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Patents Grants
last 30 patents
Information
Patent Grant
Raw material supply unit, and apparatus comprising same for growing...
Patent number
12,173,426
Issue date
Dec 24, 2024
SK SILTRON CO. LTD.
Young Jung Lee
C30 - CRYSTAL GROWTH
Information
Patent Grant
Wafer polishing head, method for manufacturing wafer polishing head...
Patent number
12,134,162
Issue date
Nov 5, 2024
SK SILTRON CO., LTD.
Jae Chel Sung
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus of evaluating quality of wafer or single cryst...
Patent number
12,118,706
Issue date
Oct 15, 2024
SK SILTRON CO., LTD.
Hyun Woo Park
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus of oxidation-combusting an ingot grower and method thereof
Patent number
12,110,608
Issue date
Oct 8, 2024
SK SILTRON CO., LTD.
Jung Ryul Kim
B08 - CLEANING
Information
Patent Grant
Ingot temperature controller and wire sawing device having same
Patent number
12,090,685
Issue date
Sep 17, 2024
SK SILTRON CO., LTD.
Young Il Jin
C30 - CRYSTAL GROWTH
Information
Patent Grant
Air circulation system and final polishing apparatus including the...
Patent number
12,076,835
Issue date
Sep 3, 2024
SK SILTRON CO., LTD.
Yong Choi
B24 - GRINDING POLISHING
Information
Patent Grant
Raw material supply unit, single-crystal silicon ingot growing appa...
Patent number
12,060,649
Issue date
Aug 13, 2024
SK SILTRON CO., LTD.
Yun Gwang Shin
C30 - CRYSTAL GROWTH
Information
Patent Grant
Wafer cleaning device
Patent number
12,051,598
Issue date
Jul 30, 2024
SK SILTRON CO., LTD.
Se Geun Ha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Single crystal ingot growth control device
Patent number
12,043,917
Issue date
Jul 23, 2024
SK SILTRON CO., LTD.
Hyun Woo Park
G05 - CONTROLLING REGULATING
Information
Patent Grant
Raw material feed hopper and single crystal growth system
Patent number
11,982,013
Issue date
May 14, 2024
SK SILTRON CO., LTD.
Sang Heon Lee
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method for evaluating defective region of wafer
Patent number
11,955,386
Issue date
Apr 9, 2024
SK SILTRON CO., LTD.
Jae Hyeong Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for growing silicon single crystal ingot
Patent number
11,891,718
Issue date
Feb 6, 2024
SK SILTRON CO., LTD.
Hyun Ju Hwang
C30 - CRYSTAL GROWTH
Information
Patent Grant
Pin hole inspection apparatus and method
Patent number
11,815,429
Issue date
Nov 14, 2023
SK SILTRON CO., LTD.
Chang Rak Kim
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus of cleaning a polishing pad and polishing device
Patent number
11,780,050
Issue date
Oct 10, 2023
SK SILTRON CO., LTD.
Ji Hwan Cho
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer evaluation method
Patent number
11,769,697
Issue date
Sep 26, 2023
SK SILTRON CO., LTD.
Jung Kil Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer and method for analyzing shape thereof
Patent number
11,656,186
Issue date
May 23, 2023
SK SILTRON CO., LTD.
Chung Hyun Lee
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Crucible for ingot grower
Patent number
11,608,567
Issue date
Mar 21, 2023
SK SILTRON CO., LTD.
In Gu Kang
C30 - CRYSTAL GROWTH
Information
Patent Grant
Wafer cassette packing apparatus
Patent number
11,569,106
Issue date
Jan 31, 2023
SK SILTRON CO., LTD.
Tae Ju Yun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer cassette stocker and wafer cassette drying method using the same
Patent number
11,569,109
Issue date
Jan 31, 2023
SK SILTRON CO., LTD.
Dae Won Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing pad for wafer polishing apparatus and manufacturing metho...
Patent number
11,534,889
Issue date
Dec 27, 2022
SK SILTRON CO., LTD.
Jin Woo Ahn
B24 - GRINDING POLISHING
Information
Patent Grant
First cleaning apparatus, cleaning equipment including the same, an...
Patent number
11,488,844
Issue date
Nov 1, 2022
SK SILTRON CO., LTD.
Ki Soo Kwon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing measurement device and abrasion time controlling method t...
Patent number
11,389,922
Issue date
Jul 19, 2022
SK SILTRON CO., LTD.
Kee Yun Han
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer carrier thickness measuring device
Patent number
11,371,829
Issue date
Jun 28, 2022
SK SILTRON CO., LTD.
