TEL FSI, INC

Organization

CHASKA, MN, US

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for treating substrates with cryogenic fluid mi...
- Patent number 10,748,789
- Issue date Aug 18, 2020
- Tel FSI, Inc.
- Chimaobi W. Mbanaso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for monitoring treatment of microelectronic subst...
- Patent number 10,748,788
- Issue date Aug 18, 2020
- Tel FSI, Inc.
- Brent D. Schwab
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for spraying cryogenic fluids
- Patent number 10,625,280
- Issue date Apr 21, 2020
- Tel FSI, Inc.
- Edward D. Hanzlik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer edge lift pin design for manufacturing a semiconductor device
- Patent number 10,418,270
- Issue date Sep 17, 2019
- Tel FSI, Inc.
- Edward D. Hanzlik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for treating substrates with cryogenic fluid mi...
- Patent number 10,062,596
- Issue date Aug 28, 2018
- Tel FSI, Inc.
- Jeffery W. Butterbaugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for treating substrates with cryogenic fluid mi...
- Patent number 10,020,217
- Issue date Jul 10, 2018
- Tel FSI, Inc.
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Grant
Apparatus and method for scanning an object through a fluid stream
- Patent number 10,020,207
- Issue date Jul 10, 2018
- Tel FSI, Inc.
- Mark Goluch
- B08 - CLEANING
Information Patent Grant
Systems and methods for treating substrates with cryogenic fluid mi...
- Patent number 10,014,191
- Issue date Jul 3, 2018
- Tel FSI, Inc.
- Chimaobi W. Mbanaso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for metering a dose volume of fluid used to tre...
- Patent number 9,982,664
- Issue date May 29, 2018
- Tel FSI, Inc.
- William P. Inhofer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Processing system and method for providing a heated etching solution
- Patent number 9,911,631
- Issue date Mar 6, 2018
- Tel FSI, Inc.
- Kevin L Siefering
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methodologies for rinsing tool surfaces in tools used to process mi...
- Patent number 9,887,107
- Issue date Feb 6, 2018
- Tel FSI, Inc.
- Mark A. Stiyer
- B08 - CLEANING
Information Patent Grant
Processing system and method for providing a heated etching solution
- Patent number 9,831,107
- Issue date Nov 28, 2017
- Tel FSI, Inc.
- Kevin L Siefering
- G05 - CONTROLLING REGULATING
Information Patent Grant
Process for silicon nitride removal selective to SiGex
- Patent number 9,691,628
- Issue date Jun 27, 2017
- Tel FSI, Inc.
- Jeffery W. Butterbaugh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for treating a workpiece with arrays of nozzles
- Patent number 9,666,456
- Issue date May 30, 2017
- Tel FSI, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection of lost wafer from spinning chuck
- Patent number 9,564,378
- Issue date Feb 7, 2017
- Tel FSI, Inc.
- Alan D. Rose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of substrate temperature control during high temperature wet...
- Patent number 9,490,138
- Issue date Nov 8, 2016
- Tel FSI, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of using separate wafer contacts during wafer processing
- Patent number 9,412,639
- Issue date Aug 9, 2016
- Tel FSI, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Acid treatment strategies useful to fabricate microelectronic devic...
- Patent number 9,412,628
- Issue date Aug 9, 2016
- Tel FSI, Inc.
- David P. DeKraker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for silicon nitride removal selective to SiGex
- Patent number 9,299,570
- Issue date Mar 29, 2016
- Tel FSI, Inc.
- Jeffery W. Butterbaugh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methodologies for rinsing tool surfaces in tools used to process mi...
- Patent number 9,263,303
- Issue date Feb 16, 2016
- Tel FSI, Inc.
- Mark A. Stiyer
- B08 - CLEANING
Information Patent Grant
Process for selectively removing nitride from substrates
