ULVAC COATING CORPORATION

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SAITAMA, JP

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Patents Grantslast 30 patents

Information Patent Grant
Half-tone mask, half-tone mask blank and method for manufacturing h...
- Patent number 8,216,745
- Issue date Jul 10, 2012
- Ulvac Coating Corporation
- Kagehiro Kageyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shifter film and process for the same
- Patent number 7,282,308
- Issue date Oct 16, 2007
- Ulvac Coating Corporation
- Susumu Kawada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phase shifter film and process for the same
- Patent number 7,090,947
- Issue date Aug 15, 2006
- Ulvac Coating Corporation
- Susumu Kawada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for dry-etching half-tone phase-shift films, h...
- Patent number 7,063,922
- Issue date Jun 20, 2006
- Ulvac Coating Corporation
- Takaei Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for dry-etching half-tone phase-shift films, h...
- Patent number 7,001,698
- Issue date Feb 21, 2006
- Ulvac Coating Corporation
- Takaei Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry-etching method and apparatus, photomasks and method for the pre...
- Patent number 6,881,991
- Issue date Apr 19, 2005
- Ulvac Coating Corporation
- Satoshi Aoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry-etching method and apparatus, photomasks and method for the pre...
- Patent number 6,844,117
- Issue date Jan 18, 2005
- ULVAC Coating Corp.
- Takaei Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Phase-shifting photomask blank, phase-shifting photomask, method fo...
- Patent number 6,689,515
- Issue date Feb 10, 2004
- Ulvac Coating Corporation
- Nobuyuki Yoshioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
METHOD AND APPARATUS FOR DRY-ETCHING HALF-TONE PHASE-SHIFT FILMS HA...
- Patent number 6,685,848
- Issue date Feb 3, 2004
- Ulvac Coating Corporation
- Takaei Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phase-shift photo mask blank, phase-shift photo mask and method for...
- Patent number 6,569,577
- Issue date May 27, 2003
- Ulvac Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dry-etching method and apparatus, photomasks and method for the pre...
- Patent number 6,391,791
- Issue date May 21, 2002
- Ulvac Coating Corporation
- Takaei Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase-shifting photomask blank, phase-shifting photomask, method fo...
- Patent number 6,228,541
- Issue date May 8, 2001
- Ulvac Coating Corporation
- Akihiko Isao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phase-shifting photomask blank and method of manufacturing the same...
- Patent number 5,952,128
- Issue date Sep 14, 1999
- Ulvac Coating Corporation
- Akihiko Isao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,830,607
- Issue date Nov 3, 1998
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,691,090
- Issue date Nov 25, 1997
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,674,647
- Issue date Oct 7, 1997
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,629,114
- Issue date May 13, 1997
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase-shifting photomask blank, phase-shifting photomask, and metho...
- Patent number 5,605,776
- Issue date Feb 25, 1997
- Ulvac Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and manufacturing method thereof
- Patent number 5,482,799
- Issue date Jan 9, 1996
- Mitsubishi Denki Kabushiki Kaisha
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,474,864
- Issue date Dec 12, 1995
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
QUARTZ ETCHING METHOD AND ETCHED SUBSTRATE
- Publication number 20220048811
- Publication date Feb 17, 2022
- ULVAC COATING CORPORATION
- Tomoaki KOJIMA
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
PROCESS FOR PRODUCING GRAY TONE MASK
- Publication number 20100294651
- Publication date Nov 25, 2010
- ULVAC COATING CORPORATION
- Fumihiko Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK BLANK, PRODUCTION METHOD OF MASK BLANK AND PRODUCTION METHOD O...
- Publication number 20100273098
- Publication date Oct 28, 2010
- ULVAC COATING CORPORAATION
- Takumi Ogawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HALF-TONE MASK, HALF-TONE MASK BLANK AND METHOD FOR MANUFACTURING H...
- Publication number 20100261096
- Publication date Oct 14, 2010
- ULVAC COATING CORPORATION
- Kagehiro Kageyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Phase shifter film and process for the same
- Publication number 20070009810
- Publication date Jan 11, 2007
- ULVAC COATING CORPORATION
- Susumu Kawada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for dry-etching half-tone phase-shift films, h...
- Publication number 20050011862
- Publication date Jan 20, 2005
- Ulvac Coating Corporation
- Takaei Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for dry-etching half-tone phase-shift films, h...
- Publication number 20040101767
- Publication date May 27, 2004
- Ulvac Coating Corporation
- Takaei Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for dry-etching half-tone phase-shift films, h...
- Publication number 20040094504
- Publication date May 20, 2004
- Ulvac Coating Corporation
- Takaei Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dry-etching method and apparatus, photomasks and method for the pre...
- Publication number 20020155723
- Publication date Oct 24, 2002
- Ulvac Coating Corporation
- Takaei Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dry-etching method and apparatus, photomasks and method for the pre...
- Publication number 20020139476
- Publication date Oct 3, 2002
- Ulvac Coating Corporation
- Takaei Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dry-etching method and apparatus, photomasks and method for the pre...
- Publication number 20020136967
- Publication date Sep 26, 2002
- Ulvac Coating Corporation
- Takaei Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Phase shifter film and process for the same
- Publication number 20020009653
- Publication date Jan 24, 2002
- ULVAC COATING CORPORATION and MITSUBISHI DENKI KABUSHIKI KAISHA
- Susumu Kawada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Phase-shifting photomask blank, phase-shifting photomask, method fo...
- Publication number 20010018154
- Publication date Aug 30, 2001
- Ulvac Coating Corporation
- Nobuyuki Yoshioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Trademarklast 30 trademarks

