TRUMPF Lasersystems for Semiconductor Manufacturing GmbH

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Ditzingen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Optical assembly, in particular for polarization of a laser beam, a...
- Patent number 12,153,276
- Issue date Nov 26, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Oliver Erichson
- G02 - OPTICS
Information Patent Grant
Laser focussing module
- Patent number 12,007,693
- Issue date Jun 11, 2024
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Faraday rotators, optical isolators, driver laser arrangements and...
- Patent number 11,988,909
- Issue date May 21, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Steffen Erhard
- G02 - OPTICS
Information Patent Grant
EUV light source with a separation device
- Patent number 11,968,767
- Issue date Apr 23, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Oliver Schlosser
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Focusing device and EUV radiation generating device having same
- Patent number 11,835,699
- Issue date Dec 5, 2023
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for adjusting a laser beam, apparatus for providing an adjus...
- Patent number 11,764,538
- Issue date Sep 19, 2023
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Jonathan Mueller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reflective optical element, beam guiding device and EUV-beam genera...
- Patent number 11,675,202
- Issue date Jun 13, 2023
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Arrangement for monitoring an optical element, laser source and euv...
- Patent number 11,322,902
- Issue date May 3, 2022
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Joachim Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polarizer
- Patent number 11,304,286
- Issue date Apr 12, 2022
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Tolga Ergin
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for determining at least one beam propagation parameter of a...
- Patent number 11,243,114
- Issue date Feb 8, 2022
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Viktor Granson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Linear polarization of a laser beam
- Patent number 10,884,255
- Issue date Jan 5, 2021
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Guenther Krauss
- G02 - OPTICS
Information Patent Grant
Elongating a travel path of a light beam by an optical delay device
- Patent number 10,739,572
- Issue date Aug 11, 2020
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Joachim Schulz
- G01 - MEASURING TESTING
Information Patent Grant
Exteme ultraviolet radiation producing systems with driver laser sy...
- Patent number 10,644,473
- Issue date May 5, 2020
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Jens Brunne
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Amplifying laser pulses having different wavelengths for EUV radiat...
- Patent number 10,638,589
- Issue date Apr 28, 2020
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Matthias Wissert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adjusting a beam diameter and an aperture angle of a laser beam
- Patent number 10,327,318
- Issue date Jun 18, 2019
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Beam trap, beam guide device, EUV radiation generating apparatus, a...
- Patent number 10,264,660
- Issue date Apr 16, 2019
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Amplifying pulsed laser radiation for EUV radiation production
- Patent number 10,186,827
- Issue date Jan 22, 2019
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Joachim Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monitoring laser beams
- Patent number 10,044,167
- Issue date Aug 7, 2018
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Joachim Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Amplifying pulsed laser radiation for EUV radiation production
- Patent number 10,027,083
- Issue date Jul 17, 2018
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Joachim Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EUV radiation generating device including a beam influencing optica...
- Patent number 9,642,235
- Issue date May 2, 2017
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Joachim Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam guiding apparatus
- Patent number 9,596,743
- Issue date Mar 14, 2017
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Andreas Enzmann
- G02 - OPTICS
Information Patent Grant
Beam guiding apparatus
- Patent number 9,575,324
- Issue date Feb 21, 2017
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- G02 - OPTICS
Information Patent Grant
Optical arrangement, optical module, and method for correctly posit...
- Patent number 9,323,026
- Issue date Apr 26, 2016
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- G02 - OPTICS
Information Patent Grant
Device for amplifying a laser beam
- Patent number 9,306,367
- Issue date Apr 5, 2016
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Joachim Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EUV excitation light source with a laser beam source and a beam gui...
- Patent number 9,129,717
- Issue date Sep 8, 2015
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
EUV LIGHT SOURCE WITH A BEAM POSITIONING DEVICE
- Publication number 20240357726
- Publication date Oct 24, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND DEVICE FOR GENERATING LASER PULSES
- Publication number 20240255767
- Publication date Aug 1, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Joachim SCHULZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CHANGING THE POLARIZATION OF A LASER
- Publication number 20240198452
- Publication date Jun 20, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Morris Dahlinger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FOCUSING DEVICE HAVING AN IMAGE PLANE EXTENDING PARALLEL OR CONGRUE...