- Patent number 9,059,104
- Issue date Jun 16, 2015
- Tel FSI, Inc.
- Anthony S. Ratkovich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tools and methods for processing microelectronic workpieces using p...
- Patent number 9,039,840
- Issue date May 26, 2015
- Tel FSI, Inc.
- Jeffrey M. Lauerhaas
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Process for increasing the hydrophilicity of silicon surfaces follo...
- Patent number 9,017,568
- Issue date Apr 28, 2015
- Tel FSI, Inc.
- Steven L. Nelson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for treating a workpiece with arrays of nozzles
- Patent number 8,978,675
- Issue date Mar 17, 2015
- Tel FSI, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Barrier structure and nozzle device for use in tools used to proces...
- Patent number 8,967,167
- Issue date Mar 3, 2015
- Tel FSI, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for treatment of substrates with water vapor or steam
- Patent number 8,920,577
- Issue date Dec 30, 2014
- Tel FSI, Inc.
- David DeKraker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Barrier structure and nozzle device for use in tools used to proces...
- Patent number 8,899,248
- Issue date Dec 2, 2014
- Tel FSI, Inc.
- Jimmy D. Collins
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Process for removing carbon material from substrates
- Patent number 8,871,108
- Issue date Oct 28, 2014
- Tel FSI, Inc.
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for removing material from substrates
- Patent number 8,859,435
- Issue date Oct 14, 2014
- Tel FSI, Inc.
- Kurt Karl Christenson
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Tools and methods for processing microelectronic workpieces using p...
- Patent number 8,684,015
- Issue date Apr 1, 2014
- Tel FSI, Inc.
- Jeffrey M. Lauerhaas
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
TREATMENT SYSTEMS WITH REPOSITIONABLE NOZZLE USEFUL IN THE MANUFACT...
- Publication number 20200161124
- Publication date May 21, 2020
- TEL FSI, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ACHIEVING STICTION-FREE HIGH-ASPECT-RATIO MICROSTRUCTURE...
- Publication number 20200148534
- Publication date May 14, 2020
- TEL FSI, Inc.
- Brent D. Schwab
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Magnetic Integrated Lift Pin System for a Chemical Processing Chamber
- Publication number 20200020566
- Publication date Jan 16, 2020
- TEL FSI, Inc.
- William Inhofer
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SYSTEM AND METHOD FOR MONITORING TREATMENT OF MICROELECTRONIC SUBST...
- Publication number 20190337026
- Publication date Nov 7, 2019
- TEL FSI, Inc.
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Application
Pressure Control Strategies to Provide Uniform Treatment Streams in...
- Publication number 20190291144
- Publication date Sep 26, 2019
- TEL FSI, Inc.
- Kevin Siefering
- B08 - CLEANING
Information Patent Application
MICROELECTRONIC TREATMENT SYSTEM HAVING TREATMENT SPRAY WITH CONTRO...
- Publication number 20190255580
- Publication date Aug 22, 2019
- TEL FSI, Inc.
- Chimaobi W. Mbanaso
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR TREATING SUBSTRATES WITH CRYOGENIC FLUID MI...
- Publication number 20180308720
- Publication date Oct 25, 2018
- TEL FSI, Inc.
- Chimaobi W. Mbanso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR MONITORING TREATMENT OF MICROELECTRONIC SUBST...
- Publication number 20180269080
- Publication date Sep 20, 2018
- TEL FSI, Inc.
- Brent D. Schwab
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Rotating and Translating a Substrate in a P...
- Publication number 20180214915
- Publication date Aug 2, 2018
- TEL FSI, Inc.
- Jeffery W. Butterbaugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECIPE SELECTABLE DISPENSE SYSTEM AND METHOD OF OPERATING
- Publication number 20180190517
- Publication date Jul 5, 2018
- TEL FSI, Inc.
