TEL EPION INC

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BILLERICA, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Hybrid corrective processing system and method
- Patent number 10,971,411
- Issue date Apr 6, 2021
- TEL Epion Inc.
- Joshua LaRose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compensated location specific processing apparatus and method
- Patent number 10,861,674
- Issue date Dec 8, 2020
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compensated location specific processing apparatus and method
- Patent number 10,497,540
- Issue date Dec 3, 2019
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for high throughput using beam scan size and beam position i...
- Patent number 10,256,095
- Issue date Apr 9, 2019
- TEL Epion Inc.
- Soo Doo Chae
- G05 - CONTROLLING REGULATING
Information Patent Grant
Hybrid corrective processing system and method
- Patent number 10,096,527
- Issue date Oct 9, 2018
- TEL Epion Inc.
- Joshua LaRose
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of surface profile correction using gas cluster ion beam
- Patent number 9,875,947
- Issue date Jan 23, 2018
- TEL Epion Inc.
- Noel Russell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process gas enhancement for beam treatment of a substrate
- Patent number 9,735,019
- Issue date Aug 15, 2017
- TEL Epion Inc.
- Michael Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for beam deflection in a gas cluster ion beam...
- Patent number 9,540,725
- Issue date Jan 10, 2017
- TEL Epion Inc.
- Kenneth Regan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sidewall spacer patterning method using gas cluster ion beam
- Patent number 9,500,946
- Issue date Nov 22, 2016
- TEL Epion Inc.
- Soo Doo Chae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-step location specific process for substrate edge profile cor...
- Patent number 9,502,209
- Issue date Nov 22, 2016
- TEL Epion Inc.
- Hongyu H. Yue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for increasing adhesion of copper to polymeric surfaces
- Patent number 9,355,864
- Issue date May 31, 2016
- Tel Nexx, Inc.
- Georgiy Seryogin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
GCIB nozzle assembly
- Patent number 9,343,259
- Issue date May 17, 2016
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cluster ion beam etching process for etching Si-containing, Ge-...
- Patent number 9,324,567
- Issue date Apr 26, 2016
- TEL Epion Inc.
- Martin D. Tabat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-aligned nozzle/skimmer
- Patent number 9,305,746
- Issue date Apr 5, 2016
- TEL Epion Inc.
- Robert K. Becker
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Molecular beam enhanced GCIB treatment
- Patent number 9,236,221
- Issue date Jan 12, 2016
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
GCIB etching method for adjusting fin height of finFET devices
- Patent number 9,209,033
- Issue date Dec 8, 2015
- TEL Epion Inc.
- Luis Fernandez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for implementing predicted systematic error c...
- Patent number 9,123,505
- Issue date Sep 1, 2015
- TEL Epion Inc.
- Vincent Lagana-Gizzo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-step location specific process for substrate edge profile cor...
- Patent number 9,105,443
- Issue date Aug 11, 2015
- TEL Epion Inc.
- Hongyu H. Yue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for growing a thin film using a gas cluster ion beam
- Patent number 9,103,031
- Issue date Aug 11, 2015
- TEL Epion Inc.
- John J. Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low contamination scanner for GCIB system
- Patent number 9,029,808
- Issue date May 12, 2015
- TEL Epion Inc.
- Matthew C. Gwinn
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method for modifying an etch rate of a material layer using energet...
- Patent number 8,992,785
- Issue date Mar 31, 2015
- TEL Epion Inc.
- John J. Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multiple nozzle gas cluster ion beam system
- Patent number 8,981,322
- Issue date Mar 17, 2015
- TEL Epion Inc.
- Martin D. Tabat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for enhancing a substrate using gas cluster ion beam processing
- Patent number 8,877,299
- Issue date Nov 4, 2014
- TEL Epion Inc.
- John J. Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanner for GCIB system
- Patent number 8,791,430
- Issue date Jul 29, 2014
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cluster ion beam process for opening conformal layer in a high...
- Patent number 8,728,947
- Issue date May 20, 2014
- TEL Epion Inc.
- Christopher K. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cluster ion beam process for opening conformal layer in a high...
- Patent number 8,722,542
- Issue date May 13, 2014
- TEL Epion Inc.
- Christopher K. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to alter silicide properties using GCIB treatment
- Patent number 8,709,944
- Issue date Apr 29, 2014
- TEL Epion Inc.
- Noel Russell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to alter silicide properties using GCIB treatment
- Patent number 8,703,607
- Issue date Apr 22, 2014
- TEL Epion Inc.
- Noel Russell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas cluster ion beam etch profile control using beam divergence
- Patent number 8,691,700
- Issue date Apr 8, 2014
- TEL Epion Inc.
- John J. Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface profile adjustment using gas cluster ion beam processing
- Patent number 8,691,103
- Issue date Apr 8, 2014
- TEL Epion Inc.
- John J. Hautala
- B44 - DECORATIVE ARTS

