Tel-Varian Limited

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Nirasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Treatment apparatus
- Patent number 5,728,276
- Issue date Mar 17, 1998
- TEL Varian Limited
- Jiro Katsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus with collimator exchange device
- Patent number 5,624,536
- Issue date Apr 29, 1997
- TEL Varian Limited
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus with an invertible collimator and a processing...
- Patent number 5,584,973
- Issue date Dec 17, 1996
- TEL Varian Limited
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-chamber system provided with carrier units
- Patent number 5,474,410
- Issue date Dec 12, 1995
- Tel-Varian Limited
- Masahito Ozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selectable feedback control system
- Patent number 5,448,147
- Issue date Sep 5, 1995
- Tel-Varian Limited
- Shigeru Kasai
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor processing apparatus
- Patent number 5,445,675
- Issue date Aug 29, 1995
- Tel-Varian Limited
- Masao Kubodera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

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