Sokudo Co,. Ltd.

Organization

Shimogyo-ku, JP

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Parallel substrate treatment for a plurality of substrate treatment...
- Patent number 8,851,008
- Issue date Oct 7, 2014
- Sokudo Co., Ltd.
- Yoshiteru Fukutomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method
- Patent number 8,851,769
- Issue date Oct 7, 2014
- Sokudo Co., Ltd.
- Koji Kaneyama
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus, storage device, and method of trans...
- Patent number 8,827,621
- Issue date Sep 9, 2014
- Sokudo Co., Ltd.
- Yukihiko Inagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus with heater element held by vacuum
- Patent number 8,785,821
- Issue date Jul 22, 2014
- Sokudo Co., Ltd.
- Harald Herchen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for and method of heat-treating film formed on surface of...
- Patent number 8,781,308
- Issue date Jul 15, 2014
- Sokudo Co., Ltd.
- Masahiko Harumoto
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate treating apparatus with inter-unit buffers
- Patent number 8,708,587
- Issue date Apr 29, 2014
- Sokudo Co., Ltd.
- Hiroyuki Ogura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,635,968
- Issue date Jan 28, 2014
- Sokudo Co., Ltd.
- Koji Kaneyama
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus
- Patent number 8,631,809
- Issue date Jan 21, 2014
- Sokudo Co., Ltd.
- Tetsuya Hamada
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,585,830
- Issue date Nov 19, 2013
- Sokudo Co., Ltd.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,580,340
- Issue date Nov 12, 2013
- Sokudo Co., Ltd.
- Masanori Imamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treating apparatus with inter-unit buffers
- Patent number 8,545,118
- Issue date Oct 1, 2013
- Sokudo Co., Ltd.
- Hiroyuki Ogura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method
- Patent number 8,540,824
- Issue date Sep 24, 2013
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,496,761
- Issue date Jul 30, 2013
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, substrate processing system and ins...
- Patent number 8,477,301
- Issue date Jul 2, 2013
- Sokudo Co., Ltd.
- Masahito Kashiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for and method of processing substrate subjected to expos...
- Patent number 8,460,476
- Issue date Jun 11, 2013
- Sokudo Co., Ltd.
- Tetsuya Hamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate transport apparatus and heat treatment apparatus
- Patent number 8,383,990
- Issue date Feb 26, 2013
- Sokudo Co., Ltd.
- Akihiko Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning device and substrate processing apparatus includ...
- Patent number 8,286,293
- Issue date Oct 16, 2012
- Sokudo Co., Ltd.
- Koji Nishiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,286,576
- Issue date Oct 16, 2012
- Sokudo Co., Ltd.
- Osamu Tamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus with multi-speed drying having rinse...
- Patent number 8,218,124
- Issue date Jul 10, 2012
- Sokudo Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning and processing apparatus with magnetically contr...
- Patent number 8,166,985
- Issue date May 1, 2012
- Sokudo Co., Ltd.
- Koji Nishiyama
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate developing method and developing apparatus
- Patent number 8,137,576
- Issue date Mar 20, 2012
- Sokudo Co., Ltd.
- Masahiko Harumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi-channel developer system
- Patent number 8,127,713
- Issue date Mar 6, 2012
- Sokudo Co., Ltd.
- Eric B. Britcher
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Temperature measurement in a substrate processing apparatus
- Patent number 8,122,851
- Issue date Feb 28, 2012
- Sokudo Co., Ltd.
- Tetsuya Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,040,488
- Issue date Oct 18, 2011
- Sokudo Co., Ltd.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,034,190
- Issue date Oct 11, 2011
- Sokudo Co., Ltd.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus with integrated cleaning unit
- Patent number 8,031,324
- Issue date Oct 4, 2011
- Sokudo Co., Ltd.
- Yoshiteru Fukutomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method usin...
- Patent number 8,015,985
- Issue date Sep 13, 2011
- Sokudo Co., Ltd.
- Tetsuya Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for monitoring and control of suck back level...
- Patent number 7,935,948
- Issue date May 3, 2011
- Sokudo Co., Ltd.
- Erica R. Porras
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
First detecting sheet and first thermometric system for detecting a...
- Patent number 7,914,202
- Issue date Mar 29, 2011
- Sokudo Co., Ltd.
- Kenji Kamei
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for controlling bake plate temperature in a semic...
- Patent number 7,831,135
