TREA

Semiconductor Process Co., Ltd.

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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate holder and reaction apparatus
    • Patent number 5,858,100
    • Issue date Jan 12, 1999
    • Semiconductor Process Co., Ltd.
    • Kazuo Maeda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...