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TEL Engineering Limited
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Nirasaki, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Conductor pattern check apparatus for locating and repairing open c...
Patent number
5,639,390
Issue date
Jun 17, 1997
Tokyo Electron Limited
Shinji Iino
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Patent Grant
Apparatus for detecting and aligning a substrate
Patent number
5,636,960
Issue date
Jun 10, 1997
Tokyo Electron Limited
Tutomu Hiroki
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
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