Steag RTP Systems GmbH

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for the thermal treatment of substrates
- Patent number 7,041,610
- Issue date May 9, 2006
- Steag RTP Systems GmbH
- Andreas Tillmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for aligning disk-shaped substrates
- Patent number 7,004,716
- Issue date Feb 28, 2006
- Steag RTP Systems GmbH
- Ottmar Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for thermal treatment of substrates
- Patent number 6,953,338
- Issue date Oct 11, 2005
- Steag RTP Systems GmbH
- Uwe Kreiser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for measuring the temperature of substrates
- Patent number 6,847,012
- Issue date Jan 25, 2005
- Steag RTP Systems GmbH
- Markus Hauf
- G01 - MEASURING TESTING
Information Patent Grant
Method for the removing of adsorbed molecules from a chamber
- Patent number 6,830,631
- Issue date Dec 14, 2004
- Steag RTP Systems GmbH
- Zsolt Nenyei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus device for the heat treatment of substrates
- Patent number 6,752,625
- Issue date Jun 22, 2004
- Steag RTP Systems GmbH
- Helmut Aschner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
UV-supported thermal treatment of compound semiconductors in RTP sy...
- Patent number 6,737,367
- Issue date May 18, 2004
- Steag RTP Systems GmbH
- Martin Drechsler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for thermally treating substrates
- Patent number 6,614,005
- Issue date Sep 2, 2003
- Steag RTP Systems GmbH
- Heinrich Walk
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and device for calibrating measurements of temperatures inde...
- Patent number 6,561,694
- Issue date May 13, 2003
- Steag RTP Systems GmbH
- Wilfried Lerch
- G01 - MEASURING TESTING
Information Patent Grant
Pre-metal dielectric rapid thermal processing for sub-micron techno...
- Patent number 6,514,876
- Issue date Feb 4, 2003
- Steag RTP Systems, Inc.
- Randhir P. S. Thakur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for controlling the temperature of a reflective substrate du...
- Patent number 6,359,263
- Issue date Mar 19, 2002
- Steag RTP Systems, Inc.
- Sing Pin Tay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for the thermal treatment of substrates
- Patent number 6,316,747
- Issue date Nov 13, 2001
- Steag RTP Systems GmbH
- Werner Blersch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and process for calibrating pyrometers in thermal processing...
- Patent number 6,293,696
- Issue date Sep 25, 2001
- Steag RTP Systems, Inc.
- Julio L. Guardado
- G01 - MEASURING TESTING
Information Patent Grant
Process for forming thin dielectric layers in semiconductor devices
- Patent number 6,281,141
- Issue date Aug 28, 2001
- Steag RTP Systems, Inc.
- John H. Das
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing refractory metals on semiconduc...
- Patent number 6,221,766
- Issue date Apr 24, 2001
- Steag RTP Systems, Inc.
- Yuval Wasserman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device containing a multi-lamp cone for heating semiconduct...
- Patent number 6,210,484
- Issue date Apr 3, 2001
- Steag RTP Systems, Inc.
- Kevin Hathaway
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for measuring the temperature of a semiconductor wafer durin...
- Patent number 6,204,484
- Issue date Mar 20, 2001
- Steag RTP Systems, Inc.
- Sing Pin Tay
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for determining the temperature in a thermal processing chamber
- Patent number 6,200,023
- Issue date Mar 13, 2001
- Steag RTP Systems, Inc.
- Sing Pin Tay
- G01 - MEASURING TESTING
Information Patent Grant
Method for depositing atomized materials onto a substrate utilizing...
- Patent number 6,174,651
- Issue date Jan 16, 2001
- Steag RTP Systems, Inc.
- Randhir P. S. Thakur
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and process for measuring the temperature of semiconducto...
- Patent number 6,160,242
- Issue date Dec 12, 2000
- Steag RTP Systems, Inc.
- Julio Guardado
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for rapid thermal processing (RTP) of silicon substrates
- Patent number 6,100,149
- Issue date Aug 8, 2000
- Steag-RTP Systems
- Zsolt Nenyei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of rapid thermal processing (RTP) of ion implanted silicon
- Patent number 6,077,751
- Issue date Jun 20, 2000
- Steag RTP Systems GmbH
- Steven D. Marcus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for preventing gas leaks in an atmospheric thermal processi...
- Patent number 6,075,922
- Issue date Jun 13, 2000
- Steag RTP Systems, Inc.
- Sing Pin Tay
- F26 - DRYING
Information Patent Grant
Apparatus and method for determining the temperature of objects in...
- Patent number 6,056,434
- Issue date May 2, 2000
- Steag RTP Systems, Inc.
- Robert J. Champetier
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for rapid thermal processing (RTP) of a plural...
- Patent number 6,051,512
- Issue date Apr 18, 2000
- Steag RTP Systems
- Helmut Sommer
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for determining the temperature of a semi-transparent rad...
- Patent number 6,027,244
- Issue date Feb 22, 2000
- Steag RTP Systems, Inc.
- Robert J. Champetier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rapid thermal processing (RTP) system with gas driven rotating subs...
- Patent number 6,005,226
- Issue date Dec 21, 1999
- Steag-RTP Systems
- Helmut Aschner
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for determining the temperature of a semi-transparent radiat...
- Patent number 5,997,175
- Issue date Dec 7, 1999
- Steag RTP Systems, Inc.
- Robert J. Champetier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for depositing a material on a substrate using light energy
- Patent number 5,980,637
- Issue date Nov 9, 1999
- Steag RTP Systems, Inc.
- Rajendra Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electric grill
- Patent number D416167
- Issue date Nov 9, 1999
- Steag RTP Systems, Inc.
- Mario John Barker
- D07 - Equipment for preparing or serving food or drink not elsewhere specified

