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Plasma enhanced pulsed layer deposition
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Patent number 6,689,220
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Issue date Feb 10, 2004
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Simplus Systems Corporation
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Tue Nguyen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Replaceable shielding apparatus
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Patent number 6,641,672
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Issue date Nov 4, 2003
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Simplus Systems Corporation
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Tue Nguyen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Semiconductor processing system and method
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Patent number 6,610,169
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Issue date Aug 26, 2003
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Simplus Systems Corporation
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Tue Nguyen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Removable lid and floating pivot
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Patent number 6,609,632
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Issue date Aug 26, 2003
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Simplus Systems Corporation
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Tue Nguyen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Integrated precursor delivery system
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Patent number 6,572,706
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Issue date Jun 3, 2003
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Simplus Systems Corporation
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Tue Nguyen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vaporizer for sensitive precursors
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Patent number 6,572,707
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Issue date Jun 3, 2003
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Simplus Systems Corporation
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Tue Nguyen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Liquid delivery system emulsifier
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Patent number 6,488,272
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Issue date Dec 3, 2002
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Simplus Systems Corporation
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Tue Nguyen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Three-dimensional showerhead apparatus
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Patent number 6,444,039
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Issue date Sep 3, 2002
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Simplus Systems Corporation
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Tue Nguyen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Replaceable shielding apparatus
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Patent number 6,440,219
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Issue date Aug 27, 2002
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Simplus Systems Corporation
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Tue Nguyen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Multi-thermal zone shielding apparatus
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Patent number 6,221,166
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Issue date Apr 24, 2001
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Simplus Systems Corporation
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Tue Nguyen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...