- David DeKraker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER EDGE LIFT PIN DESIGN FOR MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20180158717
- Publication date Jun 7, 2018
- TEL FSI, Inc.
- Edward D. Hanzlik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSLATING AND ROTATING CHUCK FOR PROCESSING MICROELECTRONIC SUBST...
- Publication number 20180151396
- Publication date May 31, 2018
- TEL FSI, Inc.
- Edward Deneen Hanzlik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETICALLY LEVITATED AND ROTATED CHUCK FOR PROCESSING MICROELECTR...
- Publication number 20180130694
- Publication date May 10, 2018
- TEL FSI, Inc.
- William P. Inhofer
- B08 - CLEANING
Information Patent Application
Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...
- Publication number 20180025904
- Publication date Jan 25, 2018
- TEL FSI, Inc.
- David DeKraker
- B08 - CLEANING
Information Patent Application
Apparatus for Spraying Cryogenic Fluids
- Publication number 20170341093
- Publication date Nov 30, 2017
- TEL FSI, Inc.
- Edward D. Hanzlik
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Systems & Methods for Metering a Dose Volume of Fluid used to Treat...
- Publication number 20170028418
- Publication date Feb 2, 2017
- TEL FSI, Inc.
- William P. Inhofer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...
- Publication number 20160303617
- Publication date Oct 20, 2016
- TEL FSI, Inc.
- Chimaobi W. Mbanaso
- B08 - CLEANING
Information Patent Application
METHOD FOR WET STRIPPING SILICON-CONTAINING ORGANIC LAYERS
- Publication number 20160284535
- Publication date Sep 29, 2016
- TEL FSI, Inc.
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR SCANNING AN OBJECT THROUGH A FLUID STREAM
- Publication number 20160276182
- Publication date Sep 22, 2016
- TEL FSI, Inc.
- Mark GOLUCH
- B08 - CLEANING
Information Patent Application
Detection of Lost Wafer from Spinning Chuck
- Publication number 20160172256
- Publication date Jun 16, 2016
- TEL FSI, Inc.
- Alan D. Rose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODOLOGIES FOR RINSING TOOL SURFACES IN TOOLS USED TO PROCESS MI...
- Publication number 20160163568
- Publication date Jun 9, 2016
- TEL FSI, Inc.
- Mark A. Stiyer
- B08 - CLEANING
Information Patent Application
Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...
- Publication number 20160096206
- Publication date Apr 7, 2016
- TEL FSI, Inc.
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Application
Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...
- Publication number 20160096207
- Publication date Apr 7, 2016
- TEL FSI, Inc,
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Application
Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...
- Publication number 20160096210
- Publication date Apr 7, 2016
- TEL FSI, Inc.
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Application
Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...
- Publication number 20160096209
- Publication date Apr 7, 2016
- TEL FSI, Inc.
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Application
Process for Silicon Nitride Removal Selective to SiGex
- Publication number 20160013068
- Publication date Jan 14, 2016
- TEL FSI, Inc.
- Jeffery W. Butterbaugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR TREATING A WORKPIECE WITH ARRAYS OF NOZZLES
- Publication number 20150170941
- Publication date Jun 18, 2015
- TEL FSI, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF USING SEPARATE WAFER CONTACTS DURING WAFER PROCESSING
- Publication number 20150162207
- Publication date Jun 11, 2015
- TEL FSI, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SUBSTRATE TEMPERATURE CONTROL DURING HIGH TEMPERATURE WET...
- Publication number 20150162211
- Publication date Jun 11, 2015
- TEL FSI, Inc.
- Kevin L. Siefering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BARRIER STRUCTURE AND NOZZLE DEVICE FOR USE IN TOOLS USED TO PROCES...
- Publication number 20150075569
- Publication date Mar 19, 2015
- TEL FSI, Inc.
- Jimmy D. Collins
- H01 - BASIC ELECTRIC ELEMENTS

