru Toriumi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Halftone phase shifting photomask and blanks for halftone phase shi...
Patent number
6,780,547
Issue date
Aug 24, 2004
Dainippon Printing Co., Ltd.
Toshiaki Motonaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wafer heat-treatment system and wafer heat-treatment method
Patent number
6,769,908
Issue date
Aug 3, 2004
Semiconductor Leading Edge Technologies, Inc.
Yoshimasa Kawase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Carrier shape measurement device
Patent number
6,760,115
Issue date
Jul 6, 2004
Nikon Corporation
Fusao Shimizu
G01 - MEASURING TESTING
Information
Patent Grant
Projection aligner, exposing method and semiconductor device
Patent number
6,731,375
Issue date
May 4, 2004
Semiconductor Leading Edge Technologies, Inc.
Tetsuro Hanawa
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Plasma etching apparatus with focus ring and plasma etching method
Patent number
6,726,799
Issue date
Apr 27, 2004
Semiconductor Leading Edge Technologies, Inc.
Osamu Koike
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming fine patterns
Patent number
6,716,761
Issue date
Apr 6, 2004
Semiconductor Leading Edge Technologies, Inc.
Akira Mitsuiki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Halftone phase shift photomask and blanks for halftone phase shift...
Patent number
6,709,791
Issue date
Mar 23, 2004
Dai Nippon Printing Co., Ltd.
Hiroshi Mohri
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Cylinder, load port using it, and production system
Patent number
6,652,212
Issue date
Nov 25, 2003
CKD Corporation
Shinyo Kimoto
F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information
Patent Grant
Exposure apparatus, semiconductor device, and photomask
Patent number
6,611,317
Issue date
Aug 26, 2003
Asahi Glass Company, Limited
Tohru Ogawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming fine pattern
Patent number
6,586,163
Issue date
Jul 1, 2003
Semiconductor Leading Edge Technologies Inc.
Ichiro Okabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for modifying coordinates
Patent number
6,535,781
Issue date
Mar 18, 2003
Semiconductor Leading Edge Technologies, Inc.
Toshiaki Tsutsumi
G01 - MEASURING TESTING
Information
Patent Grant
Load port system for substrate processing system, and method of pro...
Patent number
6,473,996
Issue date
Nov 5, 2002
Semiconductor Leading Edge Technologies, Inc.
Kenji Tokunaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dip cleaning system for a substrate, system for evaluating the amou...
Patent number
6,446,645
Issue date
Sep 10, 2002
Semiconductor Leading Edge Technologies, Inc.
Minoru Doi
B08 - CLEANING
Information
Patent Grant
Chemical mechanical polishing machine and chemical mechanical polis...
Patent number
6,379,219
Issue date
Apr 30, 2002
Semiconductor Leading Edge Technologies, Inc.
Takayuki Oba
B24 - GRINDING POLISHING
Information
Patent Grant
Data classification method and data management method, database and...
Patent number
6,363,382
Issue date
Mar 26, 2002
Semiconductor Leading Edge Technologies, Inc.
Norihiko Kotani
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for wiring, wire, and integrated circuit
Patent number
6,355,545
Issue date
Mar 12, 2002
Semiconductor Leading Edge Technologies, Inc.
Takayuki Ohba
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF MANUFACTURING SILICON NITRIDE FILM, METHOD OF MANUFACTURI...
Publication number
20080274605
Publication date
Nov 6, 2008
Semiconductor Leading Edge Technologies, Inc.
Takeshi Hoshi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of manufacturing silicon nitride film, method of manufacturi...
Publication number
20060022228
Publication date
Feb 2, 2006
Semiconductor Leading Edge Technologies, Inc.
Takeshi Hoshi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of designing charged particle beam mask, charged particle be...
Publication number
20060019173
Publication date
Jan 26, 2006
Semiconductor Leading Edge Technologies, Inc.
Jiro Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of manufacturing membrane mask, method of manufacturing semi...
Publication number
20060019175
Publication date
Jan 26, 2006
Semiconductor Leading Edge Technologies, Inc.
Hiroshi Yamashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for manufacturing semiconductor device
Publication number
20060008964
Publication date
Jan 12, 2006
Semiconductor Leading Edge Technologies, Inc.
Akira Mineji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Solution search apparatus and initial value setting method thereof
Publication number
20060010091
Publication date
Jan 12, 2006
Semiconductor Leading Edge Technologies, Inc.
Tetsunori Wada
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method of manufacturing a semiconductor device
Publication number
20060003577
Publication date
Jan 5, 2006
Semiconductor Leading Edge Technologies, Inc.
