Set, Tosoh

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Dublin, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Shield assembly for substrate processing chamber
- Patent number 6,780,294
- Issue date Aug 24, 2004
- Set, Tosoh
- Robert B. Hixson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...