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Patents Grants
last 30 patents
Information
Patent Grant
Stamp replication device and method for producing a holding means f...
Patent number
12,172,344
Issue date
Dec 24, 2024
SUSS MicroTec Lithography GmbH
Uwe Vogler
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Bonding device as well as method for bonding substrates
Patent number
12,009,230
Issue date
Jun 11, 2024
SUSS MicroTec Lithography GmbH
George Gregory
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adapter, connection device and supply system
Patent number
11,776,827
Issue date
Oct 3, 2023
SUSS MICROTEC LITHOGRAPHY GMBH
Michael Braun
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Apparatus, system, and method for handling aligned wafer pairs
Patent number
11,651,983
Issue date
May 16, 2023
Suss MicroTec Lithography GmbH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Holding apparatus and method for holding a substrate
Patent number
11,504,825
Issue date
Nov 22, 2022
Suss MicroTec Lithography GmbH
Thomas Grund
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Apparatus for measuring a fluid flow through a pipe of a semiconduc...
Patent number
11,499,855
Issue date
Nov 15, 2022
SUSS MICROTEC LITHOGRAPHY GMBH
Kader Mekias
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for coating a substrate with a lacquer and device for planar...
Patent number
11,247,229
Issue date
Feb 15, 2022
Suss MicroTec Lithography GmbH
Katrin Fischer
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
System and related techniques for handling aligned substrate pairs
Patent number
11,183,401
Issue date
Nov 23, 2021
Suss MicroTec Lithography GmbH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Holding apparatus and method for holding a substrate
Patent number
11,148,258
Issue date
Oct 19, 2021
Suss MicroTec Lithography GmbH
Thomas Grund
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Positioning device
Patent number
11,075,102
Issue date
Jul 27, 2021
Suss MicroTec Lithography GmbH
Sven Hansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cassette
Patent number
11,049,746
Issue date
Jun 29, 2021
SUSS MICROTEC LITHOGRAPHY GMBH
Bernhard Bogner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Nozzle tip adapter, nozzle assembly as well as nozzle
Patent number
10,953,415
Issue date
Mar 23, 2021
SUSS MICROTEC LITHOGRAPHY GMBH
Thomas Grund
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Wafer support system, wafer support device, system comprising a waf...
Patent number
10,937,681
Issue date
Mar 2, 2021
SUSS MICROTEC LITHOGRAPHY GMBH
Yasuaki Amano
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Baking device for a wafer coated with a coating containing a solvent
Patent number
10,825,701
Issue date
Nov 3, 2020
Suss MicroTec Lithography GmbH
Gregory George
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus, system, and method for handling aligned wafer pairs
Patent number
10,825,705
Issue date
Nov 3, 2020
Suss MicroTec Lithography GmbH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for coating a substrate and coating device
Patent number
10,688,524
Issue date
Jun 23, 2020
Suss MicroTec Lithography GmbH
Katrin Fischer
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method for coating a substrate and also a coating system
Patent number
10,596,592
Issue date
Mar 24, 2020
Suss MicroTec Lithography GmbH
Darren Southworth
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Apparatus and method for semiconductor wafer leveling, force balanc...
Patent number
10,580,678
Issue date
Mar 3, 2020
Suss Microtec Lithography, GmbH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
End effector
Patent number
10,343,292
Issue date
Jul 9, 2019
SUSS MicroTec Lithography GmbH
Bernhard Bogner
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Semiconductor bonding apparatus and related techniques
Patent number
10,319,615
Issue date
Jun 11, 2019
Suss MicroTec Lithography GmbH
Gregory George
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Wafer treating device and sealing ring for a wafer treating device
Patent number
10,295,063
Issue date
May 21, 2019
Suss MicroTec Lithography GmbH
Dieter Albert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Suction apparatus for an end effector, end effector for holding sub...
Patent number
10,259,124
Issue date
Apr 16, 2019
SUSS MicroTec Lithography GmbH
Bernhard Bogner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Light source arrangement for a photolithography exposure system and...
