SpeedFam-IPEC Co Ltd

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Kanagawa-pref, JP

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Patents Grantslast 30 patents

Information Patent Grant
Processing apparatus for etching the edge of a silicon wafer
- Patent number 6,406,589
- Issue date Jun 18, 2002
- Speedfam-Ipec Co LTD
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing machine
- Patent number 6,250,997
- Issue date Jun 26, 2001
- Speedfam-Ipec Co LTD
- Kazutomo Hatano
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing compound and a polishing method for silicon wafer
- Patent number 6,238,272
- Issue date May 29, 2001
- SpeedFam-IPEC Co Ltd
- Hiroaki Tanaka
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...