TEL FSI, INC

Organization

Patents Grantslast 30 patents

Systems and methods for treating substrates with cryogenic fluid mi...

System and method for monitoring treatment of microelectronic subst...

Apparatus for spraying cryogenic fluids

Wafer edge lift pin design for manufacturing a semiconductor device

Systems and methods for treating substrates with cryogenic fluid mi...

Systems and methods for treating substrates with cryogenic fluid mi...

Apparatus and method for scanning an object through a fluid stream

Systems and methods for treating substrates with cryogenic fluid mi...

Systems and methods for metering a dose volume of fluid used to tre...

Processing system and method for providing a heated etching solution

Methodologies for rinsing tool surfaces in tools used to process mi...

Processing system and method for providing a heated etching solution

Process for silicon nitride removal selective to SiGex

Method and apparatus for treating a workpiece with arrays of nozzles

Detection of lost wafer from spinning chuck

Method of substrate temperature control during high temperature wet...

Method of using separate wafer contacts during wafer processing

Acid treatment strategies useful to fabricate microelectronic devic...

Process for silicon nitride removal selective to SiGex

Methodologies for rinsing tool surfaces in tools used to process mi...

Process for selectively removing nitride from substrates

Tools and methods for processing microelectronic workpieces using p...

Process for increasing the hydrophilicity of silicon surfaces follo...

Method and apparatus for treating a workpiece with arrays of nozzles

Barrier structure and nozzle device for use in tools used to proces...

Process for treatment of substrates with water vapor or steam

Barrier structure and nozzle device for use in tools used to proces...

Process for removing carbon material from substrates

Process for removing material from substrates

Tools and methods for processing microelectronic workpieces using p...

Patents Applicationslast 30 patents

TREATMENT SYSTEMS WITH REPOSITIONABLE NOZZLE USEFUL IN THE MANUFACT...

METHOD FOR ACHIEVING STICTION-FREE HIGH-ASPECT-RATIO MICROSTRUCTURE...

Magnetic Integrated Lift Pin System for a Chemical Processing Chamber

SYSTEM AND METHOD FOR MONITORING TREATMENT OF MICROELECTRONIC SUBST...

Pressure Control Strategies to Provide Uniform Treatment Streams in...

MICROELECTRONIC TREATMENT SYSTEM HAVING TREATMENT SPRAY WITH CONTRO...

SYSTEMS AND METHODS FOR TREATING SUBSTRATES WITH CRYOGENIC FLUID MI...

SYSTEM AND METHOD FOR MONITORING TREATMENT OF MICROELECTRONIC SUBST...

Systems and Methods for Rotating and Translating a Substrate in a P...

RECIPE SELECTABLE DISPENSE SYSTEM AND METHOD OF OPERATING

WAFER EDGE LIFT PIN DESIGN FOR MANUFACTURING A SEMICONDUCTOR DEVICE

TRANSLATING AND ROTATING CHUCK FOR PROCESSING MICROELECTRONIC SUBST...

MAGNETICALLY LEVITATED AND ROTATED CHUCK FOR PROCESSING MICROELECTR...

Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...

Apparatus for Spraying Cryogenic Fluids

Systems & Methods for Metering a Dose Volume of Fluid used to Treat...

Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...

METHOD FOR WET STRIPPING SILICON-CONTAINING ORGANIC LAYERS

APPARATUS AND METHOD FOR SCANNING AN OBJECT THROUGH A FLUID STREAM

Detection of Lost Wafer from Spinning Chuck

METHODOLOGIES FOR RINSING TOOL SURFACES IN TOOLS USED TO PROCESS MI...

Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...

Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...

Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...

Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...

Process for Silicon Nitride Removal Selective to SiGex

METHOD AND APPARATUS FOR TREATING A WORKPIECE WITH ARRAYS OF NOZZLES

METHOD OF USING SEPARATE WAFER CONTACTS DURING WAFER PROCESSING

METHOD OF SUBSTRATE TEMPERATURE CONTROL DURING HIGH TEMPERATURE WET...

BARRIER STRUCTURE AND NOZZLE DEVICE FOR USE IN TOOLS USED TO PROCES...

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