Shibaura Mechatronics Corp., Ltd.

Organization

Yokohama-shi, JP

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Film forming apparatus
- Patent number 12,365,976
- Issue date Jul 22, 2025
- Shibaura Mechatronics Corporation
- Shigeki Matsunaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment device
- Patent number 12,363,801
- Issue date Jul 15, 2025
- Shibaura Mechatronics Corporation
- Yuichi Imaoka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Film formation apparatus
- Patent number 12,354,854
- Issue date Jul 8, 2025
- Shibaura Mechatronics Corporation
- Hisashi Nishigaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment method and substrate treatment apparatus
- Patent number 12,354,869
- Issue date Jul 8, 2025
- Shibaura Mechatronics Corporation
- Yuji Nagashima
- B08 - CLEANING
Information Patent Grant
Supply tank, supply device and supply system
- Patent number 12,347,699
- Issue date Jul 1, 2025
- Shibaura Mechatronics Corporation
- Masaaki Furuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supply device and supply system
- Patent number 12,318,803
- Issue date Jun 3, 2025
- Shibaura Mechatronics Corporation
- Masaaki Furuya
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate treatment device
- Patent number 12,278,120
- Issue date Apr 15, 2025
- Shibaura Mechatronics Corporation
- Minami Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing liquid supply device, substrate processing apparatus, an...
- Patent number 12,257,595
- Issue date Mar 25, 2025
- Shibaura Mechatronics Corporation
- Masaaki Furuya
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Electromagnetic wave attenuator, electronic device, film formation...
- Patent number 12,224,250
- Issue date Feb 11, 2025
- Shibaura Mechatronics Corporation
- Hisashi Nishigaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,165,886
- Issue date Dec 10, 2024
- Shibaura Mechatronics Corporation
- Kensuke Demura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment device
- Patent number 12,138,671
- Issue date Nov 12, 2024
- Shibaura Mechatronics Corporation
- Minami Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment device
- Patent number 12,109,597
- Issue date Oct 8, 2024
- Shibaura Mechatronics Corporation
- Daisuke Matsushima
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 12,097,541
- Issue date Sep 24, 2024
- Shibaura Mechatronics Corporation
- Kensuke Demura
- B08 - CLEANING
Information Patent Grant
Substrate treatment device
- Patent number 12,074,055
- Issue date Aug 27, 2024
- Shibaura Mechatronics Corporation
- Masaya Kamiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation apparatus and moisture removal method thereof
- Patent number 12,043,898
- Issue date Jul 23, 2024
- Shibaura Mechatronics Corporation
- Shohei Tanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment device
- Patent number 12,005,482
- Issue date Jun 11, 2024
- Shibaura Mechatronics Corporation
- Kensuke Demura
- B08 - CLEANING
Information Patent Grant
Substrate carrying apparatus
- Patent number 11,996,310
- Issue date May 28, 2024
- Shibaura Mechatronics Corporation
- Masaaki Furuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation apparatus
- Patent number 11,955,367
- Issue date Apr 9, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Shohei Tanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cooling device, substrate treatment device, cooling method, and sub...
- Patent number 11,948,812
- Issue date Apr 2, 2024
- Shibaura Mechatronics Corporation
- Kensuke Demura
- B08 - CLEANING
Information Patent Grant
Organic film forming apparatus
- Patent number 11,906,246
- Issue date Feb 20, 2024
- Shibaura Mechatronics Corporation
- Yukinobu Nishibe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment device
- Patent number 11,784,040
- Issue date Oct 10, 2023
- Shibaura Mechatronics Corporation
- Kensuke Demura
- B08 - CLEANING
Information Patent Grant
Electromagnetic wave attenuator, electronic device, film formation...
- Patent number 11,710,707
- Issue date Jul 25, 2023
- Shibaura Mechatronics Corporation
- Hisashi Nishigaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing liquid generator and substrate processing apparatus usin...
- Patent number 11,670,522
- Issue date Jun 6, 2023
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reflective mask cleaning apparatus and reflective mask cleaning method
- Patent number 11,609,491
- Issue date Mar 21, 2023
- Shibaura Mechatronics Corporation
- Daisuke Matsushima
- B08 - CLEANING
Information Patent Grant
Film formation apparatus and film formation method
- Patent number 11,505,866
- Issue date Nov 22, 2022
- SHIBAURA MECHATRONICS CORPORATION
- Daisuke Ono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 11,437,224
- Issue date Sep 6, 2022
- Shibaura Mechatronics Corporation
- Hidehito Azumano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,387,083
- Issue date Jul 12, 2022
- Shibaura Mechatronics Corporation
- Hidehito Azumano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,387,082
- Issue date Jul 12, 2022
- Shibaura Mechatronics Corporation
- Hidehito Azumano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment device and substrate treatment method
- Patent number 11,355,337
- Issue date Jun 7, 2022
- Shibaura Mechatronics Corporation
- Masaya Kamiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,322,384
- Issue date May 3, 2022
- Shin-Etsu Engineering Co., Ltd.
- Shunya Kubota
- H01 - BASIC ELECTRIC ELEMENTS