Information Trademark
77614482 - ULCOAT
- Serial number 77614482
- Registration number 3764702
- Filing date Nov 14, 2008
- ULVAC COATING CORPORATION
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

ULVAC COATING CORPORATION

Organization

Patents Grantslast 30 patents

Half-tone mask, half-tone mask blank and method for manufacturing h...

Phase shifter film and process for the same

Phase shifter film and process for the same

Method and apparatus for dry-etching half-tone phase-shift films, h...

Method and apparatus for dry-etching half-tone phase-shift films, h...

Dry-etching method and apparatus, photomasks and method for the pre...

Dry-etching method and apparatus, photomasks and method for the pre...

Phase-shifting photomask blank, phase-shifting photomask, method fo...

METHOD AND APPARATUS FOR DRY-ETCHING HALF-TONE PHASE-SHIFT FILMS HA...

Phase-shift photo mask blank, phase-shift photo mask and method for...

Dry-etching method and apparatus, photomasks and method for the pre...

Phase-shifting photomask blank, phase-shifting photomask, method fo...

Phase-shifting photomask blank and method of manufacturing the same...

Phase shift mask and manufacturing method thereof and exposure meth...

Phase shift mask and manufacturing method thereof and exposure meth...

Phase shift mask and manufacturing method thereof and exposure meth...

Phase shift mask and manufacturing method thereof and exposure meth...

Phase-shifting photomask blank, phase-shifting photomask, and metho...

Phase shift mask and manufacturing method thereof

Phase shift mask and manufacturing method thereof and exposure meth...

Patents Applicationslast 30 patents

QUARTZ ETCHING METHOD AND ETCHED SUBSTRATE

PROCESS FOR PRODUCING GRAY TONE MASK

MASK BLANK, PRODUCTION METHOD OF MASK BLANK AND PRODUCTION METHOD O...

HALF-TONE MASK, HALF-TONE MASK BLANK AND METHOD FOR MANUFACTURING H...

Phase shifter film and process for the same

Method and apparatus for dry-etching half-tone phase-shift films, h...

Method and apparatus for dry-etching half-tone phase-shift films, h...

Method and apparatus for dry-etching half-tone phase-shift films, h...

Dry-etching method and apparatus, photomasks and method for the pre...

Dry-etching method and apparatus, photomasks and method for the pre...

Dry-etching method and apparatus, photomasks and method for the pre...

Phase shifter film and process for the same

Phase-shifting photomask blank, phase-shifting photomask, method fo...

Trademarklast 30 trademarks

77614482 - ULCOAT