Steag-Ast GmbH

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Kirchheim, DE

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Patents Grantslast 30 patents

Information Patent Grant
Optical radiation measurement apparatus
- Patent number 6,462,315
- Issue date Oct 8, 2002
- Steag Ast
- Markus Hauf
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring electromagnetic radiation
- Patent number 6,369,363
- Issue date Apr 9, 2002
- Steag Ast
- Markus Hauf
- G01 - MEASURING TESTING
Information Patent Grant
Rapid thermal processing (RTP) system with rotating substrate
- Patent number 5,965,047
- Issue date Oct 12, 1999
- Steag AST
- Werner Blersch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for rapid thermal processing
- Patent number 5,872,889
- Issue date Feb 16, 1999
- Steag-Ast
- Guenter Kaltenbrunner
- G01 - MEASURING TESTING
Information Patent Grant
Inflatable elastomeric element for rapid thermal processing (RTP) s...
- Patent number 5,870,526
- Issue date Feb 9, 1999
- Steag-Ast
- Helmut Aschner
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method and apparatus for improved temperature control in rapid ther...
- Patent number 5,841,110
- Issue date Nov 24, 1998
- Steag-Ast GmbH
- Zsolt Nenyei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

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