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THERM-X OF CALIFORNIA, INC
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HAYWARD, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
High temperature aluminum nitride heater pedestal with multi-zone c...
Patent number
12,020,956
Issue date
Jun 25, 2024
Therm-X of California, Inc.
Annendra Lal
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
HIGH TEMPERATURE ALUMINUM NITRIDE HEATER PEDESTAL WITH MULTI-ZONE C...
Publication number
20240347353
Publication date
Oct 17, 2024
Therm-X of California, Inc.
Annendra Lal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH TEMPERATURE ALUMINUM NITRIDE HEATER PEDESTAL WITH MULTI-ZONE C...
Publication number
20200350186
Publication date
Nov 5, 2020
Therm-X of California, Inc.
Annendra Lal
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
HEATER PLATE WITH EMBEDDED HYPER-CONDUCTIVE THERMAL DIFFUSION LAYER...
Publication number
20110132896
Publication date
Jun 9, 2011
THERM-X OF CALIFORNIA
Phillip G. Quinton, Jr.
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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