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TOKYO OHA KOGYO CO., LTD.
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Kawasaki-shi, JP
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last 30 patents
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Patent Grant
Negative resist composition, method of forming resist pattern, and...
Patent number
9,366,960
Issue date
Jun 14, 2016
TOKYO OHA KOGYO CO., LTD.
Naoki Yamashita
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
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Patent Application
POSITIVE RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN
Publication number
20090098483
Publication date
Apr 16, 2009
TOKYO OHA KOGYO CO., LTD.
Yohei Kinoshita
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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