SpeedFam-IPEC Corporation

Organization

Chandler, AZ, US

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for controlling slurry distribution
- Patent number 7,314,402
- Issue date Jan 1, 2008
- SpeedFam-IPEC Corporation
- Thomas Laursen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Orbiting indexable belt polishing station for chemical mechanical p...
- Patent number 7,229,343
- Issue date Jun 12, 2007
- SpeedFam-IPEC Corporation
- Saket Chadda
- B24 - GRINDING POLISHING
Information Patent Grant
Work piece carrier with adjustable pressure zones and barriers and...
- Patent number 7,140,956
- Issue date Nov 28, 2006
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and apparatus for the chemical mechanical planarization of...
- Patent number 7,083,501
- Issue date Aug 1, 2006
- SpeedFam-IPEC Corporation
- Clinton O. Fruitman
- B24 - GRINDING POLISHING
Information Patent Grant
Clean room facility and construction method
- Patent number 7,083,515
- Issue date Aug 1, 2006
- SpeedFam-IPEC Corporation
- Joseph R. Rapisarda
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Apparatus for electrochemically depositing a material onto a workpi...
- Patent number 7,033,464
- Issue date Apr 25, 2006
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Work piece carrier with adjustable pressure zones and barriers and...
- Patent number 7,025,664
- Issue date Apr 11, 2006
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Work piece carrier with adjustable pressure zones and barriers and...
- Patent number 7,014,541
- Issue date Mar 21, 2006
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Workpiece handling end-effector and a method for processing workpie...
- Patent number 6,979,034
- Issue date Dec 27, 2005
- SpeedFam-IPEC Corporation
- Randy McNurlin
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for electrochemical planarization of a workpiece
- Patent number 6,974,525
- Issue date Dec 13, 2005
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Multiprobe detection system for chemical-mechanical planarization tool
- Patent number 6,960,115
- Issue date Nov 1, 2005
- SpeedFam-IPEC Corporation
- Matthew Weldon
- B24 - GRINDING POLISHING
Information Patent Grant
Multizone carrier with process monitoring system for chemical-mecha...
- Patent number 6,923,711
- Issue date Aug 2, 2005
- SpeedFam-IPEC Corporation
- Thomas Laursen
- B24 - GRINDING POLISHING
Information Patent Grant
Low amplitude, high speed polisher and method
- Patent number 6,913,528
- Issue date Jul 5, 2005
- SpeedFam-IPEC Corporation
- Stephen C. Schulz
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad window for a chemical-mechanical polishing tool
- Patent number 6,878,039
- Issue date Apr 12, 2005
- SpeedFam-IPEC Corporation
- Charles Chiun-Chieh Yang
- B24 - GRINDING POLISHING
Information Patent Grant
Robotic method of transferring workpieces to and from workstations
- Patent number 6,852,007
- Issue date Feb 8, 2005
- SpeedFam-IPEC Corporation
- Jose R. Gonzalez-Martin
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and process for polishing a workpiece
- Patent number 6,849,547
- Issue date Feb 1, 2005
- SpeedFam-IPEC Corporation
- Saket Chadda
- B24 - GRINDING POLISHING
Information Patent Grant
System and method for cleaning workpieces
- Patent number 6,818,604
- Issue date Nov 16, 2004
- SpeedFam-IPEC Corporation
- Ismail Emesh
- G11 - INFORMATION STORAGE
Information Patent Grant
Multiprobe detection system for chemical-mechanical planarization tool
- Patent number 6,805,613
- Issue date Oct 19, 2004
- SpeedFam-IPEC Corporation
- Matthew Weldon
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for the electrochemical deposition and planari...
- Patent number 6,802,955
- Issue date Oct 12, 2004
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wear ring assembly
- Patent number 6,796,887
- Issue date Sep 28, 2004
- SpeedFam-IPEC Corporation
- David Marquardt
- B24 - GRINDING POLISHING
Information Patent Grant
Orbiting indexable belt polishing station for chemical mechanical p...
- Patent number 6,793,565
- Issue date Sep 21, 2004
- SpeedFam-IPEC Corporation
- Saket Chadda
- B24 - GRINDING POLISHING
Information Patent Grant
Method for processing a work piece in a multi-zonal processing appa...
- Patent number 6,790,123
- Issue date Sep 14, 2004
- SpeedFam-IPEC Corporation
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Grant
Laminated wear ring
- Patent number 6,758,939
- Issue date Jul 6, 2004
- SpeedFam-IPEC Corporation
- David Marquardt
- B24 - GRINDING POLISHING
Information Patent Grant
Workpiece handling end-effector and a method for processing workpie...
- Patent number 6,752,442
- Issue date Jun 22, 2004
- SpeedFam-IPEC Corporation
- Randy McNurlin
- B24 - GRINDING POLISHING
Information Patent Grant
Workpiece carrier with adjustable pressure zones and barriers
- Patent number 6,746,318
- Issue date Jun 8, 2004
- SpeedFam-IPEC Corporation
- Daniel S. Mallery
- B24 - GRINDING POLISHING
Information Patent Grant
Workpiece carrier retaining element
- Patent number 6,736,713
- Issue date May 18, 2004
- SpeedFam-IPEC Corporation
- Wayne F. Lougher
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for electrochemical planarization of a workpiece
- Patent number 6,736,952
- Issue date May 18, 2004
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Homogeneous fixed abrasive polishing pad
- Patent number 6,702,866
- Issue date Mar 9, 2004
- SpeedFam-IPEC Corporation
- Sumant Kamboj
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad window for a chemical mechanical polishing tool
- Patent number 6,685,537
- Issue date Feb 3, 2004
- SpeedFam-IPEC Corporation
- Clinton O. Fruitman
- B24 - GRINDING POLISHING
Information Patent Grant
Multiple vertical wafer cleaner
- Patent number 6,678,911
- Issue date Jan 20, 2004
- SpeedFam-IPEC Corporation
- Frank Krupa
- B08 - CLEANING

