ULCOAT (ULVAC COATING CORPORATION

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SAITAMA-KEN, JP

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Method of manufacturing phase-shifting photomask blank
- Patent number 5,938,897
- Issue date Aug 17, 1999
- Ulcoat (Ulvac Coating Corporation)
- Akihiko Isao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

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