TOUCH MICRO-SYSTEM TECHNOLOGY CORP.

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Yang-Mei Town, KR

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Information Patent Application
MEMS DEVICE AND COMPOSITE SUBSTRATE FOR AN MEMS DEVICE
- Publication number 20120086086
- Publication date Apr 12, 2012
- TOUCH MICRO-SYSTEM TECHNOLOGY CORP.
- Hung-Yi LIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY

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