Steag C.V.D. Sytems, Ltd.

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Migdal Ha'Emek, IL

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Method and apparatus for increasing temperature uniformity of heate...
- Patent number 6,084,213
- Issue date Jul 4, 2000
- Steag C.V.D. Sytems, Ltd.
- Gil Kohav
- H01 - BASIC ELECTRIC ELEMENTS

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