Suk Jin Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon single crystal growth method and apparatus
Patent number
11,332,848
Issue date
May 17, 2022
SK SILTRON CO., LTD.
Jong Min Kang
C30 - CRYSTAL GROWTH
Information
Patent Grant
Silicon supply part, and device and method for growing silicon mono...
Patent number
11,255,023
Issue date
Feb 22, 2022
SK SILTRON CO., LTD.
Jung Hyun Kong
C30 - CRYSTAL GROWTH
Information
Patent Grant
Slurry cooling device and slurry supply system having the same
Patent number
11,253,970
Issue date
Feb 22, 2022
SK SILTRON CO., LTD.
Sang Ho Lee
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for growing single crystalline ingot and method for growi...
Patent number
11,214,891
Issue date
Jan 4, 2022
SK SILTRON CO., LTD.
Do-Won Song
C30 - CRYSTAL GROWTH
Information
Patent Grant
Temperature control device for single crystal ingot growth and temp...
Patent number
11,198,948
Issue date
Dec 14, 2021
SK SILTRON CO., LTD.
Hyun Woo Park
G05 - CONTROLLING REGULATING
Information
Patent Grant
Wafer polishing apparatus
Patent number
11,198,207
Issue date
Dec 14, 2021
SK SILTRON CO., LTD.
Yong Choi
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer cleaning apparatus and cleaning method using the same
Patent number
11,152,228
Issue date
Oct 19, 2021
SK SILTRON CO., LTD.
Jae Hwan Yi
H01 - BASIC ELECTRIC ELEMENTS
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Patents Applications
last 30 patents
Information
Patent Application
DEVICE AND METHOD FOR SEPARATING WAFERS
Publication number
20240326401
Publication date
Oct 3, 2024
SK SILTRON CO., LTD.
Se Ah OH
B32 - LAYERED PRODUCTS
Information
Patent Application
EXTERNAL CRUCIBLE ACCOMMODATING SILICON MELT AND SILICON SINGLE CRY...
Publication number
20240309542
Publication date
Sep 19, 2024
SK SILTRON CO., LTD.
Ji Hoon Kang
C30 - CRYSTAL GROWTH
Information
Patent Application
SINGLE WAFER-TYPE WAFER CLEANING DEVICE AND METHOD FOR CONTROLLING...
Publication number
20240304469
Publication date
Sep 12, 2024
SK SILTRON CO., LTD.
Gun Ho LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR ANALYZING METAL CONTAMINATION OF A WAFER AND A METHOD...
Publication number
20240282566
Publication date
Aug 22, 2024
SK SILTRON CO., LTD.
Woo Young PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SINGLE CRYSTAL SILICON INGOT AND METHOD OF GROWING THE SAME
Publication number
20240263344
Publication date
Aug 8, 2024
SK SILTRON CO., LTD.
Jong Min Kang
C30 - CRYSTAL GROWTH
Information
Patent Application
CARRIER RECYCLING PROCESS
Publication number
20240227121
Publication date
Jul 11, 2024
SK SILTRON CO., LTD
Soo Cheon JANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR GROWING SILICON SINGLE CRYSTAL INGOTS
Publication number
20240003047
Publication date
Jan 4, 2024
SK SILTRON CO., LTD.
Woo Tae KIM
C30 - CRYSTAL GROWTH
Information
Patent Application
PIN HOLE INSPECTION APPARATUS AND METHOD
Publication number
20230314270
Publication date
Oct 5, 2023
SK SILTRON CO., LTD.
Chang Rak KIM
G01 - MEASURING TESTING
Information
Patent Application
INGOT GROWING APPARATUS AND MONITORING METHOD THEREOF
Publication number
20230296543
Publication date
Sep 21, 2023
SK SILTRON CO., LTD
Min Jae YOON
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DEVICE FOR EVALUATING EDGE DEFECTS IN A SILICON WAFER AND METHOD TH...
Publication number
20230289949
Publication date
Sep 14, 2023
SK SILTRON CO., LTD
Jung Won SHIN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INGOT GROWING APPARATUS AND METHOD THEREOF
Publication number
20230287593
Publication date
Sep 14, 2023
SK SILTRON CO., LTD
Hyun Woo PARK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR DETERMINING FINE PARTICLE DEFECTS ON SILICON WAFER
Publication number
20230260853
Publication date
Aug 17, 2023
SK SILTRON CO., LTD.
Woo Young PARK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
LINER AND EPITAXIAL REACTOR COMPRISING SAME
Publication number
20230257903
Publication date
Aug 17, 2023
SK SILTRON CO., LTD
Se Ri LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAX COATING APPARATUS FOR WAFER MOUNTING AND WAFER MOUNTING APPARAT...
