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Cryopump and baffle plate for cryopump
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Patent number 11,661,931
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Issue date May 30, 2023
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Ulvac Cryogenics Incorporated
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Shunichi Sekiguchi
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Holding apparatus
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Patent number 10,763,153
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Issue date Sep 1, 2020
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ULVAC, Inc.
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Yukihito Tashiro
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H01 - BASIC ELECTRIC ELEMENTS
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Regenerator and cryogenics pump
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Patent number 7,594,406
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Issue date Sep 29, 2009
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Ulvac Cryogenics, Inc.
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Yoshinobu Murayama
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F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...