Patent number
10,241,415
Issue date
Mar 26, 2019
Suss MicroTec Lithography GmbH
Paul Kaiser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for coating a substrate with a lacquer and device for planar...
Patent number
10,232,405
Issue date
Mar 19, 2019
Suss MicroTec Lithography GmbH
Katrin Fischer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device for treating a disc-shaped substrate and support adapter
Patent number
10,101,672
Issue date
Oct 16, 2018
Suss MicroTec Lithography GmbH
Sven Hansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for preventing the deformation of a substrate...
Patent number
10,103,049
Issue date
Oct 16, 2018
Suss MicroTec Lithography GmbH
Bernhard Bogner
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Spacer displacement device for a wafer illumination unit and wafer...
Patent number
9,958,795
Issue date
May 1, 2018
SUSS MicroTec Lithography GmbH
Matthias Conradi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for curing at least in part a photoresist applied...
Patent number
9,960,061
Issue date
May 1, 2018
SUSS MicroTec Lithography GmbH
Omar Fakhr
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Method for regulating a light source of a photolithography exposure...
Patent number
9,864,277
Issue date
Jan 9, 2018
SUSS MicroTec Lithography GmbH
Paul Kaiser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for aligning and centering wafers
Patent number
9,859,141
Issue date
Jan 2, 2018
SUSS MicroTec Lithography GmbH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
BONDING DEVICE AS WELL AS METHOD FOR BONDING SUBSTRATES
Publication number
20220230895
Publication date
Jul 21, 2022
SUSS MICROTEC LITHOGRAPHY GMBH
George GREGORY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADAPTER, CONNECTION DEVICE AND SUPPLY SYSTEM
Publication number
20220037168
Publication date
Feb 3, 2022
SUSS MICROTEC LITHOGRAPHY GMBH
Michael BRAUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WET PROCESS MODULE AND METHOD OF OPERATION
Publication number
20210402431
Publication date
Dec 30, 2021
SUSS MICROTEC LITHOGRAPHY GMBH
Michael BRAUN
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
HOLDING APPARATUS AND METHOD FOR HOLDING A SUBSTRATE
Publication number
20210394340
Publication date
Dec 23, 2021
SUSS MICROTEC LITHOGRAPHY GMBH
Thomas GRUND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and test system for assessing the quality of a multi-channel...
Publication number
20210063863
Publication date
Mar 4, 2021
SUSS MICROTEC LITHOGRAPHY GMBH
Isabel AGIREEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS, SYSTEM, AND METHOD FOR HANDLING ALIGNED WAFER PAIRS
Publication number
20210013079
Publication date
Jan 14, 2021
SUSS MICROTEC LITHOGRAPHY GMBH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAMP REPLICATION DEVICE AND METHOD FOR PRODUCING A HOLDING MEANS F...
Publication number
20200353650
Publication date
Nov 12, 2020
SUSS MICROTEC LITHOGRAPHY GMBH
Uwe VOGLER
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
Framework for a replication device, replication device as well as m...
Publication number
20200348588
Publication date
Nov 5, 2020
SUSS MICROTEC LITHOGRAPHY GMBH
Raoul KIRNER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REPLICATION DEVICE AND METHOD FOR REPRODUCING A STRUCTURE ON A SUBS...
Publication number
20200341372
Publication date
Oct 29, 2020
SUSS MICROTEC LITHOGRAPHY GMBH
Christian MAY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE CASSETTE
Publication number
20200194282
Publication date
Jun 18, 2020
SUSS MICROTEC LITHOGRAPHY GMBH
Bernhard BOGNER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR MEASURING A FLUID FLOW THROUGH A PIPE OF A SEMICONDUC...
