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Patents Grantslast 30 patents

Information Patent Grant
Proximity exposure method and machine therefor
- Patent number 5,434,648
- Issue date Jul 18, 1995
- Sortec Corporation
- Keisuke Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist patterns and method of forming resist patterns
- Patent number 5,374,502
- Issue date Dec 20, 1994
- Sortec Corporation
- Toshihiko Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist patterns and method of forming resist patterns
- Patent number 5,326,672
- Issue date Jul 5, 1994
- Sortec Corporation
- Toshihiko Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray mask alignment method and apparatus therefor as well as X-ray...
- Patent number 5,325,414
- Issue date Jun 28, 1994
- Sortec Corporation
- Toshihiko Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting method and device therefor as well as aligning d...
- Patent number 5,182,610
- Issue date Jan 26, 1993
- Sortec Corporation
- Hiromasa Shibata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

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