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Patents Grants
last 30 patents
Information
Patent Grant
Process for treating semiconductor substrates
Patent number
6,627,548
Issue date
Sep 30, 2003
Sez Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
Hans-Jürgen Kruwinus
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and process for liquid treatment of wafer-shaped articles
Patent number
6,435,200
Issue date
Aug 20, 2002
Sez Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
Kurt Langen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for an etch treatment of a disk-like object
Patent number
6,328,846
Issue date
Dec 11, 2001
SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung AG
Kurt Langen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for rough-etching a semiconductor surface
Patent number
6,169,038
Issue date
Jan 2, 2001
Sez Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
Hans-JHans-J{umlaut over (u)}rgen Kruwinus
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for wet etching of semiconductor wafers
Patent number
6,162,739
Issue date
Dec 19, 2000
SEZ Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung AG
Franz Sumnitsch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process and device for one-sided treatment of disk-shaped objects
Patent number
6,149,759
Issue date
Nov 21, 2000
SEZ Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung AG
Gunther Guggenberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for preventing dripping from conduit openings
Patent number
6,056,208
Issue date
May 2, 2000
SEZ Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung AG
Willibald Pirker
B67 - OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS LIQUID...
Information
Patent Grant
Rotary chuck including pins for lifting wafers
Patent number
6,056,825
Issue date
May 2, 2000
SEZ Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung AG
Franz Sumnitsch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gripper for wafer-shaped articles
Patent number
5,931,518
Issue date
Aug 3, 1999
SEZ Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung AG
Willibald Pirker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arrangement for treatment of wafer-shaped articles, particularly si...
Patent number
5,904,164
Issue date
May 18, 1999
SEZ Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung AG
Gerald Wagner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Support for wafer-like objects
Patent number
5,896,877
Issue date
Apr 27, 1999
SEZ Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung AG
Willibald Pirker
H01 - BASIC ELECTRIC ELEMENTS
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Patents Applications
last 30 patents
Information
Patent Application
Device for liquid treatment of wafer-shaped articles
Publication number
20020050244
Publication date
May 2, 2002
SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
Philipp Engesser
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device for treating a disc-shaped object
Publication number
20020002991
Publication date
Jan 10, 2002
SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
Johannes Lindner
H01 - BASIC ELECTRIC ELEMENTS