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Kawaski, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Positive resist composition for immersion lithography and method fo...
Patent number
7,799,507
Issue date
Sep 21, 2010
Tokyo Ohka Co., Ltd.
Kotaro Endo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Processing apparatus for substrates
Patent number
5,980,684
Issue date
Nov 9, 1999
Tokyo Ohka Co., Ltd.
Hisashi Hori
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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