Publication number
20200173825
Publication date
Jun 4, 2020
SUSS MICROTEC LITHOGRAPHY GMBH
Kader MEKIAS
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
FIXATION SYSTEM, SUPPORT PLATE AND METHOD FOR PRODUCTION THEREOF
Publication number
20200122302
Publication date
Apr 23, 2020
SUSS MICROTEC LITHOGRAPHY GMBH
Philippe STIEVENARD
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
EDGE BEAD REMOVAL SYSTEM AND METHOD OF TREATING A SUBSTRATE
Publication number
20200096867
Publication date
Mar 26, 2020
SUSS MICROTEC LITHOGRAPHY GMBH
Ludovic LATTARD
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Dispensing Nozzle for a Coater
Publication number
20190388912
Publication date
Dec 26, 2019
SUSS MICROTEC LITHOGRAPHY GMBH
Mekias KADER
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
HOLDING APPARATUS AND METHOD FOR HOLDING A SUBSTRATE
Publication number
20190366517
Publication date
Dec 5, 2019
SUSS MICROTEC LITHOGRAPHY GMBH
Thomas GRUND
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
Method for coating a substrate with a lacquer and device for planar...
Publication number
20190151889
Publication date
May 23, 2019
SUSS MICROTEC LITHOGRAPHY GMBH
Katrin FISCHER
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
WAFER SUPPORT SYSTEM, WAFER SUPPORT DEVICE, SYSTEM COMPRISING A WAF...
Publication number
20190096733
Publication date
Mar 28, 2019
SUSS MicroTec Lithography GmbH
Yasuaki AMANO
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
Nozzle tip adapter, nozzle assembly as well as nozzle
Publication number
20180361403
Publication date
Dec 20, 2018
SUSS MicroTec Lithography GmbH
Thomas GRUND
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
METHOD AND DEVICE FOR ALIGNING A FIRST SUBSTRATE WITH A SECOND SUBS...
Publication number
20180323069
Publication date
Nov 8, 2018
SUSS MICROTEC LITHOGRAPHY GMBH
Katrin Schindler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUCTION APPARATUS FOR AN END EFFECTOR, END EFFECTOR FOR HOLDING SUB...
Publication number
20180215049
Publication date
Aug 2, 2018
SUSS MicroTec Lithography GmbH
Bernhard BOGNER
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
END EFFECTOR
Publication number
20180215048
Publication date
Aug 2, 2018
SUSS MicroTec Lithography GmbH
Bernhard BOGNER
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
POSITIONING DEVICE
Publication number
20180138070
Publication date
May 17, 2018
SUSS MICROTEC LITHOGRAPHY GMBH
Sven Hansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Bonding Apparatus and Related Techniques
Publication number
20180108547
Publication date
Apr 19, 2018
SUSS MICROTEC LITHOGRAPHY GMBH
Gregory George
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
Apparatus and Method for Semiconductor Wafer Leveling, Force Balanc...
Publication number
20180102270
Publication date
Apr 12, 2018
SUSS MICROTEC LITHOGRAPHY, GMBH
HALE JOHNSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Light source arrangement for a photolithography exposure system and...
Publication number
20180017877
Publication date
Jan 18, 2018
SUSS MICROTEC LITHOGRAPHY GMBH
Paul Kaiser
G02 - OPTICS
Information
Patent Application
SYSTEM AND RELATED TECHNIQUES FOR HANDLING ALIGNED SUBSTRATE PAIRS
Publication number
20170372925
Publication date
Dec 28, 2017
SUSS MICROTEC LITHOGRAPHY GMBH
Hale Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for coating a substrate and also a coating system
Publication number
20170368567
Publication date
Dec 28, 2017
SUSS MICROTEC LITHOGRAPHY GMBH
Darren Southworth
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
Semiconductor Bonding Apparatus and Related Techniques
Publication number
20170243769
Publication date
Aug 24, 2017
SUSS MICROTEC LITHOGRAPHY GMBH
Gregory George
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Spacer Displacement Device for a Wafer Illumination Unit and Wafer...
Publication number
20170017169
Publication date
Jan 19, 2017
SUSS MICROTEC LITHOGRAPHY GMBH
Matthias Conradi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device for Treating a Disc-Shaped Substrate and Support Adapter
Publication number
20160370715
Publication date
Dec 22, 2016
SUSS MICROTEC LITHOGRAPHY GMBH
Sven Hansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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