- Issue date Nov 9, 2010
- Sokudo Co., Ltd.
- Harald Herchen
- F27 - FURNACES KILNS OVENS RETORTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150013603
- Publication date Jan 15, 2015
- Dainippon Screen Mfg. Co., Ltd.
- Kazuo MORIOKA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, STORAGE DEVICE, AND METHOD OF TRANS...
- Publication number 20140341681
- Publication date Nov 20, 2014
- Sokudo Co., Ltd.
- Yukihiko INAGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20140285790
- Publication date Sep 25, 2014
- SOKUDO CO., LTD.
- Koji NISHIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING AND DRYING METHOD AND SUBSTRATE DEVELOPING METHOD
- Publication number 20140261571
- Publication date Sep 18, 2014
- SOKUDO CO., LTD.
- Tomohiro GOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NEGATIVE DEVELOPING METHOD AND NEGATIVE DEVELOPING APPARATUS
- Publication number 20140199638
- Publication date Jul 17, 2014
- SOKUDO CO., LTD.
- Tadashi MIYAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140120477
- Publication date May 1, 2014
- Sokudo Co., Ltd.
- Shuichi Yasuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS WITH INTER-UNIT BUFFERS
- Publication number 20140000514
- Publication date Jan 2, 2014
- SOKUDO CO., LTD.
- Hiroyuki Ogura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20120156380
- Publication date Jun 21, 2012
- Sokudo Co., Ltd.
- Yoshiteru Fukutomi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20120145074
- Publication date Jun 14, 2012
- Sokudo Co., Ltd.
- Yoshiteru Fukutomi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20120145073
- Publication date Jun 14, 2012
- Sokudo Co., Ltd.
- Yoshiteru Fukutomi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS
- Publication number 20120122038
- Publication date May 17, 2012
- SOKUDO CO., LTD.
- Masahiko Harumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR THERMAL TREATMENT OF SUBSTRATES
- Publication number 20120055916
- Publication date Mar 8, 2012
- Sokudo Co., Ltd.
- Leon Volfovski
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND SYSTEM FOR REMOVAL OF FILMS FROM PERIPHERAL PORTIONS OF...
- Publication number 20120037593
- Publication date Feb 16, 2012
- SOKUDO CO., LTD.
- Tadashi Miyagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS WITH HEATER ELEMENT HELD BY VACUUM
- Publication number 20110000426
- Publication date Jan 6, 2011
- Sokudo Co., Ltd.
- Harald Herchen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100239986
- Publication date Sep 23, 2010
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100190116
- Publication date Jul 29, 2010
- SOKUDO CO., LTD.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100159142
- Publication date Jun 24, 2010
- SOKUDO CO., LTD.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTI-CHANNEL DEVELOPER SYSTEM
- Publication number 20100151690
- Publication date Jun 17, 2010
- Sokudo Co., Ltd.
- Eric B. Britcher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100136492
- Publication date Jun 3, 2010
- SOKUDO CO., LTD.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100136257
- Publication date Jun 3, 2010
- SOKUDO CO., LTD.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE SUBJECTED TO EXPOS...
- Publication number 20100126527
- Publication date May 27, 2010
- Sokudo Co., Ltd.
- Tetsuya Hamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100129526
- Publication date May 27, 2010
- SOKUDO CO., LTD.
- Shuichi Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100081097
- Publication date Apr 1, 2010
- Sokudo Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100075054
- Publication date Mar 25, 2010
- Sokudo Co., Ltd.
- Koji Kaneyama
- G11 - INFORMATION STORAGE
Information Patent Application
METHODS AND SYSTEMS FOR CONTROLLING CRITICAL DIMENSIONS IN TRACK LI...
- Publication number 20090275149
- Publication date Nov 5, 2009
- SOKUDO CO., LTD.
- Timothy Michaelson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus
- Publication number 20090269936
- Publication date Oct 29, 2009
- SOKUDO CO., LTD.
- Osamu Tamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DOUBLE EXPOSURE LITHOGRAPHY USING LOW TEMPERATURE OXIDE AND UV CURE...
- Publication number 20090253078
- Publication date Oct 8, 2009
- SOKUDO CO., LTD.
- Nikolaos Bekiaris
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR SUPPORTING A SUBSTRATE DURING SEMICONDUCTOR PROCESSIN...
- Publication number 20090179366
- Publication date Jul 16, 2009
- Sokudo Co., Ltd.
- Harald Herchen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20090173364
- Publication date Jul 9, 2009
- Sokudo Co., Ltd.
- Tetsuya Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS WITH PARALLEL SUBSTRATE TREATMENT LINES
- Publication number 20090165712
- Publication date Jul 2, 2009
- SOKUDO CO., LTD.
- Hiroyuki Ogura
- H01 - BASIC ELECTRIC ELEMENTS