Publication number
20230253220
Publication date
Aug 10, 2023
SK SILTRON CO., LTD
Kwang Nyeong JANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WORKPLATE FOR Y-AXIS COMPENSATION OF INGOT AND Y-AXIS COMPENSATION...
Publication number
20230219258
Publication date
Jul 13, 2023
SK SILTRON CO., LTD.
Ah Reum KIM
B28 - WORKING CEMENT, CLAY, OR STONE
Information
Patent Application
AUTOMATIC ABRASION COMPENSATION SYSTEM OF LOWER PLATE AND WAFER LAP...
Publication number
20230211457
Publication date
Jul 6, 2023
SK SILTRON CO., LTD.
Jae Pyo LEE
B24 - GRINDING POLISHING
Information
Patent Application
ASC PROCESS AUTOMATION DEVICE
Publication number
20230154767
Publication date
May 18, 2023
SK SILTRON CO., LTD.
Ho Yong LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR EVALUATING OF DEFECT AREA OF WAFER
Publication number
20230118491
Publication date
Apr 20, 2023
SK SILTRON CO., LTD.
Kyu Hyung LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIFT PIN, WAFER PROCESSING APPARATUS COMPRISING SAME, AND METHOD FO...
Publication number
20230039939
Publication date
Feb 9, 2023
SK SILTRON CO., LTD.
Mi Ri KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING PAD FOR WAFER POLISHING DEVICE, AND APPARATUS AND METHOD...
Publication number
20230040654
Publication date
Feb 9, 2023
SK SILTRON CO., LTD.
Jin Woo AHN
B24 - GRINDING POLISHING
Information
Patent Application
INGOT TEMPERATURE CONTROLLER AND WIRE SAWING DEVICE HAVING SAME
Publication number
20220410432
Publication date
Dec 29, 2022
SK SILTRON CO., LTD.
Young Il JIN
C30 - CRYSTAL GROWTH
Information
Patent Application
WAFER POLISHING HEAD, METHOD FOR MANUFACTURING WAFER POLISHING HEAD...
Publication number
20220379429
Publication date
Dec 1, 2022
SK SILTRON CO., LTD.
Jae Chel SUNG
B24 - GRINDING POLISHING
Information
Patent Application
RAW MATERIAL SUPPLY UNIT, SINGLE-CRYSTAL SILICON INGOT GROWING APPA...
Publication number
20220372650
Publication date
Nov 24, 2022
SK SILTRON CO., LTD.
Yun Gwang SHIN
C30 - CRYSTAL GROWTH
Information
Patent Application
RAW MATERIAL SUPPLY UNIT, AND APPARATUS COMPRISING SAME FOR GROWING...
Publication number
20220364259
Publication date
Nov 17, 2022
SK SILTRON CO., LTD.
Young Jung LEE
C30 - CRYSTAL GROWTH
Information
Patent Application
METHOD FOR GROWING EPITAXIAL LAYER ON WAFER
Publication number
20220316090
Publication date
Oct 6, 2022
SK SILTRON CO., LTD.
Dong Ho KANG
C30 - CRYSTAL GROWTH
Information
Patent Application
METHOD AND APPARATUS FOR GROWING SILICON SINGLE CRYSTAL INGOT
Publication number
20220251724
Publication date
Aug 11, 2022
SK SILTRON CO., LTD.
Hyun Ju HWANG
C30 - CRYSTAL GROWTH
Information
Patent Application
METHOD AND APPARATUS OF EVALUATING QUALITY OF WAFER OR SINGLE CRYST...
Publication number
20220237771
Publication date
Jul 28, 2022
SK SILTRON CO., LTD
Hyun Woo PARK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
APPARATUS OF OXIDATION-COMBUSTING AN INGOT GROWER AND METHOD THEREOF
Publication number
20220235485
Publication date
Jul 28, 2022
SK SILTRON CO., LTD
Jung Ryul KIM
B08 - CLEANING
Information
Patent Application
RAW MATERIAL FEED HOPPER AND SINGLE CRYSTAL GROWTH SYSTEM
Publication number
20220228289
Publication date
Jul 21, 2022
SK SILTRON CO., LTD
Sang Heon LEE
C30 - CRYSTAL GROWTH
Information
Patent Application
AIR CIRCULATION SYSTEM AND FINAL POLISHING APPARATUS INCLUDING THE...
Publication number
20220219288
Publication date
Jul 14, 2022
SK Siltron Co., Ltd.
Yong CHOI
B24 - GRINDING POLISHING