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Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR CONTROLLED SLURRY DISTRIBUTION
- Publication number 20060151110
- Publication date Jul 13, 2006
- SpeedFam-IPEC Corporation
- Thomas Laursen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE
- Publication number 20060081460
- Publication date Apr 20, 2006
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
INTEGRATED PRESSURE CONTROL SYSTEM FOR WORKPIECE CARRIER
- Publication number 20050070205
- Publication date Mar 31, 2005
- SpeedFam-IPEC Corporation
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Application
ORBITING INDEXABLE BELT POLISHING STATION FOR CHEMICAL MECHANICAL P...
- Publication number 20050009452
- Publication date Jan 13, 2005
- SpeedFam-IPEC Corporation
- Saket Chadda
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE
- Publication number 20040195110
- Publication date Oct 7, 2004
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Front-reference carrier on orbital solid platen
- Publication number 20030077986
- Publication date Apr 24, 2003
- SpeedFam-IPEC Corporation
- Stephen C. Schultz
- B24 - GRINDING POLISHING
Information Patent Application
Workpiece carrier with adjustable pressure zones and barriers
- Publication number 20030073381
- Publication date Apr 17, 2003
- SpeedFam-IPEC Corporation
- Daniel S. Mallery
- B24 - GRINDING POLISHING
Information Patent Application
Laminated wear ring
- Publication number 20030041967
- Publication date Mar 6, 2003
- SpeedFam-IPEC Corporation
- David Marquardt
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for optical endpoint calibration in CMP
- Publication number 20030020909
- Publication date Jan 30, 2003
- SpeedFam-IPEC Corporation
- John A. Adams
- G01 - MEASURING TESTING
Information Patent Application
Differential Cleaning for semiconductor wafers with copper circuitry
- Publication number 20020170574
- Publication date Nov 21, 2002
- SpeedFam-IPEC Corporation
- Justin M. Quarantello
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for semiconductor wafer cleaning
- Publication number 20020166569
- Publication date Nov 14, 2002
- SpeedFam-IPEC Corporation
- Ellis Harvey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multiple vertical wafer cleaner
- Publication number 20020162181
- Publication date Nov 7, 2002
- SpeedFam-IPEC Corporation
- Frank Krupa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for a spectrally stable light source using whi...
- Publication number 20020145728
- Publication date Oct 10, 2002
- SpeedFam-IPEC Corporation
- John A. Adams
- G01 - MEASURING TESTING
Information Patent Application
Low amplitude, high speed polisher and method
- Publication number 20020132561
- Publication date Sep 19, 2002
- SpeedFam-IPEC Corporation
- Stephen C. Schulz
- B24 - GRINDING POLISHING
Information Patent Application
Multi-zone pressure control carrier
- Publication number 20020094759
- Publication date Jul 18, 2002
- SpeedFam-IPEC Corporation
- Nikolay Korovin
- B24 - GRINDING POLISHING
Information Patent Application
ROTARY UNION FOR SEMICONDUCTOR WAFER APPLICATIONS
- Publication number 20020086617
- Publication date Jul 4, 2002
- SpeedFam-IPEC Corporation
- John Garcia
- B24 - GRINDING POLISHING
Information Patent Application
Reinforced CMP carrier bladders
- Publication number 20020077049
- Publication date Jun 20, 2002
- SpeedFam-IPEC Corporation
- Clinton O. Fruitman
- B24 - GRINDING POLISHING
Information Patent Application
Work piece wand and method for processing work pieces using a work...
- Publication number 20020067985
- Publication date Jun 6, 2002
- SpeedFam-IPEC Corporation
- Daniel S. Mallery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece carrier with adjustable pressure zones and barriers
- Publication number 20020061716
- Publication date May 23, 2002
- SpeedFam-IPEC Corporation
- Nikolay N. Korovin
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for removing a material layer from a substrate
- Publication number 20020023719
- Publication date Feb 28, 2002
- SpeedFam-IPEC Corporation
- Yakov Epshteyn
- B24 - GRINDING POLISHING

