Solid-State Research, Inc.

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Weston, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
CMOS-compatible bulk-micromachining process for single-crystal MEMS...
- Patent number 7,749,789
- Issue date Jul 6, 2010
- Solid-State Research, Inc.
- Demetrios P Papageorgiou
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CMOS-COMPATIBLE BULK-MICROMACHINING PROCESS FOR SINGLE-CRYSTAL MEMS...
- Publication number 20090275162
- Publication date Nov 5, 2009
- SOLID-STATE RESEARCH
- Demetrios P. Papageorgiou
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Trademarklast 30 trademarks