Patents Applicationslast 30 patents

Information Patent Application
Compensated Location Specific Processing Apparatus And Method
- Publication number 20200066485
- Publication date Feb 27, 2020
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID CORRECTIVE PROCESSING SYSTEM AND METHOD
- Publication number 20190043766
- Publication date Feb 7, 2019
- TEL Epion Inc.
- Joshua LaRose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPENSATED LOCATION SPECIFIC PROCESSING APPARATUS AND METHOD
- Publication number 20180197715
- Publication date Jul 12, 2018
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR HIGH THROUGHPUT USING BEAM SCAN SIZE AND BEAM POSITION I...
- Publication number 20170077001
- Publication date Mar 16, 2017
- TEL Epion Inc.
- Soo Doo Chae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID CORRECTIVE PROCESSING SYSTEM AND METHOD
- Publication number 20170053843
- Publication date Feb 23, 2017
- TEL Epion Inc.
- Joshua LaRose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SURFACE PROFILE CORRECTION USING GAS CLUSTER ION BEAM
- Publication number 20160322266
- Publication date Nov 3, 2016
- TEL Epion Inc.
- Noel Russell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIDEWALL SPACER PATTERNING METHOD USING GAS CLUSTER ION BEAM
- Publication number 20160222521
- Publication date Aug 4, 2016
- TEL Epion Inc.
- Soo Doo Chae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS GAS ENHANCEMENT FOR BEAM TREATMENT OF A SUBSTRATE
- Publication number 20160071734
- Publication date Mar 10, 2016
- TEL Epion Inc.
- Michael Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GCIB NOZZLE ASSEMBLY
- Publication number 20160042909
- Publication date Feb 11, 2016
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STEP LOCATION SPECIFIC PROCESS FOR SUBSTRATE EDGE PROFILE COR...
- Publication number 20150348746
- Publication date Dec 3, 2015
- TEL Epion Inc.
- Hongyu H. Yue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR BEAM DEFLECTION IN A GAS CLUSTER ION BEAM...
- Publication number 20150332924
- Publication date Nov 19, 2015
- TEL Epion Inc.
- Kenneth Regan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS
- Publication number 20150270135
- Publication date Sep 24, 2015
- TEL Epion Inc.
- Martin D. Tabat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR IMPLEMENTING PREDICTED SYSTEMATIC ERROR C...
- Publication number 20150243476
- Publication date Aug 27, 2015
- TEL Epion Inc.
- Vincent Lagana-Gizzo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOLECULAR BEAM ENHANCED GCIB TREATMENT
- Publication number 20150144786
- Publication date May 28, 2015
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STEP LOCATION SPECIFIC PROCESS FOR SUBSTRATE EDGE PROFILE COR...
- Publication number 20150137006
- Publication date May 21, 2015
- TEL Epion Inc.
- Hongyu H. Yue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GCIB ETCHING METHOD FOR ADJUSTING FIN HEIGHT OF FINFET DEVICES
- Publication number 20150056815
- Publication date Feb 26, 2015
- TEL Epion Inc.
- Luis FERNANDEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR INCREASING ADHESION OF COPPER TO POLYMERIC SURFACES
- Publication number 20150044871
- Publication date Feb 12, 2015
- TEL NEXX, Inc.
- Georgiy Seryogin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRE-ALIGNED NOZZLE/SKIMMER
- Publication number 20140123457
- Publication date May 8, 2014
- TEL Epion Inc.
- Robert K. Becker
