SEN CORPORATION

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TOKYO, JP

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Ion implantation method and ion implantation apparatus
- Patent number 9,646,837
- Issue date May 9, 2017
- SEN CORPORATION
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and ion implantation method
- Patent number 9,601,314
- Issue date Mar 21, 2017
- Sen Corporation
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Impurity-doped layer formation apparatus and electrostatic chuck pr...
- Patent number 9,312,163
- Issue date Apr 12, 2016
- Sumitomo Heavy Industries, Ltd.
- Masaru Tanaka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Ion implantation method and ion implantation apparatus
- Patent number 9,305,784
- Issue date Apr 5, 2016
- Sen Corporation
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation method and ion implantation apparatus
- Patent number 9,165,772
- Issue date Oct 20, 2015
- Sen Corporation
- Shiro Ninomiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion source device and ion beam generating method
- Patent number 9,153,405
- Issue date Oct 6, 2015
- Sen Corporation
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supporting structure and ion generator using the same
- Patent number 9,153,406
- Issue date Oct 6, 2015
- Sen Corporation
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 9,023,720
- Issue date May 5, 2015
- Sen Corporation
- Genshu Fuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-energy ion implanter
- Patent number 8,987,690
- Issue date Mar 24, 2015
- Sen Corporation
- Mitsuaki Kabasawa
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Ion implantation method and ion implantation apparatus
- Patent number 8,980,654
- Issue date Mar 17, 2015
- Sen Corporation
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-frequency acceleration type ion acceleration and transportatio...
- Patent number 8,952,340
- Issue date Feb 10, 2015
- Sen Corporation
- Mitsuaki Kabasawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation method and ion implantation apparatus
- Patent number 8,772,142
- Issue date Jul 8, 2014
- Sen Corporation
- Shiro Ninomiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation method and ion implantation apparatus
- Patent number 8,772,741
- Issue date Jul 8, 2014
- Sen Corporation
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and ion implantation method
- Patent number 8,759,801
- Issue date Jun 24, 2014
- Sen Corporation
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam irradiation system and ion beam irradiation method
- Patent number 8,735,855
- Issue date May 27, 2014
- Sen Corporation
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and control method thereof
- Patent number 8,692,216
- Issue date Apr 8, 2014
- Sen Corporation
- Hiroyuki Kariya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 8,163,635
- Issue date Apr 24, 2012
- Sen Corporation
- Michiro Sugitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing system, wafer processing method, and ion implantat...
- Patent number 8,096,744
- Issue date Jan 17, 2012
- SEN Corporation, an SHI and Axcelis Company
- Keiji Okada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam processing apparatus
- Patent number 7,982,192
- Issue date Jul 19, 2011
- Sen Corporation
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source apparatus and cleaning optimized method thereof
- Patent number 7,947,129
- Issue date May 24, 2011
- SEN Corporation, an SHI and Axcelis Company
- Hirohiko Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and ion implantation method
- Patent number 7,851,772
- Issue date Dec 14, 2010
- Sen Corporation an SHI and Axcelis Company
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus
- Patent number 7,791,049
- Issue date Sep 7, 2010
- Sen Corporation an SHI and Axcelis Company
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and method of converging/shaping ion bea...
- Patent number 7,755,067
- Issue date Jul 13, 2010
- Sen Corporation
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam processing system and beam processing method
- Patent number 7,718,980
- Issue date May 18, 2010
- Sen Corporation
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic beam deflection scanner and beam deflection scanning...
- Patent number 7,687,782
- Issue date Mar 30, 2010
- SEN Corporation, an SHI and Axcelis Company
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling mover device
- Patent number 7,597,531
- Issue date Oct 6, 2009
- SEN Corporation, an SHI and Axcelis Company
- Keiji Okada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Irradiation system ion beam and method to enhance accuracy of irrad...
- Patent number 7,429,743
- Issue date Sep 30, 2008
- Sen Corporation
- Mitsuaki Kabasawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Irradiation system with ion beam/charged particle beam
- Patent number 7,423,276
- Issue date Sep 9, 2008
- SEN Corporation, an SHI and Axcelis Company
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam processing system and beam processing method
- Patent number 7,411,709
- Issue date Aug 12, 2008
- Sen Corporation
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to increase low-energy beam current in irradiation system wi...
- Patent number 7,361,892
- Issue date Apr 22, 2008
- SEN Corporation, an SHI and Axcelis Company
- Mitsuaki Kabasawa
- H01 - BASIC ELECTRIC ELEMENTS

