Surface Technology Systems Limited

Organization

Newport, GB

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 7,491,649
- Issue date Feb 17, 2009
- Surface Technology Systems plc
- Jyoti Kiron Bhardwaj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for stabilizing a plasma
- Patent number 7,306,745
- Issue date Dec 11, 2007
- Surface Technology Systems PLC
- Jyoti Kiron Bhardwaj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for anisotropic etching
- Patent number 7,141,504
- Issue date Nov 28, 2006
- Surface Technology Systems plc
- Jyoti Kiron Bhardwaj
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plasma etching
- Patent number 6,933,242
- Issue date Aug 23, 2005
- Surface Technology Systems plc
- Anand Srinivasan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chlorotrifuorine gas generator system
- Patent number 6,929,784
- Issue date Aug 16, 2005
- Surface Technology Systems plc
- Jyoti Kiron Bhardwaj
- G01 - MEASURING TESTING
Information Patent Grant
Gas generation system
- Patent number 6,926,871
- Issue date Aug 9, 2005
- Surface Technology Systems plc
- Jyoti Kiron Bhardwaj
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for dechucking a substrate from an electrostat...
- Patent number 6,628,500
- Issue date Sep 30, 2003
- Surface Technology Systems plc
- Tudor Thomas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 6,602,384
- Issue date Aug 5, 2003
- Surface Technology Systems, plc
- Jyoti Kiron Bhardwaj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas delivery system
- Patent number 6,602,433
- Issue date Aug 5, 2003
- Surface Technology Systems plc
- Jyoti Kiron Bhardwaj
- G01 - MEASURING TESTING
Information Patent Grant
Plasma processing apparatus
- Patent number 6,534,922
- Issue date Mar 18, 2003
- Surface Technology Systems, plc
- Jyoti Kiron Bhardwaj
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing apparatus
- Patent number 6,458,239
- Issue date Oct 1, 2002
- Surface Technology Systems plc
- Jyoti Kiron Bhardwaj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for etching a workpiece
- Patent number 6,409,876
- Issue date Jun 25, 2002
- Surface Technology Systems, plc
- Andrew Duncan McQuarrie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for manufacturing a micromechanical device
- Patent number 6,355,181
- Issue date Mar 12, 2002
- Surface Technology Systems plc
- Andrew Duncan McQuarrie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of surface treatment of semiconductor substrates
- Patent number 6,261,962
- Issue date Jul 17, 2001
- Surface Technology Systems Limited
- Jyoti Kiron Bhardwaj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus with coils in dielectric windows
- Patent number 6,259,209
- Issue date Jul 10, 2001
- Surface Technology Systems Limited
- Jyoti Kiron Bhardwaj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 6,239,404
- Issue date May 29, 2001
- Surface Technology Systems Limited
- Leslie Michael Lea
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for etching a substrate
- Patent number 6,187,685
- Issue date Feb 13, 2001
- Surface Technology Systems Limited
- Janet Hopkins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of surface treatment of semiconductor substrates
- Patent number 6,051,503
- Issue date Apr 18, 2000
- Surface Technology Systems Limited
- Jyoti Kiron Bhardwaj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loading mechanisms
- Patent number 5,330,301
- Issue date Jul 19, 1994
- Surface Technology Systems Limited
- Carl D. Brancher
- H01 - BASIC ELECTRIC ELEMENTS

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Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20090139658
- Publication date Jun 4, 2009
- SURFACE TECHNOLOGY SYSTEMS PLC
- Leslie Michael LEA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

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Trademarklast 30 trademarks

Information Trademark
75337615 - ASE
- Serial number 75337615
- Registration number 2392509
- Filing date Aug 7, 1997
- Surface Technology Systems Limited
- 7 - Machines and machine tools

Surface Technology Systems Limited

Organization

Patents Grantslast 30 patents

Plasma processing apparatus

Method and apparatus for stabilizing a plasma

Method and apparatus for anisotropic etching

Plasma etching

Chlorotrifuorine gas generator system

Gas generation system

Method and apparatus for dechucking a substrate from an electrostat...

Plasma processing apparatus

Gas delivery system

Plasma processing apparatus

Plasma processing apparatus

Apparatus for etching a workpiece

Method and apparatus for manufacturing a micromechanical device

Method of surface treatment of semiconductor substrates

Plasma processing apparatus with coils in dielectric windows

Plasma processing apparatus

Method and apparatus for etching a substrate

Method of surface treatment of semiconductor substrates

Loading mechanisms

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

Trademarklast 30 trademarks

75337615 - ASE