S.sup.3 Service Support Specialties, Inc.

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Montville, NJ, US

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Patents Grantslast 30 patents

Information Patent Grant
Silicon substrate cleaning apparatus
- Patent number 5,953,828
- Issue date Sep 21, 1999
- S.sup.3 Service Support Specialties, Inc.
- Gary Hillman
- B08 - CLEANING
Information Patent Grant
Silicon substrate cleaning method and apparatus
- Patent number 5,735,962
- Issue date Apr 7, 1998
- S.sup.3 Service Support Specialties, Inc.
- Gary Hillman
- B08 - CLEANING

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