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Streag CVD Systems LTD
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Migdal Ha'emek, IL
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Patent Grant
Wafer processing with water vapor pumping
Patent number
6,362,096
Issue date
Mar 26, 2002
Streag CVD Systems LTD
Arie Harnik
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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