Patents Applicationslast 30 patents

Trademarklast 30 trademarks

Information Trademark
76193922 - SHIELD ENHANCED RTP
- Serial number 76193922
- Registration number 2637668
- Filing date Jan 11, 2001
- STEAG RTP Systems GmbH
- 7 - Machines and machine tools
Information Trademark
75886330 - STEAG RTP SYSTEMS
- Serial number 75886330
- Filing date Jan 3, 2000
- STEAG RTP Systems GmbH
- 7 - Machines and machine tools
Information Trademark
75886329 - STEAG RTP SYSTEMS
- Serial number 75886329
- Filing date Jan 3, 2000
- STEAG RTP Systems GmbH
- 7 - Machines and machine tools

Steag RTP Systems GmbH

Organization

Patents Grantslast 30 patents

Method and apparatus for the thermal treatment of substrates

Device and method for aligning disk-shaped substrates

Device for thermal treatment of substrates

Apparatus and method for measuring the temperature of substrates

Method for the removing of adsorbed molecules from a chamber

Method and apparatus device for the heat treatment of substrates

UV-supported thermal treatment of compound semiconductors in RTP sy...

Device and method for thermally treating substrates

Method and device for calibrating measurements of temperatures inde...

Pre-metal dielectric rapid thermal processing for sub-micron techno...

System for controlling the temperature of a reflective substrate du...

Apparatus for the thermal treatment of substrates

System and process for calibrating pyrometers in thermal processing...

Process for forming thin dielectric layers in semiconductor devices

Method and apparatus for processing refractory metals on semiconduc...

Heating device containing a multi-lamp cone for heating semiconduct...

System for measuring the temperature of a semiconductor wafer durin...

Method for determining the temperature in a thermal processing chamber

Method for depositing atomized materials onto a substrate utilizing...

Apparatus and process for measuring the temperature of semiconducto...

Method for rapid thermal processing (RTP) of silicon substrates

Method of rapid thermal processing (RTP) of ion implanted silicon

Process for preventing gas leaks in an atmospheric thermal processi...

Apparatus and method for determining the temperature of objects in...

Apparatus and method for rapid thermal processing (RTP) of a plural...

Apparatus for determining the temperature of a semi-transparent rad...

Rapid thermal processing (RTP) system with gas driven rotating subs...

Method for determining the temperature of a semi-transparent radiat...

System for depositing a material on a substrate using light energy

Electric grill

Patents Applicationslast 30 patents

Trademarklast 30 trademarks

76193922 - SHIELD ENHANCED RTP

75886330 - STEAG RTP SYSTEMS

75886329 - STEAG RTP SYSTEMS