Spectel Research Corporation

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Palo Alto, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Interferometric back focal plane scatterometry with Koehler illumin...
- Patent number 7,061,623
- Issue date Jun 13, 2006
- Spectel Research Corporation
- Mark P. Davidson
- G01 - MEASURING TESTING
Information Patent Grant
Mireau interference objective lens
- Patent number 7,054,071
- Issue date May 30, 2006
- Spectel Research Corporation
- Mark P. Davidson
- G02 - OPTICS

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