Shuji Sone
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device fabrication method
Publication number
20050287811
Publication date
Dec 29, 2005
Semiconductor Leading Edge Technologies, Inc.
Kazuaki Inukai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device and method for manufacturing therefor
Publication number
20050274948
Publication date
Dec 15, 2005
Semiconductor Leading Edge Technologies, Inc.
Yasuyuki Tamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Fitness function circuit, genetic algorithm machine, and fitness ev...
Publication number
20050267851
Publication date
Dec 1, 2005
Semiconductor Leading Edge Technologies, Inc.
Shunsuke Baba
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Semiconductor device
Publication number
20050253269
Publication date
Nov 17, 2005
Semiconductor Leading Edge Technologies, Inc.
Hiroshi Tsuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Film forming apparatus and method
Publication number
20050249876
Publication date
Nov 10, 2005
Semiconductor Leading Edge Technologies, Inc.
Takaaki Kawahara
C30 - CRYSTAL GROWTH
Information
Patent Application
Wet etching apparatus and wet etching method
Publication number
20050205521
Publication date
Sep 22, 2005
Semiconductor Leading Edge Technologies, Inc.
Satsohi Kume
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device and method for manufacturing the same
Publication number
20050205940
Publication date
Sep 22, 2005
Semiconductor Leading Edge Technologies, Inc.
Fumio Ootsuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of removing resist, semiconductor device thereby and method...
Publication number
20050208756
Publication date
Sep 22, 2005
Semiconductor Leading Edge Technologies, Inc.
Atsushi Matsushita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Phase shift mask and method of manufacturing phase shift mask
Publication number
20050202323
Publication date
Sep 15, 2005
Semiconductor Leading Edge Technologies, Inc.
Kunio Watanabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Ion implantation simulation apparatus, method, and program
Publication number
20050203721
Publication date
Sep 15, 2005
Semiconductor Leading Edge Technologies, Inc.
Sanae Ito
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Resist removal method and semiconductor device manufactured by usin...
Publication number
20050199586
Publication date
Sep 15, 2005
Semiconductor Leading Edge Technologies, Inc.
Atsushi Matsushita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Semiconductor device and manufacturing method therefor
Publication number
20050199963
Publication date
Sep 15, 2005
Semiconductor Leading Edge Technologies, Inc.
Tomonori Aoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming silicon nitride film and method of manufacturing...
Publication number
20050196977
Publication date
Sep 8, 2005
Semiconductor Leading Edge Technologies, Inc.
Tsuyoshi Saito
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for manufacturing semiconductor device
Publication number
20050191850
Publication date
Sep 1, 2005
Semiconductor Leading Edge Technologies, Inc.
Eiichi Soda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for manufacturing semiconductor device
Publication number
20050191847
Publication date
Sep 1, 2005
Semiconductor Leading Edge Technologies, Inc.
Kaori Misawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus, method and program for ion implantation simulation, and...
Publication number
20050184255
Publication date
Aug 25, 2005
Semiconductor Leading Edge Technologies, Inc.
Hirotaka Amakawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method for forming inorganic porus film
Publication number
20050181576
Publication date
Aug 18, 2005
Semiconductor Leading Edge Technologies, Inc.
Shinichi Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming fine pattern
Publication number
20050181304
Publication date
Aug 18, 2005
Daikin Industries, Ltd.
Takayuki Araki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Semiconductor device having multilayer structure and method for man...
Publication number
20050179134
Publication date
Aug 18, 2005
Semiconductor Leading Edge Technologies, Inc.
Yoshihisa Matsubara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device having bonding pad above low-k dielectric film...
Publication number
20050173806
Publication date
Aug 11, 2005
Semiconductor Leading Edge Technologies, Inc.
Yoshihisa Matsubara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multilayered wiring structure, method of forming buried wiring, sem...
Publication number
20050170641
Publication date
Aug 4, 2005
Semiconductor Leading Edge Technologies, Inc.
Seiichi Kondo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor apparatus and manufacturing method of the same
Publication number
20050167767
Publication date
Aug 4, 2005
Semiconductor Leading Edge Technologies , Inc.
Yasushi Akasaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device and method of manufacturing same
Publication number
20050167788
Publication date
Aug 4, 2005
Semiconductor Leading Edge Technologies, Inc.
Isao Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Trademark
last 30 trademarks
Information
Trademark
75073414 - SELETE
Serial number
75073414
Registration number
2168050
Filing date
Mar 15, 1996
Semiconductor Leading Edge Technologies, Inc.
42 - Scientific and technological services and research and design relating thereto