Sokudo Co,. Ltd.

Organization

Patents Grantslast 30 patents

Parallel substrate treatment for a plurality of substrate treatment...

Substrate processing method

Substrate processing apparatus, storage device, and method of trans...

Substrate processing apparatus with heater element held by vacuum

Apparatus for and method of heat-treating film formed on surface of...

Substrate treating apparatus with inter-unit buffers

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate treating apparatus with inter-unit buffers

Substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus, substrate processing system and ins...

Apparatus for and method of processing substrate subjected to expos...

Substrate transport apparatus and heat treatment apparatus

Substrate cleaning device and substrate processing apparatus includ...

Substrate processing apparatus

Substrate processing apparatus with multi-speed drying having rinse...

Substrate cleaning and processing apparatus with magnetically contr...

Substrate developing method and developing apparatus

Multi-channel developer system

Temperature measurement in a substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus with integrated cleaning unit

Substrate processing apparatus and substrate processing method usin...

Method and apparatus for monitoring and control of suck back level...

First detecting sheet and first thermometric system for detecting a...

Method and system for controlling bake plate temperature in a semic...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, STORAGE DEVICE, AND METHOD OF TRANS...

SUBSTRATE TREATING APPARATUS

SUBSTRATE CLEANING AND DRYING METHOD AND SUBSTRATE DEVELOPING METHOD

NEGATIVE DEVELOPING METHOD AND NEGATIVE DEVELOPING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATING APPARATUS WITH INTER-UNIT BUFFERS

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

DEVELOPING APPARATUS

METHOD AND SYSTEM FOR THERMAL TREATMENT OF SUBSTRATES

METHOD AND SYSTEM FOR REMOVAL OF FILMS FROM PERIPHERAL PORTIONS OF...

SUBSTRATE PROCESSING APPARATUS WITH HEATER ELEMENT HELD BY VACUUM

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

MULTI-CHANNEL DEVELOPER SYSTEM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE SUBJECTED TO EXPOS...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

METHODS AND SYSTEMS FOR CONTROLLING CRITICAL DIMENSIONS IN TRACK LI...

Substrate Processing Apparatus

DOUBLE EXPOSURE LITHOGRAPHY USING LOW TEMPERATURE OXIDE AND UV CURE...

APPARATUS FOR SUPPORTING A SUBSTRATE DURING SEMICONDUCTOR PROCESSIN...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...

SUBSTRATE TREATING APPARATUS WITH PARALLEL SUBSTRATE TREATMENT LINES

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