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Patents Applicationslast 30 patents

Information Patent Application
TRANSFER APPARATUS AND WAFER STORAGE CONTAINER CLEANING APPARATUS
- Publication number 20250236470
- Publication date Jul 24, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Yukinobu NISHIBE
- B08 - CLEANING
Information Patent Application
WAFER STORAGE CONTAINER CLEANING APPARATUS
- Publication number 20250229306
- Publication date Jul 17, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Yotaro FUKUOKA
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT DEVICE
- Publication number 20250226240
- Publication date Jul 10, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Minami NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER STORAGE CONTAINER PROCESSING APPARATUS
- Publication number 20250112070
- Publication date Apr 3, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Junji ISHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND PROCESSING METHOD OF SUBSTRATE
- Publication number 20250108411
- Publication date Apr 3, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Satoshi NAKAMURA
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS FOR WAFER STORAGE CONTAINER
- Publication number 20250108414
- Publication date Apr 3, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Junji ISHIHARA
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS FOR WAFER STORAGE CONTAINER
- Publication number 20250108415
- Publication date Apr 3, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Junji ISHIHARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20250091095
- Publication date Mar 20, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Koichi HIGUCHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE DELIVERY APPARATUS AND SUBSTRATE DELIVERY METHOD
- Publication number 20240347364
- Publication date Oct 17, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Rie ARAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRYING APPARATUS, DRY CONDITION CONFIRMATION METHOD, AND WAFER STOR...
- Publication number 20240328713
- Publication date Oct 3, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Yukinobu NISHIBE
- F26 - DRYING
Information Patent Application
MOUNTING TOOL AND MOUNTING APPARATUS
- Publication number 20240321623
- Publication date Sep 26, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Yoshihiro KUSUBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20240321563
- Publication date Sep 26, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Shigeki MATSUNAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER STORAGE CONTAINER DRYING APPARATUS AND CLEANING SYSTEM
- Publication number 20240302099
- Publication date Sep 12, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Junji ISHIHARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240234173
- Publication date Jul 11, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Hiroki KOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS
- Publication number 20240100577
- Publication date Mar 28, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Yuichi IMAOKA
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE
- Publication number 20240096653
- Publication date Mar 21, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Kensuke DEMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS FOR WAFER STORAGE CONTAINER
- Publication number 20240091828
- Publication date Mar 21, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Junji ISHIHARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS
- Publication number 20240071744
- Publication date Feb 29, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Yotaro FUKUOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230420288
- Publication date Dec 28, 2023
- SHIBAURA MECHATRONICS CORPORATION
- Takahiro HAMADA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FILM FORMATION APPARATUS
- Publication number 20230407458
- Publication date Dec 21, 2023
- SHIBAURA MECHATRONICS CORPORATION
- Yoji TAKIZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD
- Publication number 20230366077
- Publication date Nov 16, 2023
- SHIBAURA MECHATRONICS CORPORATION
- Shigeki MATSUNAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROMAGNETIC WAVE ATTENUATOR, ELECTRONIC DEVICE, FILM FORMATION...
- Publication number 20230326875
- Publication date Oct 12, 2023
- SHIBAURA MECHATRONICS CORPORATION
- Hisashi NISHIGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230307262
- Publication date Sep 28, 2023
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING LIQUID SUPPLY DEVICE, SUBSTRATE PROCESSING APPARATUS, AN...
- Publication number 20230307263
- Publication date Sep 28, 2023
- SHIBAURA MECHATRONICS CORPORATION
- Masaaki FURUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING LIQUID SUPPLY DEVICE, SUBSTRATE PROCESSING APPARATUS, AN...
- Publication number 20230286013
- Publication date Sep 14, 2023
- SHIBAURA MECHATRONICS CORPORATION
- Masaaki FURUYA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230271231
- Publication date Aug 31, 2023
- SHIBAURA MECHATRONICS CORPORATION
- Kensuke DEMURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230241636
- Publication date Aug 3, 2023
- SHIBAURA MECHATRONICS CORPORATION
- Yoko TAKAKITA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MAINTENANCE METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20230107154
- Publication date Apr 6, 2023
- SHIBAURA MECHATRONICS CORPORATION
- Junji ISHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUPPLY DEVICE AND SUPPLY SYSTEM
- Publication number 20230081295
- Publication date Mar 16, 2023
- SHIBAURA MECHATRONICS CORPORATION
- Masaaki FURUYA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUPPLY TANK, SUPPLY DEVICE AND SUPPLY SYSTEM
- Publication number 20230077617
- Publication date Mar 16, 2023
- SHIBAURA MECHATRONICS CORPORATION
- Masaaki FURUYA
- H01 - BASIC ELECTRIC ELEMENTS