- Publication number 20240168306
- Publication date May 23, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Boris Regaard
- G02 - OPTICS
Information Patent Application
CO2 BEAM SOURCE COMPRISING A CATALYST
- Publication number 20240120700
- Publication date Apr 11, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Jonathan MUELLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EUV EXCITATION LIGHT SOURCE AND EUV LIGHT SOURCE
- Publication number 20240074023
- Publication date Feb 29, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Stefan Piehler
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV LIGHT SOURCE WITH A SEPARATION DEVICE
- Publication number 20240057243
- Publication date Feb 15, 2024
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Oliver Schlosser
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
OPTICAL ASSEMBLY, IN PARTICULAR FOR POLARIZATION OF A LASER BEAM, A...
- Publication number 20230118278
- Publication date Apr 20, 2023
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Oliver Erichson
- G02 - OPTICS
Information Patent Application
ADJUSTABLE OPTICAL ARRANGEMENT
- Publication number 20230113801
- Publication date Apr 13, 2023
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Dieter Burger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM GUIDE AND POSITIONING DEVICE FOR POSITIONING A SCRAPER MIRROR,...
- Publication number 20230047967
- Publication date Feb 16, 2023
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- William Bettridge
- G02 - OPTICS
Information Patent Application
LASER FOCUSSING MODULE
- Publication number 20220206397
- Publication date Jun 30, 2022
- ASML NETHERLANDS B.V.
- Ruud Antonius Catharina Maria BEERENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ADJUSTING A LASER BEAM, APPARATUS FOR PROVIDING AN ADJUS...
- Publication number 20220006254
- Publication date Jan 6, 2022
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Jonathan Mueller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARRANGEMENT FOR MONITORING AN OPTICAL ELEMENT, LASER SOURCE AND EUV...
- Publication number 20210351554
- Publication date Nov 11, 2021
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Joachim Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSING DEVICE AND EUV RADIATION GENERATING DEVICE HAVING SAME
- Publication number 20210063712
- Publication date Mar 4, 2021
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- G02 - OPTICS
Information Patent Application
REFLECTIVE OPTICAL ELEMENT, BEAM GUIDING DEVICE AND EUV-BEAM GENERA...
- Publication number 20210041708
- Publication date Feb 11, 2021
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- G02 - OPTICS
Information Patent Application
FARADAY ROTATORS, OPTICAL ISOLATORS, DRIVER LASER ARRANGEMENTS AND...
- Publication number 20200379281
- Publication date Dec 3, 2020
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Steffen Erhard
- G02 - OPTICS
Information Patent Application
POLARIZER
- Publication number 20200154554
- Publication date May 14, 2020
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Tolga Ergin
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR DETERMINING AT LEAST ONE BEAM PROPAGATION PARAMETER OF A...
- Publication number 20200088570
- Publication date Mar 19, 2020
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Viktor Granson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET RADIATION PRODUCING SYSTEMS WITH DRIVER LASER S...
- Publication number 20180375278
- Publication date Dec 27, 2018
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Jens Brunne
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
AMPLIFYING LASER PULSES HAVING DIFFERENT WAVELENGTHS FOR EUV RADIAT...
- Publication number 20180279459
- Publication date Sep 27, 2018
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Matthias Wissert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEAR POLARIZATION OF A LASER BEAM
- Publication number 20180231790
- Publication date Aug 16, 2018
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Guenther Krauss
- G02 - OPTICS
Information Patent Application
Beam Trap, Beam Guide Device, EUV Radiation Generating Apparatus, a...
- Publication number 20170367167
- Publication date Dec 21, 2017
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- G02 - OPTICS
Information Patent Application
Adjusting a Beam Diameter and an Aperture Angle of a Laser Beam
- Publication number 20170325325
- Publication date Nov 9, 2017
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- G02 - OPTICS
Information Patent Application
Elongating a Travel Path of a Light Beam by an Optical Delay Device
- Publication number 20170160527
- Publication date Jun 8, 2017
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Joachim Schulz
- G02 - OPTICS
Information Patent Application
Amplifying Pulsed Laser Radiation for EUV Radiation Production
- Publication number 20170149202
- Publication date May 25, 2017
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Joachim Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Monitoring Laser Beams
- Publication number 20170085054
- Publication date Mar 23, 2017
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Joachim Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam Guiding Apparatus
- Publication number 20160195729
- Publication date Jul 7, 2016
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Martin Lambert
- G02 - OPTICS
Information Patent Application
Beam Guiding Apparatus
- Publication number 20160198557
- Publication date Jul 7, 2016
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Andreas Enzmann
- G02 - OPTICS
Information Patent Application
EUV Radiation Generating Device Including a Beam Influencing Optica...
- Publication number 20160135275
- Publication date May 12, 2016
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Joachim Schulz
- H01 - BASIC ELECTRIC ELEMENTS