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Patents Applicationslast 30 patents

Information Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
- Publication number 20170148633
- Publication date May 25, 2017
- SEN Corporation
- Shiro NINOMIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION APPARATUS, FINAL ENERGY FILTER, AND ION IMPLANTATI...
- Publication number 20150279612
- Publication date Oct 1, 2015
- SEN Corporation
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER, BEAM ENERGY MEASURING DEVICE, AND METHOD OF MEASURIN...
- Publication number 20150262787
- Publication date Sep 17, 2015
- SEN Corporation
- Haruka Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-ENERGY ION IMPLANTER, BEAM COLLIMATOR, AND BEAM COLLIMATION ME...
- Publication number 20150228454
- Publication date Aug 13, 2015
- SEN Corporation
- Kouji Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND METHOD OF CONTROLLING ION IMPLANTATI...
- Publication number 20150214007
- Publication date Jul 30, 2015
- SEN Corporation
- Masahide Ooura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORTING STRUCTURE AND ION GENERATOR USING THE SAME
- Publication number 20150179385
- Publication date Jun 25, 2015
- SEN Corporation
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA COVER AND PLASMA GENERATING DEVICE USING SAME
- Publication number 20150162657
- Publication date Jun 11, 2015
- SEN Corporation
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS
- Publication number 20150155129
- Publication date Jun 4, 2015
- SEN Corporation
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ENERGY ION IMPLANTER, BEAM CURRENT ADJUSTER, AND BEAM CURRENT...
- Publication number 20150136996
- Publication date May 21, 2015
- SEN Corporation
- Kouji Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION GENERATOR AND ION GENERATING METHOD
- Publication number 20150129775
- Publication date May 14, 2015
- SEN Corporation
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
- Publication number 20150064887
- Publication date Mar 5, 2015
- SEN Corporation
- Kazuhisa Manabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS, BEAM PARALLELIZING APPARATUS, AND ION I...
- Publication number 20150064888
- Publication date Mar 5, 2015
- SEN Corporation
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER, MAGNETIC FIELD MEASUREMENT DEVICE, AND ION IMPLANTAT...
- Publication number 20150056366
- Publication date Feb 26, 2015
- SEN Corporation
- Hiroyuki Kariya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM MEASURING DEVICE AND METHOD OF MEASURING ION BEAM
- Publication number 20150001418
- Publication date Jan 1, 2015
- SEN Corporation
- Noriyasu Ido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-ENERGY ION IMPLANTER
- Publication number 20140353517
- Publication date Dec 4, 2014
- SEN Corporation
- Mitsuaki Kabasawa
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
INSULATION STRUCTURE AND INSULATION METHOD
- Publication number 20140353518
- Publication date Dec 4, 2014
- SEN Corporation
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-ENERGY ION IMPLANTER
- Publication number 20140352615
- Publication date Dec 4, 2014
- SEN Corporation
- Mitsuaki Kabasawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-ENERGY ION IMPLANTER
- Publication number 20140345522
- Publication date Nov 27, 2014
- SEN Corporation
- Mitsuaki Kabasawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATION STRUCTURE OF HIGH VOLTAGE ELECTRODES FOR ION IMPLANTATIO...
- Publication number 20140291543
- Publication date Oct 2, 2014
- SEN Corporation
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND METHOD OF CLEANING ION IMPLANTATION...
- Publication number 20140283745
- Publication date Sep 25, 2014
- SEN Corporation
- Takayuki Nagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
- Publication number 20140235042
- Publication date Aug 21, 2014
- SEN Corporation
- Shiro NINOMIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION APPARATUS
- Publication number 20140150723
- Publication date Jun 5, 2014
- SEN Corporation
- Mitsuaki Kabasawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
- Publication number 20140134833
- Publication date May 15, 2014
- SEN Corporation
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
- Publication number 20140065737
- Publication date Mar 6, 2014
- SEN Corporation
- Shiro Ninomiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION GENERATION METHOD AND ION SOURCE
- Publication number 20140062286
- Publication date Mar 6, 2014
- SEN Corporation
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20130256566
- Publication date Oct 3, 2013
- SEN Corporation
- Hiroyuki KARIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE DEVICE AND ION BEAM GENERATING METHOD
- Publication number 20130249400
- Publication date Sep 26, 2013
- SEN Corporation
- Masateru SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
- Publication number 20130196492
- Publication date Aug 1, 2013
- SEN Corporation
- Shiro NINOMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
- Publication number 20130157390
- Publication date Jun 20, 2013
- SEN Corporation
- Shiro NINOMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
- Publication number 20130092825
- Publication date Apr 18, 2013
- SEN Corporation
- Shiro NINOMIYA
- H01 - BASIC ELECTRIC ELEMENTS

