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Chigasaki, JP
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Patent Grant
Apparatus for measuring impurities in super-pure water without expo...
Patent number
4,680,552
Issue date
Jul 14, 1987
Erma Optical Works, Ltd.
Kozo Shirato
G01 - MEASURING TESTING
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Patent Grant
Apparatus for controlling an infinitesimal flow rate of fluid
Patent number
4,670,138
Issue date
Jun 2, 1987
Ulvac Service Corporation
Toru Yunoki
G05 - CONTROLLING REGULATING
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