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Yokohama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for removing organic films
Patent number
6,851,873
Issue date
Feb 8, 2005
Nomura Micro Science Co., Ltd.
Hisashi Muraoka
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Method and apparatus for removing organic films
Patent number
6,696,228
Issue date
Feb 24, 2004
UMS Co., Ltd.
Hisashi Muraoka
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR PURIFYING ALKALINE TREATMENT FLUID FOR SEMICONDUCTOR SUB...
Publication number
20130174868
Publication date
Jul 11, 2013
UMS CO., LTD.
Hisashi Muraoka
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Method and apparatus for removing organic films
Publication number
20030108823
Publication date
Jun 12, 2003
UMS Co., Ltd.
Hisashi Muraoka
B08 - CLEANING
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