TREA

Shibaura Mechatronics Corp., Ltd.

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  • Yokohama-shi, JP
Organizations

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    CLEANING APPARATUS
    • Publication number 20240100577
    • Publication date Mar 28, 2024
    • SHIBAURA MECHATRONICS CORPORATION
    • Yuichi IMAOKA
    • B08 - CLEANING
  • Information Patent Application

    SUBSTRATE TREATMENT APPARATUS AND METHOD FOR TREATING SUBSTRATE
    • Publication number 20240096653
    • Publication date Mar 21, 2024
    • SHIBAURA MECHATRONICS CORPORATION
    • Kensuke DEMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CLEANING APPARATUS FOR WAFER STORAGE CONTAINER
    • Publication number 20240091828
    • Publication date Mar 21, 2024
    • SHIBAURA MECHATRONICS CORPORATION
    • Junji ISHIHARA
    • B08 - CLEANING
  • Information Patent Application

    SUBSTRATE CLEANING APPARATUS
    • Publication number 20240071744
    • Publication date Feb 29, 2024
    • SHIBAURA MECHATRONICS CORPORATION
    • Yotaro FUKUOKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20230420288
    • Publication date Dec 28, 2023
    • SHIBAURA MECHATRONICS CORPORATION
    • Takahiro HAMADA
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    FILM FORMATION APPARATUS
    • Publication number 20230407458
    • Publication date Dec 21, 2023
    • SHIBAURA MECHATRONICS CORPORATION
    • Yoji TAKIZAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION APPARATUS AND FILM FORMATION METHOD
    • Publication number 20230366077
    • Publication date Nov 16, 2023
    • SHIBAURA MECHATRONICS CORPORATION
    • Shigeki MATSUNAKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ELECTROMAGNETIC WAVE ATTENUATOR, ELECTRONIC DEVICE, FILM FORMATION...
    • Publication number 20230326875
    • Publication date Oct 12, 2023
    • SHIBAURA MECHATRONICS CORPORATION
    • Hisashi NISHIGAKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20230307262
    • Publication date Sep 28, 2023
    • SHIBAURA MECHATRONICS CORPORATION
    • Konosuke HAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PROCESSING LIQUID SUPPLY DEVICE, SUBSTRATE PROCESSING APPARATUS, AN...
    • Publication number 20230307263
    • Publication date Sep 28, 2023
    • SHIBAURA MECHATRONICS CORPORATION
    • Masaaki FURUYA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PROCESSING LIQUID SUPPLY DEVICE, SUBSTRATE PROCESSING APPARATUS, AN...
    • Publication number 20230286013
    • Publication date Sep 14, 2023
    • SHIBAURA MECHATRONICS CORPORATION
    • Masaaki FURUYA
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20230271231
    • Publication date Aug 31, 2023
    • SHIBAURA MECHATRONICS CORPORATION
    • Kensuke DEMURA
    • B08 - CLEANING
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20230241636
    • Publication date Aug 3, 2023
    • SHIBAURA MECHATRONICS CORPORATION
    • Yoko TAKAKITA
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    MAINTENANCE METHOD AND HEAT TREATMENT APPARATUS
    • Publication number 20230107154
    • Publication date Apr 6, 2023
    • SHIBAURA MECHATRONICS CORPORATION
    • Junji ISHIHARA
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    SUPPLY DEVICE AND SUPPLY SYSTEM
    • Publication number 20230081295
    • Publication date Mar 16, 2023
    • SHIBAURA MECHATRONICS CORPORATION
    • Masaaki FURUYA
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    SUPPLY TANK, SUPPLY DEVICE AND SUPPLY SYSTEM
    • Publication number 20230077617
    • Publication date Mar 16, 2023
    • SHIBAURA MECHATRONICS CORPORATION
    • Masaaki FURUYA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE DRYING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220319875
    • Publication date Oct 6, 2022
    • SHIBAURA MECHATRONICS CORPORATION
    • Yoko TARUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMATION APPARATUS
    • Publication number 20220319820
    • Publication date Oct 6, 2022
    • SHIBAURA MECHATRONICS CORPORATION
    • Hisashi NISHIGAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE TREATMENT DEVICE
    • Publication number 20220310417
    • Publication date Sep 29, 2022
    • SHIBAURA MECHATRONICS CORPORATION
    • Minami NAKAMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE TREATMENT DEVICE
    • Publication number 20220270914
    • Publication date Aug 25, 2022
    • SHIBAURA MECHATRONICS CORPORATION
    • Masaya KAMIYA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HEAT TREATMENT DEVICE
    • Publication number 20220248502
    • Publication date Aug 4, 2022
    • SHIBAURA MECHATRONICS CORPORATION
    • Yuichi IMAOKA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    SUBSTRATE CARRYING APPARATUS
    • Publication number 20220084861
    • Publication date Mar 17, 2022
    • SHIBAURA MECHATRONICS CORPORATION
    • Masaaki FURUYA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220080468
    • Publication date Mar 17, 2022
    • SHIBAURA MECHATRONICS CORPORATION
    • Kensuke DEMURA
    • B08 - CLEANING
  • Information Patent Application

    FILM FORMATION APPARATUS
    • Publication number 20220084871
    • Publication date Mar 17, 2022
    • SHIBAURA MECHATRONICS CORPORATION
    • Shohei TANABE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20220068671
    • Publication date Mar 3, 2022
    • SHIBAURA MECHATRONICS CORPORATION
    • Kensuke DEMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
    • Publication number 20220037149
    • Publication date Feb 3, 2022
    • SHIBAURA MECHATRONICS CORPORATION
    • Yuji NAGASHIMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    COOLING DEVICE, SUBSTRATE TREATMENT DEVICE, COOLING METHOD, AND SUB...
    • Publication number 20210366739
    • Publication date Nov 25, 2021
    • SHIBAURA MECHATRONICS CORPORATION
    • Kensuke DEMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE TREATMENT DEVICE
    • Publication number 20210323036
    • Publication date Oct 21, 2021
    • SHIBAURA MECHATRONICS CORPORATION
    • Daisuke MATSUSHIMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE TREATMENT DEVICE
    • Publication number 20210299713
    • Publication date Sep 30, 2021
    • SHIBAURA MECHATRONICS CORPORATION
    • Kensuke DEMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROMAGNETIC WAVE ATTENUATOR, ELECTRONIC DEVICE, FILM FORMATION...
    • Publication number 20210305171
    • Publication date Sep 30, 2021
    • SHIBAURA MECHATRONICS CORPORATION
    • Hisashi NISHIGAKI
    • H01 - BASIC ELECTRIC ELEMENTS