TREA

Takada; Junichi

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Organization

  • Funabashi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 5,698,036
    • Issue date Dec 16, 1997
    • Tokyo Electron Limited
    • Nobuo Ishii
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

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