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Gas Cluster Ion Beam Process for Opening Conformal Layer in a High...
- Publication number 20130330924
- Publication date Dec 12, 2013
- TEL EPION, INC.
- Christopher OLSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CLUSTER ION BEAM PROCESS FOR OPENING CONFORMAL LAYER IN A HIGH...
- Publication number 20130330845
- Publication date Dec 12, 2013
- TEL Epion Inc.
- Christopher K. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS FOR ACHIEVING TARGET ETCH PROC...
- Publication number 20130309872
- Publication date Nov 21, 2013
- TEL Epion Inc.
- Martin D. Tabat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO ALTER SILICIDE PROPERTIES USING GCIB TREATMENT
- Publication number 20130230984
- Publication date Sep 5, 2013
- TEL Epion Inc.
- Noel Russell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO ALTER SILICIDE PROPERTIES USING GCIB TREATMENT
- Publication number 20130224950
- Publication date Aug 29, 2013
- TEL Epion Inc.
- Noel Russell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Cluster Ion Beam Etching Process for Etching Si-Containing, Ge-...
- Publication number 20130196509
- Publication date Aug 1, 2013
- TEL Epion Inc.
- Martin D. Tabat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-ALIGNED MULTI-BEAM NOZZLE/SKIMMER MODULE
- Publication number 20130082189
- Publication date Apr 4, 2013
- TEL Epion Inc.
- Robert K. Becker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE PROFILE ADJUSTMENT USING GAS CLUSTER ION BEAM PROCESSING
- Publication number 20130075366
- Publication date Mar 28, 2013
- TEL Epion Inc.
- John J. Hautala
- B44 - DECORATIVE ARTS
Information Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS FOR METAL-CONTAINING MATERIALS
- Publication number 20130059444
- Publication date Mar 7, 2013
- TEL EPION, INC.
- Yan SHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS FOR Si-CONTAINING and Ge-CONTA...
- Publication number 20130059445
- Publication date Mar 7, 2013
- TEL EPION, INC.
- Yan SHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS FOR ACHIEVING TARGET ETCH PROC...
- Publication number 20130059446
- Publication date Mar 7, 2013
- TEL EPION, INC.
- Martin D. TABAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS CLUSTER ION BEAM ETCH PROFILE CONTROL USING BEAM DIVERGENCE
- Publication number 20130059449
- Publication date Mar 7, 2013
- TEL Epion Inc.
- John J. HAUTALA
- H01 - BASIC ELECTRIC ELEMENTS

Trademarklast 30 trademarks

Information Trademark
79192328 - ULTRATRIMMER PLUS
- Serial number 79192328
- Registration number 5262979
- Filing date Jun 7, 2016
- TEL Epion Inc.
- 7 - Machines and machine tools

TEL EPION INC

Organization

Patents Grantslast 30 patents

Hybrid corrective processing system and method

Compensated location specific processing apparatus and method

Compensated location specific processing apparatus and method

Method for high throughput using beam scan size and beam position i...

Hybrid corrective processing system and method

Method of surface profile correction using gas cluster ion beam

Process gas enhancement for beam treatment of a substrate

Method and apparatus for beam deflection in a gas cluster ion beam...

Sidewall spacer patterning method using gas cluster ion beam

Multi-step location specific process for substrate edge profile cor...

Method for increasing adhesion of copper to polymeric surfaces

GCIB nozzle assembly

Gas cluster ion beam etching process for etching Si-containing, Ge-...

