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Ustav Pocitacovych systemov, Slovenska adademia vled
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Bratislava, SK
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Patent Grant
Process for producing a carbon film on a substrate
Patent number
6,136,160
Issue date
Oct 24, 2000
IMS Ionen Mikrofabrikations Systeme GmbH
Pavol Hrkut
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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