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The Institute of Optics and Electronics
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Sichaun, CN
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Patents Grants
last 30 patents
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Patent Grant
Method for detecting focal plane based on grating talbot effect
Patent number
10,025,205
Issue date
Jul 17, 2018
The Institute of Optics and Electronics
Xianchang Zhu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Focus detection apparatus for projection lithography system
Patent number
8,760,626
Issue date
Jun 24, 2014
The Institute of Optics and Electronics
Jinlong Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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