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Uha Mikakuto Precision Engineering Research Institute Co., Ltd.
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Osaka, JP
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Patent Grant
High-speed film forming method by microwave plasma chemical vapor d...
Patent number
5,310,426
Issue date
May 10, 1994
Uha Mikakuto Precision Engineering Research Institute Co., Ltd.
Yuzo Mori
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High-speed film forming method by microwave plasma chemical vapor d...
Patent number
5,037,666
Issue date
Aug 6, 1991
Uha Mikakuto Precision Engineering Research Institute Co., Ltd.
Yuzo Mori
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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