TRUMPF Lasersystems for Semiconductor Manufacturing GmbH

Organization

Patents Grantslast 30 patents

Optical assembly, in particular for polarization of a laser beam, a...

Laser focussing module

Faraday rotators, optical isolators, driver laser arrangements and...

EUV light source with a separation device

Focusing device and EUV radiation generating device having same

Method for adjusting a laser beam, apparatus for providing an adjus...

Reflective optical element, beam guiding device and EUV-beam genera...

Arrangement for monitoring an optical element, laser source and euv...

Polarizer

Method for determining at least one beam propagation parameter of a...

Linear polarization of a laser beam

Elongating a travel path of a light beam by an optical delay device

Exteme ultraviolet radiation producing systems with driver laser sy...

Amplifying laser pulses having different wavelengths for EUV radiat...

Adjusting a beam diameter and an aperture angle of a laser beam

Beam trap, beam guide device, EUV radiation generating apparatus, a...

Amplifying pulsed laser radiation for EUV radiation production

Monitoring laser beams

Amplifying pulsed laser radiation for EUV radiation production

EUV radiation generating device including a beam influencing optica...

Beam guiding apparatus

Beam guiding apparatus

Optical arrangement, optical module, and method for correctly posit...

Device for amplifying a laser beam

EUV excitation light source with a laser beam source and a beam gui...

Patents Applicationslast 30 patents

EUV LIGHT SOURCE WITH A BEAM POSITIONING DEVICE

METHOD AND DEVICE FOR GENERATING LASER PULSES

METHOD FOR CHANGING THE POLARIZATION OF A LASER

FOCUSING DEVICE HAVING AN IMAGE PLANE EXTENDING PARALLEL OR CONGRUE...

CO2 BEAM SOURCE COMPRISING A CATALYST

EUV EXCITATION LIGHT SOURCE AND EUV LIGHT SOURCE

EUV LIGHT SOURCE WITH A SEPARATION DEVICE

OPTICAL ASSEMBLY, IN PARTICULAR FOR POLARIZATION OF A LASER BEAM, A...

ADJUSTABLE OPTICAL ARRANGEMENT

BEAM GUIDE AND POSITIONING DEVICE FOR POSITIONING A SCRAPER MIRROR,...

LASER FOCUSSING MODULE

METHOD FOR ADJUSTING A LASER BEAM, APPARATUS FOR PROVIDING AN ADJUS...

ARRANGEMENT FOR MONITORING AN OPTICAL ELEMENT, LASER SOURCE AND EUV...

FOCUSING DEVICE AND EUV RADIATION GENERATING DEVICE HAVING SAME

REFLECTIVE OPTICAL ELEMENT, BEAM GUIDING DEVICE AND EUV-BEAM GENERA...

FARADAY ROTATORS, OPTICAL ISOLATORS, DRIVER LASER ARRANGEMENTS AND...

POLARIZER

METHOD FOR DETERMINING AT LEAST ONE BEAM PROPAGATION PARAMETER OF A...

EXTREME ULTRAVIOLET RADIATION PRODUCING SYSTEMS WITH DRIVER LASER S...

AMPLIFYING LASER PULSES HAVING DIFFERENT WAVELENGTHS FOR EUV RADIAT...

LINEAR POLARIZATION OF A LASER BEAM

Beam Trap, Beam Guide Device, EUV Radiation Generating Apparatus, a...

Adjusting a Beam Diameter and an Aperture Angle of a Laser Beam

Elongating a Travel Path of a Light Beam by an Optical Delay Device

Amplifying Pulsed Laser Radiation for EUV Radiation Production

Monitoring Laser Beams

Beam Guiding Apparatus

Beam Guiding Apparatus

EUV Radiation Generating Device Including a Beam Influencing Optica...

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