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Iwate, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer holding apparatus and baseplate structure
Patent number
10,847,401
Issue date
Nov 24, 2020
Shinko Electric Industries Co., Ltd.
Norio Shiraiwa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
WAFER HOLDING APPARATUS AND BASEPLATE STRUCTURE
Publication number
20170372934
Publication date
Dec 28, 2017
Shinko Electric Industries Co., Ltd.
Norio SHIRAIWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRAP APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Publication number
20150107771
Publication date
Apr 23, 2015
TOHOKU SEIMITSU CO., LTD.
Atsushi KOBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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