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The Silicon Valley Group, Inc.
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for drying wafers
Patent number
4,313,266
Issue date
Feb 2, 1982
The Silicon Valley Group, Inc.
Johann Tam
C30 - CRYSTAL GROWTH
Information
Patent Grant
Conveyor system
Patent number
4,217,977
Issue date
Aug 19, 1980
The Silicon Valley Group, Inc.
Johann Tam
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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last 30 trademarks