Pre-aligned nozzle/skimmer

Molecular beam enhanced GCIB treatment

GCIB etching method for adjusting fin height of finFET devices

Apparatus and methods for implementing predicted systematic error c...

Multi-step location specific process for substrate edge profile cor...

Method and system for growing a thin film using a gas cluster ion beam

Low contamination scanner for GCIB system

Method for modifying an etch rate of a material layer using energet...

Multiple nozzle gas cluster ion beam system

Method for enhancing a substrate using gas cluster ion beam processing

Scanner for GCIB system

Gas cluster ion beam process for opening conformal layer in a high...

Gas cluster ion beam process for opening conformal layer in a high...

Method to alter silicide properties using GCIB treatment

Method to alter silicide properties using GCIB treatment

Gas cluster ion beam etch profile control using beam divergence

Surface profile adjustment using gas cluster ion beam processing

Patents Applicationslast 30 patents

Compensated Location Specific Processing Apparatus And Method

HYBRID CORRECTIVE PROCESSING SYSTEM AND METHOD

COMPENSATED LOCATION SPECIFIC PROCESSING APPARATUS AND METHOD

METHOD FOR HIGH THROUGHPUT USING BEAM SCAN SIZE AND BEAM POSITION I...

HYBRID CORRECTIVE PROCESSING SYSTEM AND METHOD

METHOD OF SURFACE PROFILE CORRECTION USING GAS CLUSTER ION BEAM

SIDEWALL SPACER PATTERNING METHOD USING GAS CLUSTER ION BEAM

PROCESS GAS ENHANCEMENT FOR BEAM TREATMENT OF A SUBSTRATE

GCIB NOZZLE ASSEMBLY

MULTI-STEP LOCATION SPECIFIC PROCESS FOR SUBSTRATE EDGE PROFILE COR...

METHOD AND APPARATUS FOR BEAM DEFLECTION IN A GAS CLUSTER ION BEAM...

GAS CLUSTER ION BEAM ETCHING PROCESS

APPARATUS AND METHODS FOR IMPLEMENTING PREDICTED SYSTEMATIC ERROR C...

MOLECULAR BEAM ENHANCED GCIB TREATMENT

MULTI-STEP LOCATION SPECIFIC PROCESS FOR SUBSTRATE EDGE PROFILE COR...

GCIB ETCHING METHOD FOR ADJUSTING FIN HEIGHT OF FINFET DEVICES

METHOD FOR INCREASING ADHESION OF COPPER TO POLYMERIC SURFACES

PRE-ALIGNED NOZZLE/SKIMMER

Gas Cluster Ion Beam Process for Opening Conformal Layer in a High...

GAS CLUSTER ION BEAM PROCESS FOR OPENING CONFORMAL LAYER IN A HIGH...

GAS CLUSTER ION BEAM ETCHING PROCESS FOR ACHIEVING TARGET ETCH PROC...

METHOD TO ALTER SILICIDE PROPERTIES USING GCIB TREATMENT

METHOD TO ALTER SILICIDE PROPERTIES USING GCIB TREATMENT

Gas Cluster Ion Beam Etching Process for Etching Si-Containing, Ge-...

PRE-ALIGNED MULTI-BEAM NOZZLE/SKIMMER MODULE

SURFACE PROFILE ADJUSTMENT USING GAS CLUSTER ION BEAM PROCESSING

GAS CLUSTER ION BEAM ETCHING PROCESS FOR METAL-CONTAINING MATERIALS

GAS CLUSTER ION BEAM ETCHING PROCESS FOR Si-CONTAINING and Ge-CONTA...

GAS CLUSTER ION BEAM ETCHING PROCESS FOR ACHIEVING TARGET ETCH PROC...

GAS CLUSTER ION BEAM ETCH PROFILE CONTROL USING BEAM DIVERGENCE

Trademarklast 30 trademarks

79192328 - ULTRATRIMMER PLUS