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Trademarklast 30 trademarks

Information Trademark
76389818 - SFI
- Serial number 76389818
- Filing date Mar 29, 2002
- SpeedFam-IPEC, Inc.
- 1 - Chemicals used in industry, science and photography, as well as in agriculture, horticulture and forestry
Information Trademark
76389819 - MOMENTUM
- Serial number 76389819
- Registration number 2776614
- Filing date Mar 29, 2002
- SpeedFam-IPEC, Inc.
- 7 - Machines and machine tools
Information Trademark
76383022 - NORTHSTAR CLEANROOM CONCEPTS
- Serial number 76383022
- Filing date Mar 18, 2002
- SpeedFam-IPEC, Inc.
- 11 - Apparatus for lighting, heating, steam generating, cooking, refrigerating, drying, ventilating, water supply and sanitary purposes
Information Trademark
76383020 - NORTHSTAR
- Serial number 76383020
- Filing date Mar 18, 2002
- SpeedFam-IPEC, Inc.
- 11 - Apparatus for lighting, heating, steam generating, cooking, refrigerating, drying, ventilating, water supply and sanitary purposes
Information Trademark
76374948 - FLEXLINE
- Serial number 76374948
- Registration number 2635257
- Filing date Feb 26, 2002
- SpeedFam-IPEC, Inc.
- 7 - Machines and machine tools
Information Trademark
75712067 - SPEEDFAM-IPEC
- Serial number 75712067
- Filing date May 21, 1999
- SpeedFam-IPEC, Inc.
- 1 - Chemicals used in industry, science and photography, as well as in agriculture, horticulture and forestry

SpeedFam-IPEC Corporation

Organization

Patents Grantslast 30 patents

Method and apparatus for controlling slurry distribution

Orbiting indexable belt polishing station for chemical mechanical p...

Work piece carrier with adjustable pressure zones and barriers and...

Methods and apparatus for the chemical mechanical planarization of...

Clean room facility and construction method

Apparatus for electrochemically depositing a material onto a workpi...

Work piece carrier with adjustable pressure zones and barriers and...

Work piece carrier with adjustable pressure zones and barriers and...

Workpiece handling end-effector and a method for processing workpie...

Method and apparatus for electrochemical planarization of a workpiece

Multiprobe detection system for chemical-mechanical planarization tool

Multizone carrier with process monitoring system for chemical-mecha...

Low amplitude, high speed polisher and method

Polishing pad window for a chemical-mechanical polishing tool

Robotic method of transferring workpieces to and from workstations

Apparatus and process for polishing a workpiece

System and method for cleaning workpieces

Multiprobe detection system for chemical-mechanical planarization tool

Method and apparatus for the electrochemical deposition and planari...

Wear ring assembly

Orbiting indexable belt polishing station for chemical mechanical p...

Method for processing a work piece in a multi-zonal processing appa...

Laminated wear ring

Workpiece handling end-effector and a method for processing workpie...

Workpiece carrier with adjustable pressure zones and barriers

Workpiece carrier retaining element

Method and apparatus for electrochemical planarization of a workpiece

Homogeneous fixed abrasive polishing pad

Polishing pad window for a chemical mechanical polishing tool

Multiple vertical wafer cleaner

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR CONTROLLED SLURRY DISTRIBUTION

METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE

INTEGRATED PRESSURE CONTROL SYSTEM FOR WORKPIECE CARRIER

ORBITING INDEXABLE BELT POLISHING STATION FOR CHEMICAL MECHANICAL P...

METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE

Front-reference carrier on orbital solid platen

Workpiece carrier with adjustable pressure zones and barriers

Laminated wear ring

Method and apparatus for optical endpoint calibration in CMP

Differential Cleaning for semiconductor wafers with copper circuitry

Method and apparatus for semiconductor wafer cleaning

Multiple vertical wafer cleaner

Method and apparatus for a spectrally stable light source using whi...

Low amplitude, high speed polisher and method

Multi-zone pressure control carrier

ROTARY UNION FOR SEMICONDUCTOR WAFER APPLICATIONS

Reinforced CMP carrier bladders

Work piece wand and method for processing work pieces using a work...

Workpiece carrier with adjustable pressure zones and barriers

Method and apparatus for removing a material layer from a substrate

Trademarklast 30 trademarks

76389818 - SFI

76389819 - MOMENTUM

76383022 - NORTHSTAR CLEANROOM CONCEPTS

76383020 - NORTHSTAR

76374948 - FLEXLINE

75712067 - SPEEDFAM-IPEC