Speedfam Corporation

Organization

Chandler, AZ, US

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Two-step chemical-mechanical planarization for damascene structures...
- Patent number 6,555,466
- Issue date Apr 29, 2003
- Speedfam Corporation
- Thomas Laursen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacture of thin-film magnetic heads
- Patent number 6,045,431
- Issue date Apr 4, 2000
- Speedfam Corporation
- Sergei Cheprasov
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for holding workpieces during lapping, honing, and polishing
- Patent number 6,030,280
- Issue date Feb 29, 2000
- Speedfam Corporation
- Clinton Fruitman
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,001,005
- Issue date Dec 14, 1999
- Speedfam Corporation
- Robert L. Anderson
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus with improved alignment of polishing plates
- Patent number 5,997,390
- Issue date Dec 7, 1999
- Speedfam Corporation
- John Hose
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for enhanced cleaning of a workpiece with mech...
- Patent number 5,975,094
- Issue date Nov 2, 1999
- Speedfam Corporation
- Eric C. Shurtliff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer polishing with improved end point detection
- Patent number 5,972,162
- Issue date Oct 26, 1999
- Speedfam Corporation
- Joseph V. Cesna
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus with support columns supporting multiple platfo...
- Patent number 5,957,763
- Issue date Sep 28, 1999
- Speedfam Corporation
- Robert L. Anderson
- B24 - GRINDING POLISHING
Information Patent Grant
Post-CMP wet-HF cleaning station
- Patent number 5,954,888
- Issue date Sep 21, 1999
- Speedfam Corporation
- Anand Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for distributing a polishing agent onto a poli...
- Patent number 5,921,849
- Issue date Jul 13, 1999
- Speedfam Corporation
- Inki Kim
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer carrier for semiconductor wafer polishing machine
- Patent number 5,916,015
- Issue date Jun 29, 1999
- Speedfam Corporation
- John Natalicio
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for rinsing wafers in the context of a combined cleaning...
- Patent number 5,899,216
- Issue date May 4, 1999
- Speedfam Corporation
- Chad Goudie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Grinding composition using abrasive particles on bubbles
- Patent number 5,885,312
- Issue date Mar 23, 1999
- Speedfam Corporation
- Clinton O. Fruitman
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for cleaning wafers and discs
- Patent number 5,870,792
- Issue date Feb 16, 1999
- Speedfam Corporation
- Eric C. Shurtliff
- B08 - CLEANING
Information Patent Grant
Methods and apparatus for detecting removal of thin film layers dur...
- Patent number 5,872,633
- Issue date Feb 16, 1999
- Speedfam Corporation
- Paul Holzapfel
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and apparatus for measuring and dispensing processing solut...
- Patent number 5,857,893
- Issue date Jan 12, 1999
- Speedfam Corporation
- Gregory A. Olsen
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for conditioning polishing pads utilizing brazed diamond...
- Patent number 5,842,912
- Issue date Dec 1, 1998
- Speedfam Corporation
- Paul Holzapfel
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and apparatus for the in-process detection of workpieces wi...
- Patent number 5,834,645
- Issue date Nov 10, 1998
- Speedfam Corporation
- Anthony Bartels
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for the in-process detection of workpieces with a monochr...
- Patent number 5,823,853
- Issue date Oct 20, 1998
- Speedfam Corporation
- Anthony L. Bartels
- G05 - CONTROLLING REGULATING
Information Patent Grant
Dual column abrading machine
- Patent number 5,803,798
- Issue date Sep 8, 1998
- Speedfam Corporation
- Joseph V. Cesna
- B24 - GRINDING POLISHING
Information Patent Grant
Bearing assembly for wafer planarization carrier
- Patent number 5,791,978
- Issue date Aug 11, 1998
- Speedfam Corporation
- Joseph V. Cesna
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for the in-process detection of workpieces in a CMP envir...
- Patent number 5,733,171
- Issue date Mar 31, 1998
- Speedfam Corporation
- Robert F. Allen
- G05 - CONTROLLING REGULATING
Information Patent Grant
Abrasive foam grinding composition
- Patent number 5,713,968
- Issue date Feb 3, 1998
- Speedfam Corporation
- Clinton O. Fruitman
- B24 - GRINDING POLISHING
Information Patent Grant
Uniform velocity double sided finishing machine
- Patent number 5,274,960
- Issue date Jan 4, 1994
- Speedfam Corporation
- Chris E. Karlsrud
- B24 - GRINDING POLISHING

Speedfam Corporation

Organization

Patents Grantslast 30 patents

Two-step chemical-mechanical planarization for damascene structures...

Manufacture of thin-film magnetic heads

Apparatus for holding workpieces during lapping, honing, and polishing

Polishing apparatus

Polishing apparatus with improved alignment of polishing plates

Method and apparatus for enhanced cleaning of a workpiece with mech...

Wafer polishing with improved end point detection

Polishing apparatus with support columns supporting multiple platfo...

Post-CMP wet-HF cleaning station

Method and apparatus for distributing a polishing agent onto a poli...

Wafer carrier for semiconductor wafer polishing machine

Apparatus for rinsing wafers in the context of a combined cleaning...

Grinding composition using abrasive particles on bubbles

Apparatus for cleaning wafers and discs

Methods and apparatus for detecting removal of thin film layers dur...

Methods and apparatus for measuring and dispensing processing solut...

Apparatus for conditioning polishing pads utilizing brazed diamond...

Methods and apparatus for the in-process detection of workpieces wi...

Apparatus for the in-process detection of workpieces with a monochr...

Dual column abrading machine

Bearing assembly for wafer planarization carrier

Apparatus for the in-process detection of workpieces in a CMP envir...

Abrasive foam grinding composition

Uniform velocity double sided finishing machine