TOUCH MICRO-SYSTEM TECHNOLOGY CO., LTD

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  • TAOYUAN HSIEN, TW

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  • Information Patent Grant

    Method for bonding wafers

    • Patent number 7,192,842
    • Issue date Mar 20, 2007
    • Touch Micro-Systems Technology Inc.
    • Shih-Feng Shao
    • B81 - MICRO-STRUCTURAL TECHNOLOGY

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