Speedfam-pec Co Ltd

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Kanagawa-pref, JP

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Patents Grantslast 30 patents

Information Patent Grant
Polishing method for silicon wafers which uses a polishing compound...
- Patent number 6,290,580
- Issue date Sep 18, 2001
- Speedfam-pec Co Ltd
- Hiroaki Tanaka
- B24 - GRINDING POLISHING