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Trademarklast 30 trademarks

Information Trademark
79252146 - HI CHEESE!
- Serial number 79252146
- Registration number 5887725
- Filing date Oct 18, 2018
- SEN CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
86014458 - UHE
- Serial number 86014458
- Registration number 4532425
- Filing date Jul 18, 2013
- SEN Corporation
- 7 - Machines and machine tools
Information Trademark
86014466 - SAION
- Serial number 86014466
- Registration number 4532426
- Filing date Jul 18, 2013
- SEN Corporation
- 7 - Machines and machine tools

SEN CORPORATION

Organization

Patents Grantslast 30 patents

Ion implantation method and ion implantation apparatus

Ion implantation apparatus and ion implantation method

Impurity-doped layer formation apparatus and electrostatic chuck pr...

Ion implantation method and ion implantation apparatus

Ion implantation method and ion implantation apparatus

Ion source device and ion beam generating method

Supporting structure and ion generator using the same

Manufacturing method of semiconductor device

High-energy ion implanter

Ion implantation method and ion implantation apparatus

High-frequency acceleration type ion acceleration and transportatio...

Ion implantation method and ion implantation apparatus

Ion implantation method and ion implantation apparatus

Ion implantation apparatus and ion implantation method

Ion beam irradiation system and ion beam irradiation method

Ion implantation apparatus and control method thereof

Manufacturing method of semiconductor device

Wafer processing system, wafer processing method, and ion implantat...

Beam processing apparatus

Ion source apparatus and cleaning optimized method thereof

Ion implantation apparatus and ion implantation method

Ion implantation apparatus

Ion implantation apparatus and method of converging/shaping ion bea...

Beam processing system and beam processing method

Electrostatic beam deflection scanner and beam deflection scanning...

Method of controlling mover device

Irradiation system ion beam and method to enhance accuracy of irrad...

Irradiation system with ion beam/charged particle beam

Beam processing system and beam processing method

Method to increase low-energy beam current in irradiation system wi...

Patents Applicationslast 30 patents

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

ION IMPLANTATION APPARATUS, FINAL ENERGY FILTER, AND ION IMPLANTATI...

ION IMPLANTER, BEAM ENERGY MEASURING DEVICE, AND METHOD OF MEASURIN...

HIGH-ENERGY ION IMPLANTER, BEAM COLLIMATOR, AND BEAM COLLIMATION ME...

ION IMPLANTATION APPARATUS AND METHOD OF CONTROLLING ION IMPLANTATI...

SUPPORTING STRUCTURE AND ION GENERATOR USING THE SAME

ANTENNA COVER AND PLASMA GENERATING DEVICE USING SAME

ION IMPLANTATION APPARATUS

HIGH ENERGY ION IMPLANTER, BEAM CURRENT ADJUSTER, AND BEAM CURRENT...

ION GENERATOR AND ION GENERATING METHOD

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

ION IMPLANTATION APPARATUS, BEAM PARALLELIZING APPARATUS, AND ION I...

ION IMPLANTER, MAGNETIC FIELD MEASUREMENT DEVICE, AND ION IMPLANTAT...

ION BEAM MEASURING DEVICE AND METHOD OF MEASURING ION BEAM

HIGH-ENERGY ION IMPLANTER

INSULATION STRUCTURE AND INSULATION METHOD

HIGH-ENERGY ION IMPLANTER

HIGH-ENERGY ION IMPLANTER

INSULATION STRUCTURE OF HIGH VOLTAGE ELECTRODES FOR ION IMPLANTATIO...

ION IMPLANTATION APPARATUS AND METHOD OF CLEANING ION IMPLANTATION...

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

ION IMPLANTATION APPARATUS

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

ION GENERATION METHOD AND ION SOURCE

ION IMPLANTATION APPARATUS AND CONTROL METHOD THEREOF

ION SOURCE DEVICE AND ION BEAM GENERATING METHOD

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

Trademarklast 30 trademarks

79252146 - HI CHEESE!

86014458 - UHE

86014466 - SAION