Shibaura Mechatronics Corp., Ltd.

Organization

Patents Grantslast 30 patents

Film forming apparatus

Heat treatment device

Film formation apparatus

Substrate treatment method and substrate treatment apparatus

Supply tank, supply device and supply system

Supply device and supply system

Substrate treatment device

Processing liquid supply device, substrate processing apparatus, an...

Electromagnetic wave attenuator, electronic device, film formation...

Substrate processing apparatus and substrate processing method

Substrate treatment device

Substrate treatment device

Substrate processing apparatus

Substrate treatment device

Film formation apparatus and moisture removal method thereof

Substrate treatment device

Substrate carrying apparatus

Film formation apparatus

Cooling device, substrate treatment device, cooling method, and sub...

Organic film forming apparatus

Substrate treatment device

Electromagnetic wave attenuator, electronic device, film formation...

Processing liquid generator and substrate processing apparatus usin...

Reflective mask cleaning apparatus and reflective mask cleaning method

Film formation apparatus and film formation method

Plasma processing apparatus

Plasma processing apparatus

Plasma processing apparatus

Substrate treatment device and substrate treatment method

Substrate processing apparatus and substrate processing method

Patents Applicationslast 30 patents

TRANSFER APPARATUS AND WAFER STORAGE CONTAINER CLEANING APPARATUS

WAFER STORAGE CONTAINER CLEANING APPARATUS

SUBSTRATE TREATMENT DEVICE

WAFER STORAGE CONTAINER PROCESSING APPARATUS

SUBSTRATE TREATMENT APPARATUS AND PROCESSING METHOD OF SUBSTRATE

CLEANING APPARATUS FOR WAFER STORAGE CONTAINER

CLEANING APPARATUS FOR WAFER STORAGE CONTAINER

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE DELIVERY APPARATUS AND SUBSTRATE DELIVERY METHOD

DRYING APPARATUS, DRY CONDITION CONFIRMATION METHOD, AND WAFER STOR...

MOUNTING TOOL AND MOUNTING APPARATUS

FILM FORMING APPARATUS

WAFER STORAGE CONTAINER DRYING APPARATUS AND CLEANING SYSTEM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

CLEANING APPARATUS

SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE

CLEANING APPARATUS FOR WAFER STORAGE CONTAINER

SUBSTRATE CLEANING APPARATUS

SUBSTRATE PROCESSING APPARATUS

FILM FORMATION APPARATUS

FILM FORMATION APPARATUS AND FILM FORMATION METHOD

ELECTROMAGNETIC WAVE ATTENUATOR, ELECTRONIC DEVICE, FILM FORMATION...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

PROCESSING LIQUID SUPPLY DEVICE, SUBSTRATE PROCESSING APPARATUS, AN...

PROCESSING LIQUID SUPPLY DEVICE, SUBSTRATE PROCESSING APPARATUS, AN...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

MAINTENANCE METHOD AND HEAT TREATMENT APPARATUS

SUPPLY DEVICE AND SUPPLY SYSTEM

SUPPLY TANK, SUPPLY DEVICE AND SUPPLY SYSTEM