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Tosoh SMD ETNA, LLC
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Grove City, OH, US
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Patents Grants
last 30 patents
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Patent Grant
Automated sputtering target production and sub systems thereof
Patent number
7,480,976
Issue date
Jan 27, 2009
Tosoh SMD Etna, LLC
Wiley Zane Reed
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patents Applications
last 30 patents
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Patent Application
Automated Sputtering Target Production
Publication number
20080271305
Publication date
Nov 6, 2008
Tosoh SMD ETNA, LLC
Wiley Zane Reed
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Automated Sputtering Target Production
Publication number
20080221721
Publication date
Sep 11, 2008
Tosoh SMD ETNA, LLC
Wiley Zane Reed
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
End Effector For Handling Sputter Targets
Publication number
20080203641
Publication date
Aug 28, 2008
Tosoh SMD ETNA, LLC
Wiley Zane Reed
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...